Epitaxial structure

Patent metadata

Field	Value
Publication number	US-11316007-B2
Application number	US-201916452558-A
Country	US
Kind code	B2
Filing date	Jun 26, 2019
Priority date	Aug 1, 2018
Publication date	Apr 26, 2022
Grant date	Apr 26, 2022

Abstract

An epitaxial structure includes a substrate, a nucleation layer, a buffer layer, and a nitride layer. The nucleation layer is disposed on the substrate, and the nucleation layer consists of a plurality of regions in a thickness direction, wherein a chemical composition of the region is Al(1−x)InxN, where 0≤x≤1. The buffer layer is disposed on the nucleation layer, and a thickness of the nucleation layer is less than a thickness of the buffer layer. The nitride layer is disposed on the buffer layer, wherein a roughness of a surface of the nucleation layer in contact with the buffer layer is greater than a roughness of a surface of the buffer layer in contact with the nitride layer.

First claim

What is claimed is:

1. An epitaxial structure comprising:
a substrate;
a nucleation layer disposed on the substrate and being in direct contact with the substrate, wherein the nucleation layer consists of a plurality of regions in a thickness direction, and a chemical composition of the plurality of regions is Al (1−x) In x N, where 0≤x≤1, wherein a maximum value of the x value in the plurality of regions decreases along the thickness direction, a minimum value of the x value in the plurality of regions is the same, an absolute value of a gradient slope of each of the regions is 0.1%/nm to 50%/nm, and a stepwise slope of the plurality of regions is −0.1%/loop to −50%/loop;
a buffer layer disposed on the nucleation layer, wherein a thickness of the nucleation layer is less than a thickness of the buffer layer; and
a nitride layer disposed on the buffer layer, wherein a roughness of a surface of the nucleation layer in contact with the buffer layer is greater than a roughness of a surface of the buffer layer in contact with the nitride layer.

2. The epitaxial structure according to claim 1 , wherein an initial content of the x value of the nucleation layer is 10% to 100%, an end content of the x value is 0% to 90%, and an initial content of the (1−x) value is 0% to 90%, and an end content of the (1−x) value is 10% to 100%, wherein the initial content of the x value is located on a bottom portion of the nucleation layer close to the substrate, and the end content of the x value is located on a top portion of the nucleation layer close to the buffer layer.

3. An epitaxial structure comprising:
a substrate;
a nucleation layer disposed on the substrate and being in direct contact with the substrate, wherein the nucleation layer consists of a plurality of regions in a thickness direction, and a chemical composition of the plurality of regions is Al (1−x) In x N, where 0≤x≤1, wherein a maximum value of the x value in the plurality of regions decreases along the thickness direction, a minimum value of the x value in the plurality of regions is the same, and the x value in the chemical composition of each four of the regions consists of four sections of variation, the four sections of variation comprising: a first gradient region gradually changing from a maximum value to a minimum value, a second gradient region gradually changing from the minimum value to the maximum value, a third gradient region gradually changing from the maximum value to the minimum value, and a fourth gradient region gradually changing from the minimum value to the maximum value, wherein the maximum value of the x value in the first gradient region, the second gradient region, and the third gradient region is the same, the maximum value of the x value of the fourth gradient region is a value that decreases from the maximum value of the x value of the first gradient region at a stepwise slope of −0.1%/loop to −50%/loop, and an absolute value of a gradient slope of each of the regions is 0.1%/nm to 50%/nm;
a buffer layer disposed on the nucleation layer, wherein a thickness of the nucleation layer is less than a thickness of the buffer layer; and
a nitride layer disposed on the buffer layer, wherein a roughness of a surface of the nucleation layer in contact with the buffer layer is greater than a roughness of a surface of the buffer layer in contact with the nitride layer.

4. The epitaxial structure according to claim 3 , wherein an initial content of the x value of the nucleation layer is 10% to 100%, an end content of the x value is 0% to 90%, and an initial content of the (1−x) value is 0% to 90%, and an end content of the (1−x) value is 10% to 100%, wherein the initial content of the x value is located on a bottom portion of the nucleation layer close to the substrate, and the end content of the x value is located on a top portion of the nucleation layer close to the buffer layer.

Assignees

• Globalwafers Co Ltd

Inventors

• Liu Jia-Zhe
• Huang Yen-Lun
• Shih Ying-Ru

Classifications

• H10P14/3416

  Nitrides · CPC title

• H10P14/3216 Primary

  Nitrides · CPC title

• H10P14/3254

  Graded layers · CPC title

• H10P14/3251

  consisting of three or more layers · CPC title

• H10P14/3248

  consisting of two layers · CPC title