Method and system for scheduling pieces of materials based on real-time device status

Patent metadata

Field	Value
Publication number	US-11308453-B2
Application number	US-201816009573-A
Country	US
Kind code	B2
Filing date	Jun 15, 2018
Priority date	Dec 17, 2015
Publication date	Apr 19, 2022
Grant date	Apr 19, 2022

Abstract

The present disclosure provides a method and system for scheduling pieces of materials based on a real-time status of a device. Scheduling rules for scheduling the pieces of materials are obtained according to determined parameters. It is determined whether all designated transmission and process tasks of the pieces of materials are completed. If the designated transmission and processing tasks of the pieces of materials are completed, terminating the scheduling of the pieces of materials. If the designated transmission and processing tasks of the pieces of materials are not completed, each of the scheduling rules for scheduling the pieces of materials according to real-time status information of the device are traversed, and according to a traversing result, operation instructions corresponding to the scheduling rules for scheduling the pieces of materials are executed. The real-time status information of the device is updated according to a device status after executions of the operation instructions are completed.

First claim

What is claimed is:

1. A method for scheduling pieces of materials based on a real-time status of a device, comprising:
obtaining, according to determined parameters, scheduling rules for scheduling the pieces of materials;
determining whether designated transmission and processing tasks of the pieces of materials are completed;
if the designated transmission and processing tasks of the pieces of materials are completed, terminating the scheduling of the pieces of materials; and
if the designated transmission and processing tasks of the pieces of materials are not completed,
traversing each of the scheduling rules for scheduling the pieces of materials according to real-time status information of the device, and executing operation instructions corresponding to the scheduling rules for scheduling the pieces of materials according to a traversing result; and
updating the real-time status information of the device according to a device status after executions of the operation instructions are completed, and redetermining whether the designated transmission and process tasks of the pieces of materials are completed.

2. The method according to claim 1 , wherein the determined parameters comprise: a pre-cleaning time, a degassing time, a processing time of the pieces of materials being processed at each processing position, a picking-and-placing time of a robot, and a transmission time of the pieces of materials moving from a current processing position to a next processing position.

3. The method according to claim 1 , wherein traversing each of the scheduling rules for scheduling the pieces of materials according to the real-time status information of the device, and executing the operation instructions corresponding to the scheduling rules for scheduling the pieces of materials according to the traversing result, comprises:
traversing, according to status parameters of the real-time status information of the device, each of the scheduling rules for scheduling the pieces of materials until the operation instructions corresponding to the status parameters are obtained; and
determining whether all of the scheduling rules for scheduling the pieces of materials are traversed;
if all of the scheduling rules for scheduling the pieces of materials are traversed, executing the operation instructions corresponding to the status parameters; and if not all of the scheduling rules for scheduling the pieces of materials are traversed, traversing, according to the status parameters, remaining scheduling rules for scheduling the pieces of materials.

4. The method according to claim 1 , wherein updating the real-time status information of the device according to the device status that the executions of the operation instructions are completed, and redetermining whether the designated transmission and process tasks of the pieces of materials are completed, comprises:
determining whether the executions of all the operation instructions are completed at a same time;
if the executions of all the operation instructions are completed at the same time, updating the real-time status information of the device according to a device status after the executions of all operation instructions are completed, and redetermining whether the designated transmission and process tasks of the pieces of materials are completed; and
if the executions of the operation instructions are not completed at the same time, updating the real-time status information of the device according to a device status corresponding to an execution of an operation instruction being completed previously, and a device status corresponding to an operation instruction being executed currently, and redetermining whether the designated transmission and process tasks of the pieces of materials are completed.

5. The method according to claim 1 , wherein the device comprises a loading chamber, a pre-cleaning chamber, a degassing chamber, and a processing chamber; a robot disposed at the loading chamber for transporting the pieces of materials among the pre-cleaning chamber, the degassing chamber and the processing chamber; a plurality of processing positions symmetrically distributed along a circumferential direction of the processing chamber for independently processing the pieces of materials; a turntable disposed at the processing chamber for transporting the pieces of materials to a position above a corresponding disc by rotating, and a disc disposed at the processing chamber for transporting the pieces of materials to a processing position or on the turntable by lifting, wherein:
the scheduling rules for scheduling the pieces of materials comprise:
S 100 : obtaining an initial status information of the device;
S 101 : updating a status of the robot;
S 102 : updating a status of the disc;
S 103 : determining whether a piece of material is contained in the loading chamber and the pre-cleaning chamber is empty; if the piece of material is contained in the loading chamber and the pre-cleaning chamber is empty, executing S 103 - 1 ; and if no material is contained in the loading chamber or the pre-cleaning chamber is not empty, executing S 104 ;
S 104 : determining whether a processing of the pre-cleaning chamber is completed; if the processing of the pre-cleaning chamber is completed, executing S 105 ; and if the processing of the pre-cleaning chamber is not completed, executing S 104 - 1 ;
S 105 , determining, whether the degassing chamber is empty; if the degassing chamber is not empty, executing S 105 - 1 ; if the degassing chamber is empty and the robot is idle, executing S 106 ; and if the degassing chamber is empty and the robot is not idle, executing S 107 ;
S 106 : using the robot to transport the pieces of materials from the pre-cleaning chamber to the degassing chamber, and updating statuses of the pre-cleaning chamber, the degassing chamber and the robot;
S 107 : determining whether an ending output is generated; if the ending output is generated, scheduling the pieces of materials according to an ending processing rule; and if no ending output is generated, executing S 108 , wherein the ending output includes a scenario in which no material is contained in the loading chamber, processing of the pre-cleaning chamber and the degassing chamber is completed, and an unprocessed material is contained on the disc;
S 108 : determining whether processing of the pieces of materials is completed; if the processing of the pieces of materials is completed, terminating; and if the processing of the pieces of materials is not completed, executing S 101 ;
S 103 - 1 : determining whether the robot is idle; if the robot is idle, executing S 103 - 2 ; and if the robot is not idle, executing S 104 ;
S 103 - 2 : using the robot to transport the pieces of materials from the loading chamber to the pre-cleaning chamber, updating the statuses of the robot and the pre-cleaning chamber, and executing S 107 ;
S 104 - 1 : determining whether processing of the degassing chamber is completed; if the processing of the degassing chamber is completed and the robot is idle, executing S 104 - 2 ; and if the processing of the degassing chamber is not completed, executing S 105 ;
S 104 - 2 : determining whether the disc is available, and if the disc is available, executing S 104 - 3 ;
S 104 - 3 : using the robot to transport the pieces of materials from the degassing chamber to the processing position, updating the statuses of the robot, the degassing chamber and the process position, and executing S 107 ; and
S 105 - 1 : determining whether the processing of the degassing chamber is completed; if the processing of the degassing chamber is completed and the robot is idle, executing S 104 - 2 ; and if the processing of the degassing chamber is not completed, executing S 106 .

Assignees

• Beijing Naura Microelectronics Equipment Co Ltd

Inventors

• Cui Lin

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/0468

  comprising a chamber adapted to a particular process · CPC title

• H10P72/30 Primary

  for conveying, e.g. between different workstations · CPC title

• G06Q10/1093 Primary

  Calendar-based scheduling for persons or groups · CPC title

• G05B19/418

  Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] · CPC title