Very low power microelectromechanical devices for the internet of everything
US-2017148592-A1 · May 25, 2017 · US
US11326937B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11326937-B2 |
| Application number | US-201716099584-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 10, 2017 |
| Priority date | May 10, 2016 |
| Publication date | May 10, 2022 |
| Grant date | May 10, 2022 |
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A vibration transducer module for detecting a vibratory signal, comprising a base, a spring connected to the base at a first location, a mass mechanically coupled to the spring at a second location remote from the first location, and a wall configured to position a first wall electrode and a second wall electrode a selected distance from the first location, the conductive element positioned and sized to contact the first wall electrode and the second wall electrode. The mass comprises a conductive element, and an energy harvester to provide a first voltage signal. The energy harvester may comprise a piezoelectric material or be construct as a SAW device. The module may be combined with a rectifier and an oscillator to form a vibration sensor.
Opening claim text (preview).
What is claimed: 1. A method of sensing a vibratory signal, comprising: vibrating a mass-spring system comprising a mass comprising an energy harvester and a conductive element, the energy harvester being electrically connected to the conductive element; wherein the energy harvester comprises a piezoelectric bimorph including a first conductive layer, a second conductive layer, and a piezoelectric layer disposed therebetween, a housing comprising a base and a wall, the wall having a first electrode and a second electrode positioned in or on the wall, a spring having a proximal end and a distal end, wherein the proximal end of the spring is connected to the base at a first location, and wherein the mass is mechanically coupled to the distal end of the spring, wherein the mass is configured to move between a first position and a second position responsive to movement of the housing, and wherein the conductive element contacts the first electrode and the second electrode when the mass is at the second position; outputting a charge from the energy harvester to a charge collector of an oscillator in response to movement of the mass between the first position and the second position; and generating an oscillatory signal by activating the oscillator with the conductive element. 2. The method of claim 1 , wherein the piezoelectric bimorph is a spiral bimorph. 3. The method of claim 1 , wherein the act of generating an oscillatory signal comprises establishing an electrical connection of the capacitor to an inductive element via the conductive element. 4. The method of claim 1 , wherein the oscillator comprises a surface acoustic wave device. 5. A vibration transducer module for detecting a vibratory signal, comprising: a housing comprising a base and a wall; a spring having a proximal end and a distal end, the proximal end of the spring being connected to the base at a first location; a mass mechanically coupled to the distal end of the spring, the mass comprising a conductive element and an energy harvester electrically connected to the conductive element, the mass configured to move between a first position and a second position responsive to movement of the housing; and a first electrode and a second electrode positioned in or on the wall at a position at which the conductive element contacts the first electrode and the second electrode when the mass is at the second position, wherein the energy harvester comprises a piezoelectric bimorph including a first conductive layer, a second conductive layer, and a piezoelectric layer disposed therebetween, the energy harvester being configured to output a first voltage to a charge collector responsive to movement of the mass between the first position and the second position. 6. The vibration transducer module of claim 5 , wherein the spring is a serpentine spring. 7. The vibration transducer module of claim 5 , wherein the piezoelectric layer comprises lead zirconate titanate. 8. The vibration transducer module of claim 5 , wherein the piezoelectric bimorph is a spiral bimorph. 9. The vibration transducer module of claim 5 , wherein the base constitutes a portion of a frame extending in more than one direction around the mass. 10. The vibration transducer module of claim 9 , wherein the wall constitutes a portion of the frame. 11. The vibration transducer module of claim 10 , wherein the frame is a single integrated structure. 12. A vibration sensor incorporating the module of claim 5 , further comprising: a rectifier having an input coupled to the energy harvester to receive the first voltage and adapted to provide a rectified first voltage signal as an output; and an oscillator comprising a capacitive element coupled to receive and maintain a charge corresponding to the rectified first voltage signal from the rectifier, the oscillator being configured to oscillate when the conductive element contacts the first electrode and the second electrode. 13. The vibration sensor of claim 12 , wherein the oscillator further comprises an inductive element coupled to the capacitive element. 14. The vibration sensor of claim 12 , wherein the oscillator is a surface acoustic wave device. 15. The vibration sensor of claim 12 , wherein the rectifier is a full-wave rectifier.
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