Dual gate and single actuator system

Patent metadata

Field	Value
Publication number	US-11328943-B2
Application number	US-202016839360-A
Country	US
Kind code	B2
Filing date	Apr 3, 2020
Priority date	Apr 3, 2020
Publication date	May 10, 2022
Grant date	May 10, 2022

Abstract

Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems. The dual gate system may have a first gate, a second gate, a gate connector coupled to the first gate and to the second gate, and actuator coupled to the gate connector. The actuator is configured to seal the first gate against a first slot or open the first slot via vertical motion. The actuator is also configured to seal the second gate against a second slot or open the second slot via a combination of vertical motion and horizontal motion.

First claim

What is claimed is:

1. A dual gate system, comprising:
a first gate configured to form a first seal against a first slot;
a second gate configured to form a second seal against a second slot that is opposite the first slot;
a gate connector coupled to the first gate and the second gate; and
an actuator coupled to the gate connector, wherein the actuator is configured to:
seal the first gate against the first slot by moving the gate connector, the first gate, and the second gate together to an intermediate position, and then moving the gate connector, the first gate, and the second gate together vertically to a first sealed gate position, wherein to open the first gate from the first sealed gate position, the actuator is configured to move the gate connector, the first gate, and the second gate together downward from the first sealed gate position, past the intermediate position, to an open gate position; and
seal the second gate against the second slot by moving the gate connector, the first gate, and the second gate together to the intermediate position, and then moving the gate connector, the first gate, and the second gate together horizontally to a second sealed gate position, wherein to open the second gate from the second sealed gate position, the actuator is configured to move the gate connector, the first gate, and the second gate together horizontally from the second sealed gate position to the intermediate position, and to subsequently move the gate connector, the first gate, and the second gate together downward to the open gate position, wherein both the first gate and the second gate are open in the open gate position.

2. The port of claim 1 , wherein the first gate is a MonoVat gate and the second gate is an L-motion gate.

3. The port of claim 1 , wherein the actuator is configured to close the first gate by moving the gate connector, the first gate, and the second gate together in an upward direction to the first sealed gate position, and wherein upward movement of the first gate to the first sealed gate position causes one or more o-ring on at least one of the first gate or a first side comprising the first slot to become compressed between the first gate and the first side.

4. The port of claim 1 , wherein to open a sealed first gate the actuator is configured to:
move the gate connector, the first gate, and the second gate downward from the first sealed gate position, past the intermediate position, to an open gate position.

5. The port of claim 4 , wherein both the first gate and the second gate are open in the open gate position.

6. The port of claim 1 , wherein to open a sealed second gate the actuator is configured to:
move the gate connector, the first gate, and the second gate horizontally from the second sealed gate position to the intermediate position, and to subsequently move the gate connector, the first gate, and the second gate downward to an open gate position.

7. The port of claim 6 , wherein both the first gate and the second gate are open in the open gate position.

8. The port of claim 1 , wherein the first gate and the second gate are both removable from the gate connector.

9. A method comprising:
moving together a first gate, a second gate, and a gate connector coupled to the first gate and to the second gate from an open gate position to an intermediate position; and then
either:
moving together the gate connector, the first gate, and the second gate vertically to a first sealed gate position, the first sealed gate position comprising a first seal against a first slot on a first side of a housing containing the first gate, the second gate, and the gate connector, wherein to open the first gate from the first sealed gate position, moving together the gate connector, the first gate, and the second gate together downward from the first sealed gate position, past the intermediate position, to an open gate position, or
moving together the gate connector, the first gate, and the second gate horizontally to a second sealed gate position, the second sealed gate position comprising a second seal against a second slot on a second side of the housing, wherein the second side is opposite to the first side, wherein to open the second gate from the second sealed gate position, moving together the gate connector, the first gate, and the second gate together horizontally from the second sealed gate position to the intermediate position, and to subsequently moving together the gate connector, the first gate, and the second gate together downward to the open gate position, wherein both the first gate and the second gate are open in the open gate position.

10. The method of claim 9 , further comprising compressing one or more o-ring on at least one of the first gate or the first side between the first gate and the first side at the first sealed gate position.

11. The method of claim 9 , further comprising compressing one or more o-ring on at least one of the second gate or the second side between the second gate and the second side at the second sealed gate position.

12. A wafer processing system, comprising:
a first station;
a second station adjacent to the first station; and
a port positioned between the first station and the second station, the port comprising:
a housing having a first side and a second side that is opposite the first side, the housing comprising a first slot at the first side and a second slot at the second side, wherein objects are transferrable between the first station and the second station through the port via the first slot and the second slot; and
a dual gate system housed within the housing, the dual gate system comprising:
a first gate configured to form a first seal against the first slot;
a second gate configured to form a second seal against the second slot;
a gate connector coupled to the first gate and the second gate; and
an actuator coupled to the gate connector,
wherein the actuator is configured to:
seal the first gate against the first slot by moving the gate connector, the first gate, and the second gate together to an intermediate position, and then moving the gate connector, the first gate, and the second gate together vertically to a first sealed gate position, wherein to open the first gate from the first sealed gate position, the actuator is configured to move the gate connector, the first gate, and the second gate together downward from the first sealed gate position, past the intermediate position, to an open gate position; and
seal the second gate against the second slot by moving the gate connector, the first gate, and the second gate together to the intermediate position, and then moving the gate connector, the first gate, and the second gate together horizontally to a second sealed gate position, wherein to open a second gate from the second sealed gate position, the actuator is configured to move the gate connector, the first gate, and the second gate together horizontally from the second sealed gate position to the intermediate position, and to subsequently move the gate connector, the first gate, and the second gate together downward to the open gate position, wherein both the first gate and the second gate are open in the open gate position.

13. The wafer processing system of claim 12 , wherein the first gate and the second gate are both removable from the gate connector, and wherein the first gate is a MonoVat gate and the second gate is an L-motion gate.

14. The wafer processing system of claim 12 ,
wherein the actuator is configured to close the first gate by moving the gate connector, the first gate, and the second gate together in a

Assignees

• Applied Materials Inc

Inventors

• Kuppannan Kumaresan
• Amir Ofer
• Kuchar Michael

Classifications

• H10P72/1916

  characterised by sealing arrangements · CPC title

• H10P72/1914

  characterised by locking systems · CPC title

• H10P72/0466 Primary

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/0441 Primary

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• F16K3/18

  by movement of the closure members · CPC title