Coating film, manufacturing method therefor, and pvd apparatus
US-2018371608-A1 · Dec 27, 2018 · US
US11293548B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11293548-B2 |
| Application number | US-201816624781-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 15, 2018 |
| Priority date | Jun 20, 2017 |
| Publication date | Apr 5, 2022 |
| Grant date | Apr 5, 2022 |
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A sliding member (10) including a coating film (1) composed of a hard carbon layer on a sliding surface (16) of a base material (11). The coating film has, when a cross section thereof is observed by a bright-field TEM image, a thickness within a range of 1 μm to 50 μm, and is configured by repeating units including black hard carbon layers (B), relatively shown in black, and white hard carbon layers (W), relatively shown in white, and laminated in a thickness direction, and comprise an inclined region, provided on a base material side, where thicknesses of white hard carbon layers (W) of the repeating units gradually increase in a thickness direction, and a homogeneous region\, provided on a surface side of the sliding member, where thicknesses of the white hard carbon layers (W) of the repeating units are the same or substantially the same in the thickness direction.
Opening claim text (preview).
What is claimed is: 1. A sliding member comprising: a coating film composed of a hard carbon layer on a sliding surface, the coating film having, when a cross section thereof is observed by a bright-field TEM image, a thickness within a range of 1 μm to 50 μm, and configured by repeating units including black hard carbon layers, relatively shown in black, and white hard carbon layers, relatively shown in white, and laminated in a thickness direction, and the coating film including an inclined region, provided on a base material side, where thicknesses of the white hard carbon layers of the repeating units gradually increase in a thickness direction, and a homogeneous region, provided on a surface side, where thicknesses of the white hard carbon layers of the repeating units are the same or substantially the same in the thickness direction, the inclined region having a form grown into a V-shape or a radial pattern in the thickness direction, and the homogeneous region not having a form grown into a V-shape or a radial pattern in the thickness direction. 2. The sliding member according to claim 1 , wherein a thickness ratio of the black hard carbon layer to the white hard carbon layer (black thickness/white thickness) in the homogeneous region is 0.01 to 0.3. 3. The sliding member according to claim 1 , wherein the white hard carbon layer has an sp 2 /sp 3 ratio of 0.2 to 0.7, and the black hard carbon layer has an sp 2 /sp 3 ratio lower than the sp 2 /sp 3 ratio of the white hard carbon layer and the sp 2 /sp 3 ratio is 0.05 to 0.3. 4. The sliding member according to claim 1 , wherein, when a cross section thereof is observed by a bright-field TEM image, a hard carbon base film relatively shown in white is provided between the base material or a base film provided on the base material, and the coating film. 5. The sliding member according to claim 1 , wherein, when a cross section thereof is observed by a bright-field TEM image, a hard carbon surface film relatively shown in white is provided on the coating film. 6. The sliding member according to claim 1 , wherein the sliding member is a piston ring. 7. A coating film having, when a cross section thereof is observed by a bright-field TEM image, a thickness within a range of 1 μm to 50 μm, and configured by repeating units including black hard carbon layers, relatively shown in black, and white hard carbon layers, relatively shown in white, and laminated in a thickness direction, the coating film comprising: an inclined region where thicknesses of the white hard carbon layers of the repeating units gradually increase in a thickness direction; and a homogeneous region, provided on the inclined region, where thicknesses of the white hard carbon layers of the repeating units are the same or substantially the same in the thickness direction, the inclined region having a form grown into a V-shape or a radial pattern in the thickness direction, and the homogeneous region not having a form grown into a V-shape or a radial pattern in the thickness direction.
Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing · CPC title
on metallic substrates or on substrates of boron or silicon · CPC title
with layers graded in composition or physical properties · CPC title
Deposition of sublayers, e.g. to promote adhesion of the coating (C23C14/027 takes precedence) · CPC title
Electric arc evaporation · CPC title
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