Waste liquid treating apparatus

Patent metadata

Field	Value
Publication number	US-11319214-B2
Application number	US-202016931674-A
Country	US
Kind code	B2
Filing date	Jul 17, 2020
Priority date	Jul 26, 2019
Publication date	May 3, 2022
Grant date	May 3, 2022

Abstract

A waste liquid treating apparatus includes a waste liquid accommodating unit for waste water discharged from a processing apparatus. A waste liquid filter unit filters the waste liquid in that tank to purify the waste liquid into fresh water. A fresh water reservoir tank reserves the fresh water obtained by filtering the waste liquid by the waste liquid filter unit. A pure water producing unit purifies the fresh water reserved in the fresh water reservoir tank into pure water, and a temperature control unit controls the pure water obtained by purifying the fresh water by the pure water purifying unit to a predetermined temperature. A bubble water seal type pump sucks at least bubbles generated in the waste liquid filter unit, and a sealing water reservoir tank reserves the bubbles sucked by the bubble water seal type pump as a waste liquid.

First claim

What is claimed is:

1. A waste liquid treating apparatus for purifying a waste liquid discharged from a processing apparatus, the waste liquid treating apparatus comprising:
a waste liquid accommodating tank that accommodates the waste liquid discharged by the processing apparatus;
a waste liquid filter unit that filters the waste liquid in the waste liquid accommodating tank to purify the waste liquid into fresh water;
a fresh water reservoir tank that reserves the fresh water obtained by filtering the waste liquid by the waste liquid filter unit;
a pure water producing unit that purifies the fresh water reserved in the fresh water reservoir tank into pure water;
a temperature control unit that controls the pure water obtained by purifying the fresh water by the pure water producing unit to a predetermined temperature;
a bubble water seal type pump that sucks at least bubbles generated in the waste liquid filter unit; and
a sealing water reservoir tank that reserves a liquid portion of the bubbles sucked by the bubble water seal type pump as a waste liquid,
wherein the waste liquid reserved in the sealing water reservoir tank is filtered by the waste liquid filter unit together with the waste liquid in the waste liquid accommodating tank, and
the pure water controlled to the predetermined temperature is supplied to the processing apparatus;
wherein the waste liquid filter unit includes a fresh water receiving pan and a bubble suction port disposed in said fresh water receiving pan, the bubble suction port being configured to suck bubbles from liquid in the fresh water receiving pan.

2. The waste liquid treating apparatus according to claim 1 ,
wherein the waste liquid accommodating tank and the sealing water reservoir tank are disposed adjacent to each other through a weir,
the waste liquid reserved in the sealing water reservoir tank flows over the weir into the waste liquid accommodating tank side, and
the waste liquid reserved in the sealing water reservoir tank is supplied through the temperature control unit to the bubble water seal type pump, to be used for cooling and operation of the bubble water seal type pump.

3. The waste liquid treating apparatus according to claim 1 , further comprising:
a spray water seal type pump that sucks a spray in a processing region where a processing unit is disposed,
wherein the spray sucked by the spray water seal type pump is supplied to the sealing water reservoir tank.

4. The waste liquid treating apparatus according to claim 1 , further comprising a control unit connected to a pipe connected between the sealing water reservoir tank and the waste liquid filter unit, wherein said control unit monitors a pressure inside the pipe.

5. The waste liquid treating apparatus according to claim 4 , wherein said control unit includes a display monitor.

Assignees

• Disco Corp

Inventors

• Matsumoto Tadaomi
• Saito Masaru

Classifications

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• C02F1/008

  Control or steering systems not provided for elsewhere in subclass C02F · CPC title

• C02F2209/02

  Temperature · CPC title

• C02F1/32

  with ultraviolet light · CPC title

• C02F1/325

  Irradiation devices or lamp constructions · CPC title