Microdevice comprising at least two movable elements

Patent metadata

Field	Value
Publication number	US-11312618-B2
Application number	US-201816492345-A
Country	US
Kind code	B2
Filing date	Mar 14, 2018
Priority date	Mar 16, 2017
Publication date	Apr 26, 2022
Grant date	Apr 26, 2022

Abstract

A microdevice ( 100 ) comprising a movable element ( 111 ) capable of moving relative to a fixed part ( 115 ), produced in first and second layers of material ( 104, 106 ) arranged one above the other such that the movable element comprises a portion ( 112 ) of the first layer and a portion ( 118 ) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure ( 121 ) formed in the first and/or second layer of material.

First claim

The invention claimed is:

1. Microdevice comprising at least:
a first layer of material,
a second layer of material,
a fixed portion,
a first mobile element comprising at least a first portion of the first layer of material and at least a second portion of the second layer of material,
a second mobile element comprising at least a first portion of the second layer of material and at least a second portion of the first layer of material,
first suspension means formed in at least one of the first layer of material or the second layer of material, and
second suspension means formed in at least one of the first layer of material and the second layer of material,
wherein:
the first and second mobile elements are capable of moving with respect to one another and with respect to the fixed portion,
the first and second layers of material are arranged one above the other,
the first portion of the first layer of material is rigidly connected to the second portion of the second layer of material,
the first mobile element is suspended from the fixed portion by the first suspension means,
the second mobile element is suspended from the fixed portion by the second suspension means,
the first portion of the second layer of material is rigidly connected to the second portion of the first layer of material,
the first and second mobile elements are capable of moving substantially in phase opposition with respect to one another, and
the centres of gravity of the first and second mobile elements are aligned one above the other.

2. The microdevice according to claim 1 , wherein the first and second mobile elements are arranged in an interlocking and/or concentric manner with respect to one another.

3. The microdevice according to claim 1 , wherein the first portion of the first layer of material is connected to the second portion of the second layer of material by means of at least a first portion of an intermediate layer arranged between the first and second layers of material, or wherein the first portion of the second layer of material is connected to the second portion of the first layer of material by means of at least a second portion of the intermediate layer.

4. The microdevice according to claim 1 , further comprising at least one of the following elements:
elements for detection or measurement of a movement of the first mobile element or of the second mobile element with respect to the fixed portion,
elements for detection or measurement of a movement of the first mobile element with respect to the second mobile element,
elements capable of moving the first mobile element or the second mobile element with respect to the fixed portion,
elements capable of moving the first mobile element with respect to the second mobile element.

5. The microdevice according to claim 1 , wherein at least one of the first mobile element and the second mobile element is capable of moving in translation or in rotation with respect to the fixed portion or with respect to one another.

6. The microdevice according to claim 1 , wherein the fixed portion comprises portions of the first and second layers of material arranged around the first and second mobile elements or surrounded by the first and second mobile elements.

7. The microdevice according to claim 1 , wherein the fixed portion comprises a support layer such that the first layer of material is arranged between the support layer and the second layer of material.

8. The microdevice according to claim 1 , further comprising at least one intermediate mobile element suspended from the fixed portion and capable of moving with respect to the fixed portion, and wherein the first and second mobile elements are suspended from the intermediate mobile element and capable of moving with respect to the intermediate mobile element and the fixed portion.

9. The microdevice according to claim 8 , wherein:
the fixed portion comprises a fixed frame at least partially surrounding the intermediate mobile element, and the intermediate mobile element forms a mobile frame suspended from the fixed frame, or
the microdevice further comprises a first cavity, at least a portion of the walls of which is formed by the fixed portion and in which the intermediate mobile element is encapsulated, and a second cavity arranged in the first cavity, at least a portion of the walls of which is formed by the intermediate mobile element and in which the first and second mobile elements are encapsulated.

10. The microdevice according to claim 1 , wherein the centres of gravity of the first and second mobile elements are aligned one above the other on an axis substantially perpendicular to main faces of the first and second layers of material.

11. The microdevice according to claim 1 , wherein the first and second mobile elements are symmetrical with respect to a centre of symmetry.

12. The microdevice according to claim 11 , wherein the centres of gravity of the first and second mobile elements are aligned one above the other on an axis that passes through the centre of symmetry and is substantially perpendicular to main faces of the first and second layers of material.

13. A method for fabricating a microdevice, comprising at least:
etching of a first layer of material such that at least a first portion of the first layer of material forms a first portion of at least a first mobile element and at least a second portion of the first layer of material forms a first portion of at least a second mobile element,
fabrication of a second layer of material on the first layer of material, and
etching of the second layer of material such that at least a second portion of the second layer of material forms a second portion of the first mobile element and is rigidly connected to the first portion of the first layer of material and at least a first portion of the second layer of material forms a second portion of the second mobile element and is rigidly connected to the second portion of the first layer of material,
these steps being implemented such that:
the first mobile element is suspended from a fixed portion by first suspension means formed in at least one of the first layer of material or the second layer of material,
the second mobile element is suspended from the fixed portion by second suspension means formed in at least one of the first layer of material or in the second layer of material,
the first and second mobile elements are capable of moving with respect to one another and with respect to the fixed portion,
the first and second mobile elements are capable of moving substantially in phase opposition with respect to one another, and
the centres of gravity of the first and second mobile elements are aligned one above the other.

14. The method according to claim 13 , wherein the fabrication of the second layer of material on the first layer of material comprises a transfer of the second layer of material onto the first layer of material such that an intermediate layer is arranged between the first and second layers of material, the method further comprising, after the etching of the second layer of material, an etching of the intermediate layer such that at least a first portion of the intermediate layer connects the first portion of the first layer of material to the second portion of the second layer of material and, when the second mobile element is made, at least a second portion of the intermediate layer connects the first portion of the second layer of material to the second portion of the first layer of material.

15. The method according to claim 13 , wherein a sacrificial layer is arranged be

Assignees

• Commissariat Energie Atomique
• Commissariat A Lenergie Atomique Et Aux Energies Alternatives Safran

Inventors

• Berthelot Audrey
• Colin Mikaël
• Jeanroy Alain
• Lehee Guillaume
• Vancauwenberghe Olivier
• Onfroy Philippe
• Mace Jean-Sébastien

Classifications

• B81B5/00

  Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements · CPC title

• B81B2203/051

  Translation according to an axis parallel to the substrate · CPC title

• B81B2203/0163

  Spring holders · CPC title

• B81B3/0059 Primary

  Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056 · CPC title

• B81B3/0078

  Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075 · CPC title