Methods and systems for cooling a vacuum pump

Patent metadata

Field	Value
Publication number	US-11293422-B2
Application number	US-201916530477-A
Country	US
Kind code	B2
Filing date	Aug 2, 2019
Priority date	Aug 2, 2019
Publication date	Apr 5, 2022
Grant date	Apr 5, 2022

Abstract

A system comprises: a vacuum chamber disposed within a housing and having a vacuum port; a vacuum pump within the housing and having a gas inlet port that is fluidically coupled to the vacuum port; and a fluid circuit that comprises: one or more fluidic tubing lines, channels or conduits in thermal contact with a housing of the vacuum pump; a liquid pump fluidically coupled to an inlet of the one or more fluidic tubing lines, channels or conduits; and a heat exchanger having a heat exchanger inlet and a heat exchanger outlet, wherein the heat exchanger inlet is fluidically coupled to an outlet of the one or more fluidic tubing lines, channels or conduits and the heat exchanger outlet is fluidically coupled to the liquid pump. The fluid circuit may also include a portion that is in thermal contact with the vacuum chamber.

First claim

We claim:

1. A system comprising:
a vacuum chamber disposed within a housing and having:
a vacuum port; and
a wall having at least one channel, said at least one channel comprising a single channel inlet and a single channel outlet;

a vacuum pump within the housing and having a gas inlet port that is fluidically coupled to the vacuum port;
one or more fluidic tubing lines, channels or conduits in thermal contact with a housing of the vacuum pump, wherein an outlet of the one or more fluidic tubing lines, channels or conduits is fluidically coupled to the at least one channel inlet;
a liquid pump fluidically coupled to an inlet of the one or more fluidic tubing lines, channels or conduits that are in thermal contact with the vacuum pump housing; and
a heat exchanger comprising:
a heat exchanger inlet that is fluidically coupled to the at least one channel outlet; and
a heat exchanger outlet that is fluidically coupled to the liquid pump.

2. A system as recited in claim 1 , wherein the one or more fluidic tubing lines, channels or conduits or conduits are in thermal contact with a motor housing of the vacuum pump.

3. A system as recited in claim 2 , wherein the one or more fluidic tubing lines, channels or conduits are one or more channels or conduits embedded within the motor housing.

4. A system as recited in claim 1 , wherein the vacuum chamber is a component of a scientific analysis apparatus.

5. A system as recited in claim 4 , wherein the scientific analysis apparatus is either a mass spectrometer or an electron microscope.

6. A system as recited in claim 1 , wherein the vacuum chamber is a component of a chemical vapor deposition apparatus.

7. A system as recited in claim 1 , wherein the liquid pump and the heat exchanger are disposed outside of the housing.

8. A system as recited in claim 1 , further comprising:
a variable speed fan configured to pass air flow onto or across an exterior of the vacuum chamber;
a temperature sensor within the vacuum chamber; and
an electronic controller or computer configured to receive a temperature-dependent signal from the temperature sensor and configured to transmit a control signal to the variable speed fan, wherein the electronic controller or computer comprises computer-readable instructions that are operable to cause transmission of the control signal in response to the temperature-dependent signal.

9. A method of cooling a vacuum pump that is disposed within a housing within which is also disposed a vacuum chamber that is fluidically coupled to the vacuum pump, comprising:
passing a flow of a coolant liquid through one or more fluidic tubing lines, channels or conduits that are in thermal contact with a housing of the vacuum pump;
further passing the flow of the coolant liquid through a heat exchanger that is disposed outside of the housing and that cools the coolant liquid;
recirculating the cooled coolant liquid through the one or more fluidic tubing lines, channels or conduits; and
causing the flow of the coolant liquid, after it exits from the one or more fluidic tubing lines, channels or conduits that are in thermal contact with the housing, to pass through at least one channel within a wall of the vacuum chamber.

Assignees

• Thermo Finnigan Llc

Inventors

• Carrera Jaime A
• Kreft Dustin J

Classifications

• F04D19/042

  Turbomolecular vacuum pumps · CPC title

• F04B41/06

  Combinations of two or more pumps · CPC title

• F04D25/16

  Combinations of two or more pumps {; Producing two or more separate gas flows} · CPC title

• F04B37/14 Primary

  to obtain high vacuum · CPC title

• H01J49/24

  Vacuum systems, e.g. maintaining desired pressures · CPC title