Patterned nanoparticle structures

Patent metadata

Field	Value
Publication number	US-11328833-B2
Application number	US-202117485281-A
Country	US
Kind code	B2
Filing date	Sep 24, 2021
Priority date	May 22, 2012
Publication date	May 10, 2022
Grant date	May 10, 2022

Abstract

Aspects relate to patterned nanostructures having a feature size not including film thickness of below 5 microns. The patterned nanostructures are made up of nanoparticles having an average particle size of less than 100 nm. A nanoparticle composition, which, in some cases, includes a binder, is applied to a substrate. A patterned mold used in concert with electromagnetic radiation function to manipulate the nanoparticle composition in forming the patterned nanostructure. In some embodiments, the patterned mold nanoimprints a pattern onto the nanoparticle composition and the composition is cured through UV or thermal energy, Three-dimensional patterned nanostructures may be formed. A number of patterned nanostructure layers may be prepared and joined together. In some cases, a patterned nanostructure may be formed as a layer that is releasable from the substrate upon which it is initially formed. Such releasable layers may be arranged to form a three-dimensional patterned nanostructure for suitable applications.

First claim

The invention claimed is:

1. An optical device comprising:
a patterned layer, wherein a feature size of the patterned layer is less than or equal to 5 microns, wherein the patterned layer comprises a composition including:
a plurality of nanoparticles, wherein a weight percentage of the plurality of nanoparticles in the composition is greater than 70 weight percent, and wherein the plurality of nanoparticles have an average particle size of less than 100 nm; and
a binder; and

wherein the patterned layer is substantially optically transparent at at least one wavelength, and wherein a root mean squared (RMS) roughness of the patterned layer is less than 6.0 nm.

2. The optical device of claim 1 , wherein the patterned layer is adapted to manipulate electromagnetic radiation.

3. The optical device of claim 1 , wherein the patterned layer has an index of refraction between 1.5 and 3.0.

4. The optical device of claim 1 , wherein the patterned layer is at least 90% transparent at the at least one wavelength.

5. The optical device of claim 1 , further comprising an optically transparent substrate, and wherein the patterned layer is disposed on the substrate.

6. The optical device of claim 1 , wherein the patterned layer includes at least one selected from columns, rows, stripes, complex shapes, irregular shapes, circles, rectangles, arcuate patterns, and polygonal patterns.

7. The optical device of claim 1 , wherein the patterned layer includes features with an aspect ratio of height to width between or equal to 1.5:1 and 10:1.

8. The optical device of claim 1 , wherein the patterned layer is periodic.

9. The optical device of claim 1 , wherein the average particle size is less than 20 nm.

10. The optical device of claim 1 , wherein the average particle size is less than 10 nm.

11. The optical device of claim 1 , wherein the plurality of nanoparticles comprise a metal oxide.

12. The optical device of claim 1 , wherein the plurality of nanoparticles comprise at least one selected from zirconium oxide and titanium oxide.

13. The optical device of claim 1 , wherein the plurality of nanoparticles are crystalline.

14. The optical device of claim 1 , wherein the plurality of nanoparticles are semi-crystalline.

15. The optical device of claim 1 , wherein the plurality of nanoparticles are amorphous.

16. The optical device of claim 1 , wherein the plurality of nanoparticles are crosslinked.

17. The optical device of claim 1 , wherein the plurality of nanoparticles have surfaces that are unmodified.

18. The optical device of claim 1 , wherein the composition includes ligands bound to the plurality of nanoparticles.

19. The optical device of claim 1 , wherein the composition includes functional groups bound to the plurality of nanoparticles.

20. The optical device of claim 1 , wherein the binder comprises a sol-gel precursor material.

21. The optical device of claim 1 , wherein the binder is crosslinked.

22. The optical device of claim 1 , wherein the binder comprises at least one selected from the group of a monomer, oligomer, and polymer.

23. The optical device of claim 1 , wherein the binder comprises a precursor of a material of the plurality of nanoparticles.

24. The optical device of claim 1 , wherein the binder comprises at least one selected from a metal oxide and a metal oxide precursor.

25. The optical device of claim 1 , wherein the binder comprises an insulating material.

26. The optical device of claim 1 , wherein the binder comprises a transparent optical adhesive.

27. The optical device of claim 1 , wherein the patterned layer is a grating.

28. The optical device of claim 1 , wherein the patterned layer comprises a plurality of features, and wherein a base of at least a portion of the plurality of features lie on a common plane.

29. An optical device comprising:
a patterned layer, wherein a feature size of the patterned layer is less than or equal to 5 microns, wherein the patterned layer comprises a composition including:
a plurality of nanoparticles, wherein a weight percentage of the plurality of nanoparticles in the composition is greater than 70 weight percent, and wherein the plurality of nanoparticles have an average particle size of less than 100 nm; and
a binder, wherein the patterned layer is substantially optically transparent at at least one wavelength, and wherein at least a portion of the patterned layer comprises a continuous pattern.

30. The optical device of claim 29 , wherein the continuous pattern is periodic.

Assignees

• Univ Massachusetts

Inventors

• Watkins James
• Beaulieu Michael R
• Hendricks Nicholas R

Classifications

• H01B1/08 Primary

  oxides · CPC title

• H01M4/04 Primary

  Processes of manufacture in general · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• H01B3/10

  metallic oxides (ceramics H01B3/12) · CPC title

• H01M8/124

  characterised by the process of manufacturing or by the material of the electrolyte · CPC title