Tuning fork-type piezoelectric vibration piece and tuning fork-type piezoelectric vibrator using the vibration piece

Patent metadata

Field	Value
Publication number	US-11290082-B2
Application number	US-201816481961-A
Country	US
Kind code	B2
Filing date	Mar 22, 2018
Priority date	Mar 30, 2017
Publication date	Mar 29, 2022
Grant date	Mar 29, 2022

Abstract

Main surface electrodes formed on main surfaces on front and back sides of vibrating arms are electrically coupled via through electrodes formed in a stem portion so as to penetrate through front and back surfaces thereof. One of the main surface electrodes of the vibrating arm is electrically coupled to side surface electrodes through a routing wiring formed by way of a crotch part between roots of the vibrating arms, and the one of the main surface electrodes is further electrically coupled to the other one of the main surface electrodes through the side surface electrodes.

First claim

The invention claimed is:

1. A tuning fork-type piezoelectric vibration piece, comprising:
a stem portion; and

first and second vibrating arms formed so as to extend in a pair in a direction from one end side of the stem portion,
one of main surface electrodes formed on main surfaces on front and back sides of the first vibrating arm being coupled to another one of the main surface electrodes formed on the main surfaces of the first vibrating arm through one of through electrodes that are formed in a pair in the stem portion in a direction of thickness thereof,
the one of the main surface electrodes of the first vibrating arm being coupled to side surface electrodes that are formed in a pair, respectively, on an outer side surface and an inner side surface of the second vibrating arm through a first routing wiring formed by way of a crotch part between roots of the first and second vibrating arms extending from the stem portion,
the first routing wiring being formed on an end surface of the crotch part from the side surface electrode on the inner side surface of the second vibrating arms, the first routing wiring extending toward the first vibrating arm along the end surface of the crotch part, and the first routing wiring being connected to an extraction electrode around the one of through electrodes,
one of main surface electrodes formed on main surfaces on front and back sides of the second vibrating arm being coupled to another one of the main surface electrodes of the second vibrating arm through another one of the through electrodes, the one of the main surface electrodes of the second vibrating arm being formed on the main surface on one of the front and back sides opposite to the front or back side where the one of the main surface electrodes of the first vibrating arm is formed,
the one of the main surface electrodes of the second vibrating arm being coupled to side surface electrodes that are formed in a pair, respectively, on an outer side surface and an inner side surface of the first vibrating arm via a second routing wiring formed by way of the crotch part,
the another one of the main surface electrodes of the first vibrating arm being coupled to the side surface electrodes on the outer and inner side surfaces of the second vibrating arm,
the second routing wiring being formed on an end surface of the crotch part from the side surface electrode on the inner side surface of the first vibrating arm, the second routing wiring extending toward the second vibrating arm along the end surface of the crotch part, and the second routing wiring being connected to an extraction electrode around the another one of through electrodes,
the another one of the main surface electrodes of the second vibrating arm being coupled to the side surface electrodes on the outer and inner side surfaces of the first vibrating arm, and
the shape of the through holes in plan view on the front and back sides of the stem portion being substantially circular, the opening diameter of the through holes being 0.05 mm to 0.08 mm.

2. The tuning fork-type piezoelectric vibration piece according to claim 1 , wherein the through electrodes formed on front and back main surfaces of the stem portion have a substantially circular shape in plan view.

3. A tuning fork-type piezoelectric vibrator, comprising:
the tuning fork-type piezoelectric vibration piece according to claim 1 ; and

a package in which the tuning fork-type piezoelectric vibration piece is housed, wherein
the tuning fork-type piezoelectric vibration piece comprises electrodes for connection extracted from driving electrodes including the main surface electrodes and the side surface electrodes of the first and second vibrating arms,
the electrodes for connection are conductively coupled to electrodes mounted in a base constituting the package, and

the tuning fork-type piezoelectric vibration piece is air-tightly sealed in the package.

Assignees

• Daishinku Corp
• Daishtnku Corp

Inventors

• Yamashita Hiroaki

Classifications

• H03H9/215 Primary

  consisting of quartz · CPC title

• G04C3/12

  driven by piezoelectric means; driven by magneto-strictive means · CPC title

• H03H9/1021

  the BAW device being of the cantilever type · CPC title

• H03H9/132

  characterized by a particular shape · CPC title