Electron source, method for manufacturing the same, and electron beam device using the same

Patent metadata

Field	Value
Publication number	US-11322329-B2
Application number	US-201817260612-A
Country	US
Kind code	B2
Filing date	Aug 27, 2018
Priority date	Aug 27, 2018
Publication date	May 3, 2022
Grant date	May 3, 2022

Abstract

The invention provides an electron source including a columnar chip of a hexaboride single crystal, a metal pipe that holds the columnar chip of the hexaboride single crystal, and a filament connected to the metal pipe at a central portion. The columnar chip of the hexaboride single crystal is formed into a cone shape at a portion closer to a tip than a portion held in the metal pipe, and a tip end portion having the cone shape has a (310) crystal face. Schottky electrons are emitted from the (310) crystal face. According to the invention, it is possible to provide a novel electron source having monochromaticity, long-term stability of an emitter current, and high current density.

First claim

The invention claimed is:

1. An electron source comprising:
a columnar chip of a hexaboride single crystal;
a metal pipe that holds the columnar chip of the hexaboride single crystal;
a filament connected to the metal pipe at a central portion; and
a stem provided with a pair of electrodes each connected to a respective one of end portions at two sides of the filament, wherein
the columnar chip of the hexaboride single crystal is formed into a cone shape at a portion closer to a tip than a portion held in the metal pipe, and a tip end portion having the cone shape has a (310) crystal face,
the columnar chip of the hexaboride single crystal emits Schottky electrons by heating the columnar chip so that a chip temperature is higher than 1000° C. and smaller than 1250° C.

2. The electron source according to claim 1 , wherein
the hexaboride single crystal is a hexaboride of Ce or a hexaboride of a lanthanoid metal heavier than Ce.

3. The electron source according to claim 1 , wherein
the tip end portion has a substantially hemispherical shape.

4. The electron source according to claim 3 , wherein
a radius of curvature of the tip end portion is larger than 50 nm and smaller than 1 μm.

5. The electron source according to claim 3 , wherein
a radius of curvature of the tip end portion is larger than 150 nm and smaller than 500 nm.

6. The electron source according to claim 1 , wherein
the columnar chip of the hexaboride single crystal has a quadrangular columnar shape or a cylindrical shape, and the portion formed into the cone shape has a quadrangular pyramid shape or a cone shape.

7. The electron source according to claim 1 , wherein
the columnar chip of the hexaboride single crystal emits Schottky electrons by applying an electric field so that an electric field intensity of the tip end portion is larger than 3×108 V/m and smaller than 1.5×109 V/m.

8. An electron beam device comprising:
an electron source;
a sample stage on which a sample is placed;
an extraction electrode that extracts electrons from the electron source;
an acceleration electrode that accelerates the electrons extracted by the extraction electrode;
a lens system including an objective lens that focuses the electrons accelerated by the acceleration electrode;
a deflection scanning unit that scans and irradiates the sample placed on the sample stage with the electrons focused by the lens system including the objective lens;
a secondary electron detection unit that detects secondary electrons generated from the sample scanned and irradiated with the electrons by the deflection scanning unit; and
a heating unit that maintains the columnar chip of the hexaboride single crystal at a temperature higher than 1000° C. and lower than 1250° C., wherein
the electron source includes a columnar chip of a hexaboride single crystal, a metal pipe that holds the columnar chip of the hexaboride single crystal, a filament connected to the metal pipe at a central portion, and a stem provided with a pair of electrodes each connected to a respective one of end portions at two sides of the filament,
the columnar chip of the hexaboride single crystal is formed into a cone shape at a portion closer to a tip than a portion held in the metal pipe, and a tip end portion having the cone shape has a (310) crystal face, and
Schottky electrons are emitted from the (310) crystal face by heating the columnar chip so that a chip temperature is higher than 1000° C. and smaller than 1250° C.

9. The electron beam device according to claim 8 , further comprising:
a heating unit that maintains the columnar chip of the hexaboride single crystal at a temperature higher than 1000° C. and lower than 1100° C.

10. The electron beam device according to claim 8 , further comprising:
an extraction power supply that applies a positive voltage to the extraction electrode relative to the columnar chip of the hexaboride single crystal of the electron source, wherein
an electric field having an electric field intensity F of 3×108 V/m<F<1.5×109 V/m is applied to a tip end of the columnar chip by applying the positive voltage to the extraction electrode relative to the columnar chip by the extraction power supply, and electrons are emitted from the tip end of the columnar chip.

11. The electron beam device according to claim 8 , wherein
the hexaboride single crystal is a hexaboride of Ce or a hexaboride of a lanthanoid metal heavier than Ce, and
the tip end portion has a substantially hemispherical shape, and a radius of curvature of the tip end portion is larger than 50 nm and smaller than 1 μm.

Assignees

• Hitachi High Tech Corp

Inventors

• Kusunoki Toshiaki
• Hashizume Tomihiro
• Kasuya Keigo
• Arai Noriaki
• Seino Hiromitsu
• Kaneda Minoru
• Ohshima Takashi
• Matsunaga Soichiro

Classifications

• H01J37/10

  Lenses · CPC title

• H01J2237/06316

  Schottky emission · CPC title

• H01J37/065 Primary

  Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) · CPC title

• H01J2237/0473

  accelerating · CPC title

• H01J9/04

  of thermionic cathodes · CPC title