Conductive structure, method for manufacturing same, and electrode comprising conductive structure

Patent metadata

Field	Value
Publication number	US-11293088-B2
Application number	US-201615779835-A
Country	US
Kind code	B2
Filing date	Dec 7, 2016
Priority date	Dec 7, 2015
Publication date	Apr 5, 2022
Grant date	Apr 5, 2022

Abstract

The present specification relates to a conductive structure, a method of manufacturing the same, and an electrode including the conductive structure.

First claim

The invention claimed is:

1. A conductive structure, comprising:
a substrate;
a metal layer provided on the substrate; and
a light reflection reducing layer provided on at least one surface of the metal layer,
wherein the light reflection reducing layer consists of a four component system of Zn, Cu, Al and O, where
a content of Zn is 20 at % or more and 30 at % or less,
a content of Cu is 1 at % or more and 10 at % or less,
a content of Al is 30 at % or more and 40 at % or less, and
a content of O is 35 at % or more and 45 at % or less.

2. The conductive structure of claim 1 , wherein a thickness of the light reflection reducing layer is 10 nm or more and 100 nm or less.

3. The conductive structure of claim 1 , wherein with light at a wavelength of 380 nm to 780 nm, an average light reflectance of a surface of the light reflection reducing layer is 25% or less.

4. The conductive structure of claim 1 , wherein the metal layer and the light reflection reducing layer include a metal pattern layer including a plurality of openings and a light reflection reducing pattern layer including a plurality of openings, respectively.

5. The conductive structure of claim 4 , wherein each of line widths of the metal pattern layer and the light reflection reducing pattern layer is 0.1 μm or more and 100 μm or less.

6. The conductive structure of claim 4 , wherein a line gap between adjacent pattern lines of the metal pattern layer and the light reflection reducing pattern layer is 0.1 μm or more and 100 μm or less.

7. An electrode comprising the conductive structure of claim 1 .

8. The electrode of claim 7 , wherein the electrode is an electrode for a touch panel, an electrode for a liquid crystal display, or an electrode for an organic light emitting diode (OLED) display.

9. A method of manufacturing a conductive structure, the method comprising:
preparing a substrate;
forming a metal layer on the substrate; and
forming a light reflection reducing layer on the metal layer,
wherein the light reflection reducing layer consists of a four component system of Zn, Cu, Al and O, where
a content of Zn is 20 at % or more and 30 at % or less,
a content of Cu is 1 at % or more and 10 at % or less,
a content of Al is 30 at % or more and 40 at % or less, and
a content of O is 35 at % or more and 45 at % or less.

10. The method of claim 9 , wherein the forming of the light reflection reducing layer uses a sputter method using one or more kinds among a metal selected from Zn, Cu, and Al and an oxide of one or two or more selected from among Zn, Cu, and Al as a sputtering target.

11. The method of claim 10 , wherein the oxide of the metal is a material in which heterogeneous metals are doped.

12. The method of claim 10 , wherein the sputtering target includes one or more kinds of metal selected from Zn, Cu, and Al, and one or more kinds selected from the group consisting of ZnO, AZO, Al 2 O 3 , Cu 2 O, and CuO.

13. The method of claim 9 , further comprising:
forming a metal pattern layer and a light reflection reducing pattern layer by patterning the metal layer and the light reflection reducing layer.

Assignees

• Lg Chemical Ltd

Inventors

• Lee Ilha
• Min Jin Hyuk
• Kim Ki-Hwan
• Park Chan Hyoung

Classifications

• C23C14/042 Primary

  using masks · CPC title

• H10K59/80517

  Multilayers, e.g. transparent multilayers · CPC title

• H10K59/805

  Electrodes · CPC title

• C23C14/08 Primary

  Oxides (C23C14/10 takes precedence) · CPC title

• G02F1/134363

  for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS] · CPC title