Linearized micromechanical sensor

Patent metadata

Field	Value
Publication number	US-11326969-B2
Application number	US-201716471221-A
Country	US
Kind code	B2
Filing date	Dec 8, 2017
Priority date	Jan 4, 2017
Publication date	May 10, 2022
Grant date	May 10, 2022

Abstract

A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm spanning the cavity; and a lever element that spans the diaphragm and has a first and second end section on opposite sides of a center section. A first joint element is between the first end section and the substrate and a second joint element is between the center section and the diaphragm. The lever element can be pivoted due to a deflection of the diaphragm. Two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes are disposed so that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Also, an actuator is provided for applying an actuating force between the lever element and the substrate.

First claim

What is claimed is:

1. A micromechanical sensor, comprising:
a substrate having a cavity;
a flexible diaphragm which spans the cavity;
a lever element that spans the diaphragm and has a first end section, a second end section, and a center section, the first end section and the second end section lying on opposite sides of the center section relative to one another;
a first joint element that is fitted between the first end section and the substrate;
a second joint element that is fitted between the center section and the diaphragm;
a first capacitive sensor and a second capacitive sensor, each of the first capacitive sensor and the second capacitive sensor having two electrodes, of which one is mounted at one of the first or second end sections and the other is mounted on the substrate so that distances between the electrodes of different capacitive sensors are influenced oppositely when the lever element is pivoted because of a deflection of the diaphragm; and
an actuator configured to apply an actuating force between the lever element and the substrate.

2. The sensor as recited in claim 1 , wherein the actuator includes a first electrode mounted on the substrate and a second electrode mounted on the lever element, in order to provide an electrostatic attractive force when a control voltage is applied to the first and second electrodes.

3. The sensor as recited in claim 2 , wherein two actuators are provided at different end sections of the lever element.

4. The sensor as recited in claim 1 , further comprising:
a control device configured to drive the actuator and to determine a signal dependent on the deflection of the diaphragm.

5. The sensor as recited in claim 4 , wherein the control device is equipped to determine the signal, dependent on the deflection of the diaphragm, on the basis of capacitances of the capacitive sensors.

6. The sensor as recited in claim 1 , wherein the cavity is closed relative to a surrounding area, and the sensor is configured to determine an atmospheric pressure in the surrounding area.

7. The sensor as recited in claim 1 , wherein a mass element is mounted on the diaphragm, and the sensor is configured to determine an acceleration.

8. A method for controlling a micromechanical sensor, the micromechanical sensor including a substrate having a cavity, a flexible diaphragm which spans the cavity, a lever element that spans the diaphragm and has a first end section, a second end section, and a center section, the first end section and the second end section lying on opposite sides of the center section relative to one another, a first joint element that is fitted between the first end section and the substrate, a second joint element that is fitted between the center section and the diaphragm, a first capacitive sensor and a second capacitive sensor, each of the first capacitive sensor and the second capacitive sensor having two electrodes, of which one is mounted at one of the first or second end sections and the other is mounted on the substrate so that distances between the electrodes of different capacitive sensors are influenced oppositely when the lever element is pivoted because of a deflection of the diaphragm, and an actuator configured to apply an actuating force between the lever element and the substrate, the method comprising:
determining capacitances of the capacitive sensors;
driving the actuator as a function of the determined capacitances to bring a pivot angle of the lever element into a predetermined range; and
determining a signal, dependent on the deflection of the diaphragm, on the basis of the driving.

9. The method as recited in claim 8 , wherein the signal is determined additionally on the basis of the capacitances of the capacitive sensors.

10. The method as recited in claim 8 , wherein the actuator includes a first electrode mounted on the substrate and a second electrode mounted on the lever element, in order to provide an electrostatic attractive force when a control voltage is applied to the first and second electrodes, and wherein
the electrodes of one of the capacitive sensors coincide with the electrodes of the actuator, and wherein the method further comprises:
driving of the electrodes alternately in rapid succession as capacitive sensor and as actuator.

Assignees

• Bosch Gmbh Robert

Inventors

• Zehringer Stefan
• Duell Andreas
• Dannenberg Arne
• Grutzeck Helmut
• Franz Jochen
• Schwarz Mike
• Zimmermann Soeren
• Oppl Stephan

Classifications

• B81B2203/0315

  Cavities · CPC title

• G01L9/0073

  using a semiconductive diaphragm · CPC title

• G01L9/0072 Primary

  using variations in capacitance · CPC title

• B81B2203/058

  Rotation out of a plane parallel to the substrate · CPC title

• B81B2201/0264

  Pressure sensors · CPC title