Optical element for terahertz waves and manufacturing method of the same

Patent metadata

Field	Value
Publication number	US-11320569-B2
Application number	US-201916581885-A
Country	US
Kind code	B2
Filing date	Sep 25, 2019
Priority date	Sep 28, 2018
Publication date	May 3, 2022
Grant date	May 3, 2022

Abstract

An optical element for terahertz waves includes: an optical component including a silicon surface, an antireflection film including an organic resin including a cycloolefin-based polymer as a main component, and inorganic particles dispersed in the organic resin; and an adhesive layer located between the optical component and the antireflection film in a thickness direction of the antireflection film and bonding the silicon surface of the optical component and the antireflection film to each other. The adhesive layer includes a thermally denatured olefin-based polymer.

First claim

What is claimed is:

1. An optical element for terahertz waves, comprising:
an optical component including a silicon surface;
an antireflection film including an organic resin including a cycloolefin-based polymer as a main component, and inorganic particles dispersed in the organic resin; and
an adhesive layer located between the optical component and the antireflection film in a thickness direction of the antireflection film, the adhesive layer bonding the silicon surface of the optical component and the antireflection film to each other,
wherein the adhesive layer includes a thermally denatured olefin-based polymer, and
wherein a percentage of the number of oxygen atoms included in the thermally denatured polymer with respect to a total of the number of oxygen atoms and the number of carbon atoms included in the thermally denatured polymer is equal to or higher than 0.3%.

2. The optical element for terahertz waves according to claim 1 , wherein a ratio of a volume of the inorganic particles per unit volume of the antireflection film become higher, the closer it is to the optical component in the thickness direction.

3. The optical element for terahertz waves according to claim 1 , wherein
the antireflection film includes a plurality of layers stacked each other in the thickness direction,
each of the plurality of layers includes the organic resin including the cycloolefin-based polymer as a main component, and
the inorganic particles dispersed in the organic resin, and a ratio of a volume of the inorganic particles per unit volume becomes higher at the layers closer to the optical component in the thickness direction.

4. The optical element for terahertz waves according to claim 1 , wherein
the antireflection film includes a first surface facing the optical component in the thickness direction and a second surface located opposite to the first surface, and
the optical element for terahertz waves further includes a bubble-containing layer located on the second surface and including a plurality of bubbles.

5. The optical element for terahertz waves according to claim 4 , wherein a surface of the bubble-containing layer has an uneven shape.

6. The optical element for terahertz waves according to claim 1 , wherein
the antireflection film includes a first surface facing the optical component in the thickness direction and a second surface located opposite to the first surface, and
the second surface has an uneven shape.

7. The optical element for terahertz waves according to claim 1 , wherein a thickness of the adhesive layer is 1 nm to 100 μm.

8. The optical element for terahertz waves according to claim 1 , wherein the inorganic particles includes at least one of silicon particles, titanium oxide particles and diamond particles.

9. An optical element for terahertz waves, comprising:
an optical component;
an antireflection film including an organic resin including a cycloolefin-based polymer as a main component, and inorganic particles dispersed in the organic resin; and
an adhesive layer located between the optical component and the antireflection film in a thickness direction of the antireflection film, the adhesive layer bonding a surface of the optical component and the antireflection film to each other,
wherein the adhesive layer includes a thermally denatured olefin-based polymer, and
wherein a percentage of the number of oxygen atoms included in the thermally denatured polymer with respect to a total of the number of oxygen atoms and the number of carbon atoms included in the thermally denatured polymer is equal to or higher than 0.3%.

10. The optical element for terahertz waves according to claim 9 , wherein a ratio of a volume of the inorganic particles per unit volume of the antireflection film become higher, the closer it is to the optical component in the thickness direction.

11. The optical element for terahertz waves according to claim 9 , wherein
the antireflection film includes a plurality of layers stacked each other in the thickness direction,
each of the plurality of layers includes the organic resin including the cycloolefin-based polymer as a main component, and
the inorganic particles dispersed in the organic resin, and a ratio of a volume of the inorganic particles per unit volume becomes higher at the layers closer to the optical component in the thickness direction.

12. The optical element for terahertz waves according to claim 9 , wherein
the antireflection film includes a first surface facing the optical component in the thickness direction and a second surface located opposite to the first surface, and
the optical element for terahertz waves further includes a bubble-containing layer located on the second surface and including a plurality of bubbles.

13. The optical element for terahertz waves according to claim 12 , wherein a surface of the bubble-containing layer has an uneven shape.

14. The optical element for terahertz waves according to claim 9 , wherein
the antireflection film includes a first surface facing the optical component in the thickness direction and a second surface located opposite to the first surface, and
the second surface has an uneven shape.

15. The optical element for terahertz waves according to claim 9 , wherein a thickness of the adhesive layer is 1 nm to 100 μm.

16. The optical element for terahertz waves according to claim 9 , wherein the inorganic particles includes at least one of silicon particles, titanium oxide particles and diamond particles.

17. The optical element for terahertz waves according to claim 9 , wherein the surface of the optical component includes or is a silicon surface.

Assignees

• Hamamatsu Photonics Kk
• Teijin Ltd

Inventors

• Kawada Yoichi
• Takahashi Hironori
• Ikeda Yoshinori
• SOEDA Junshi

Classifications

• G02B1/111 Primary

  using layers comprising organic materials · CPC title