Epoxy mold making and micromilling for microfluidics
US-2017225363-A1 · Aug 10, 2017 · US
US11305277B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11305277-B2 |
| Application number | US-201816634100-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 10, 2018 |
| Priority date | Dec 10, 2018 |
| Publication date | Apr 19, 2022 |
| Grant date | Apr 19, 2022 |
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A micro-structured mold-core of a microfluidic chip and its manufacturing method, which includes the steps of: installing a mold-core on a worktable of a five-axis machining center, and installing a micro-milling cutter and a fine milling-grinding tool on a tool holder of the five-axis machining center; rough-milling a surface of the mold-core using the micro-milling cutter according to a preset first machining track, to form a micro-projection array structure with a specific shape; finishing a surface of the micro-projection array structure formed by rough-milling using the fine milling-grinding tool according to a preset second machining track, to form a desired micro-projection array structure; and installing the mold-core on an injection molding machine, and adding particle material of polymer for micro injection molding to form a microfluidic chip, or installing the mold-core on a hot-embossing machine, and adding block material of polymer for hot embossing to form a microfluidic chip.
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What is claimed is: 1. A manufacturing method of a microfluidic chip, comprising the following steps: installing a mold-core on a worktable of a five-axis machining center, and installing a micro-milling cutter and a fine milling-grinding tool on a tool holder of the five-axis machining center; rough-milling a surface of the mold-core using the micro-milling cutter according to a preset first machining track, to form a micro convex array structure with a specific shape; finishing a surface of the micro convex array structure formed by rough-milling using the fine milling-grinding tool according to a preset second machining track, to form a desired micro convex array structure, and wherein the size of the micro convex array structure formed by rough-milling is larger than the size of which formed by finishing; and installing the mold-core on an injection molding machine, and adding particle material of polymer for micro injection molding to form a microfluidic chip, and a surface of the microfluidic chip has a micro-grooved array structure. 2. The manufacturing method of a microfluidic chip according to claim 1 , wherein a spindle speed of the five-axis machining center is in a range from 5000 to 20,000 rpm, and a feed depth of the micro-milling cutter is in a range from 0.1 to 50 micrometers, and a feed speed of the micro-milling cutter is in a range from 10 to 1000 mm/min. 3. The manufacturing method of a microfluidic chip according to claim 1 , wherein the micro-grooved array structure comprises a plurality of micro-channels connected in sequence, and a groove depth of each micro-channel is in a range from 10 to 800 microns. 4. The manufacturing method of a microfluidic chip according to claim 3 , wherein each of the micro-channels comprises a first channel, a second channel and a transition channel connected between the first channel and the second channel, and a trench interval between the first channel and the second channel ranges from 10 to 500 microns. 5. The manufacturing method of a microfluidic chip according to claim 1 , wherein the material of the mold-core comprises ceramic, diamond, die steel or hard alloy. 6. The manufacturing method of a microfluidic chip according to claim 1 , wherein the material of the microfluidic chip comprises one of polyamide, polyethylene terephthalate, polydimethylsiloxane, polymethyl methacrylate, polypropylene or polycarbonate, or a mixture of two or more. 7. The manufacturing method of a microfluidic chip according to claim 4 , wherein the first channel, the second channel and the transition channel each comprises: a first side surface; a second side surface disposed opposite to the first side surface; and a bottom surface, both ends of which are respectively connected to the first side surface and the second side surface; the first side surface, the bottom surface and the second side surface together form a V-shape, a U-shape or a rectangle. 8. A manufacturing method of a microfluidic chip, comprising the following steps: installing a mold-core on a worktable of a five-axis machining center, and installing a micro-milling cutter and a fine milling-grinding tool on a tool holder of the five-axis machining center; rough-milling a surface of the mold-core using the micro-milling cutter according to a preset first machining track to form a micro convex array structure with a specific shape; finishing a surface of the micro convex array structure formed by rough-milling using the fine milling-grinding tool according to a preset second machining track to form a desired micro convex array structure, and wherein the size of the micro convex array structure formed by rough-milling is larger than the size of which formed by finishing; and installing the mold-core on a hot-embossing machine, and adding block material of polymer for hot embossing to form a microfluidic chip, and a surface of the microfluidic chip has a micro-grooved array structure. 9. The manufacturing method of a microfluidic chip according to claim 8 , wherein a spindle speed of the five-axis machining center is in a range from 5000 to 20,000 rpm, and a feed depth of the micro-milling cutter is in a range from 0.1 to 50 micrometers, and a feed speed of the micro-milling cutter is in a range from 10 to 1000 mm/min. 10. The manufacturing method of a microfluidic chip according to claim 8 , wherein the micro-grooved array structure comprises a plurality of micro-channels connected in sequence, and a groove depth of each micro-channel is in a range from 10 to 800 microns. 11. The manufacturing method of a microfluidic chip according to claim 10 , wherein each of the micro-channels comprises a first channel, a second channel and a transition channel connected between the first channel and the second channel, and a trench interval between the first channel and the second channel ranges from 10 to 500 microns. 12. The manufacturing method of a microfluidic chip according to claim 8 , wherein the material of the mold-core comprises ceramic, diamond, die steel or hard alloy. 13. The manufacturing method of a microfluidic chip according to claim 8 , wherein the material of the microfluidic chip comprises one of polyamide, polyethylene terephthalate, polydimethylsiloxane, polymethyl methacrylate, polypropylene or polycarbonate, or a mixture of two or more. 14. The manufacturing method of a microfluidic chip according to claim 11 , wherein the first channel, the second channel and the transition channel each comprises: a first side surface; a second side surface disposed opposite to the first side surface; and a bottom surface, both ends of which are respectively connected to the first side surface and the second side surface; the first side surface, the bottom surface and the second side surface together form a V-shape, a U-shape or a rectangle. 15. A micro-structured mold-core of a microfluidic chip with a mold-core body, wherein, a micro convex array structure being disposed on a surface of the mold-core body, wherein the micro convex array structure is formed by rough-milling the surface of the mold-core body with a micro-milling cutter to form a micro convex array structure with a specific shape, and finishing the surface of the micro convex array structure formed by rough-milling using a fine milling-grinding tool, wherein the micro convex array structure comprises a plurality of micro convexities connected in sequence, and each of the micro convexities comprises a first connection section, a second connection section and a transition section connected between the first connection section and the second connection section. 16. The micro-structured mold-core of a microfluidic chip according to claim 15 , wherein the first connection section is a straight section, the second connection section is a straight section, and the transition section is an arc-shaped or a straight section. 17. The micro-structured mold-core of a microfluidic chip according to claim 15 , wherein the heights of the first connection section, the second connection section and the transition section each of which is in a range from 10 to 800 microns, and the widths of the first connection section, the second connection section and the transition section each of which is in a range from 10 to 500 microns, and an interval distance between the first connection section and the second connection section is in a range from 10 to 500 microns. 18. The micro-structured mold-core of a microfluidic chip according to claim 15 , wherein the first connection section, the second connection sectio
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