Aminoiodosilanes and methods of synthesizing these aminoiodosilanes

Patent metadata

Field	Value
Publication number	US-11312739-B2
Application number	US-202016838694-A
Country	US
Kind code	B2
Filing date	Apr 2, 2020
Priority date	Jan 12, 2018
Publication date	Apr 26, 2022
Grant date	Apr 26, 2022

Abstract

Methods of synthesizing aminoiodosilanes are disclosed. The reaction to produce the disclosed aminoiodosilanes is represented by the formula:SiI4+z(NH2R1)═SiIy(NHR1)z,wherein R1 is selected from a C1-C10 alkyl or cycloalkyl, aryl, or a hetero group; y=1 to 3; and z=4−y.

First claim

What is claimed is:

1. A method of synthesizing an aminoiodosilane comprising the steps of:
adding tetraiodosilane to a reactor at a temperature that is below 0° C.;
adding a monosubstituted amine having the formula, NH 2 R 1 , to the reactor to produce a mixture, wherein R 1 is selected from a C 1 -C 10 alkyl or cycloalkyl, aryl, or a hetero group;
stirring the mixture to form a stirred mixture; and
isolating the aminoiodosilane from the stirred mixture, wherein the aminoiodosilane has the formula SiI 2 (NHR 1 ) 2 .

2. The method of claim 1 , wherein the solvent is toluene.

3. The method of claim 1 , further comprising vacuum distilling the aminosilane.

4. The method of claim 1 , wherein the monosubstituted amine is t-butylamine.

5. The method of claim 1 , wherein the monosubstituted amine is methylamine or ethylamine.

6. The method of claim 1 , wherein the monosubstituted amine is isopropylamine.

7. The method of claim 1 , wherein the temperature is in a range of from about −15° C. to about −5° C.

8. The method of claim 1 , wherein the amine is added to the iodosilane.

9. A method of synthesizing an aminoiodosilane comprising the steps of:
adding tetraiodosilane to a reactor;
adding a monosubstituted amine having the formula, NH 2 R 1 , to the reactor to produce a mixture, wherein R 1 is selected from a C 1 -C 10 alkyl or cycloalkyl, aryl, or a hetero group;
stirring the mixture to form a stirred mixture; and
isolating the aminoiodosilane from the stirred mixture, wherein the aminoiodosilane has the formula SiI 2 (NHR 1 ) 2 .

10. The method of claim 1 , wherein the aminoiodosilane is bis(t-butylamino)diiodosilane or bis(isopropylamino)diiodosilane.

Assignees

• Entegris Inc

Inventors

• Baum Thomas H
• Khandelwal Manish
• Kuiper David

Classifications

• C07F7/10 Primary

  containing nitrogen {having a Si-N linkage} · CPC title

• B01D3/10

  Vacuum distillation (B01D3/12 takes precedence) · CPC title

• C07F13/005 Primary

  Compounds without a metal-carbon linkage · CPC title