Displacement enlarging mechanism and optical apparatus using the same

Patent metadata

Field	Value
Publication number	US-11287643-B2
Application number	US-201816492833-A
Country	US
Kind code	B2
Filing date	Mar 8, 2018
Priority date	Mar 17, 2017
Publication date	Mar 29, 2022
Grant date	Mar 29, 2022

Abstract

A displacement enlarging mechanism includes a substrate, a fixing portion provided at the substrate, an actuator coupled to the fixing portion, a beam extending in a direction substantially parallel to an upper surface of the substrate and having a base end side has been coupled to the actuator and coupled to the fixing portion and having folded back in a direction crossing the upper surface of the substrate, and a coupling portion and a mirror coupled to a folded-back portion formed by folding back of the beam. The actuator drives the beam to push or pull the beam from the base end side in the direction of the folded-back portion.

First claim

The invention claimed is:

1. A displacement enlarging mechanism comprising:
a substrate;
a fixing portion provided at the substrate;
an actuator coupled to the fixing portion;
a beam extending in a direction substantially parallel to an upper surface of the substrate and having a base end side coupled to the actuator, extending toward the base end side and having folded back in a direction crossing the upper surface at a folded-back portion of an intermediate portion, and coupled to the fixing portion on a tip end side; and
a movement portion coupled to the folded-back portion of the beam,
wherein the actuator drives the beam to push or pull the beam from the base end side in a folded-back portion direction.

2. The displacement enlarging mechanism according to claim 1 , wherein
the beam includes a first beam and a second beam, and the movement portion is provided between the first beam and the second beam.

3. The displacement enlarging mechanism according to claim 2 , wherein
the folded-back portion includes a first folded-back portion and a second folded-back portion formed by folding back of the first beam and the second beam, and
the movement portion is coupled to the first folded-back portion and the second folded-back portion.

4. The displacement enlarging mechanism according to claim 2 , wherein
the actuator includes a first actuator and a second actuator, and
the first beam is coupled to the first actuator, and the second beam is coupled to the second actuator.

5. The displacement enlarging mechanism according to claim 1 , wherein
the movement portion is coupled to the folded-back portion of the beam through a hinge.

6. The displacement enlarging mechanism according to claim 1 , wherein
the movement portion is coupled to the folded-back portion of the beam and the fixing portion through hinges.

7. The displacement enlarging mechanism according to claim 1 , wherein
the base end side of the beam is folded back and is coupled to the actuator.

8. The displacement enlarging mechanism according to claim 1 , wherein
the actuator is coupled to the fixing portion in a curved or bent state, and is a thermal actuator to be driven by heating.

9. The displacement enlarging mechanism according to claim 1 , wherein
the beam has a first protruding portion extending in the direction parallel to the upper surface of the substrate.

10. The displacement enlarging mechanism according to claim 1 , wherein
the movement portion has a second protruding portion extending in the direction parallel to the upper surface of the substrate.

11. The displacement enlarging mechanism according to claim 9 , wherein
the fixing portion has a recessed portion configured to house the first protruding portion, and a side surface of the recessed portion and a side surface of the first protruding portion are provided with a predetermined spacing.

12. The displacement enlarging mechanism according to claim 1 , wherein
a heat dissipation block is provided with a predetermined spacing from the beam on a lower side of the beam.

13. The displacement enlarging mechanism according to claim 12 , wherein
the substrate is configured such that a device layer, an oxide layer, and a handle layer are stacked on each other in this order, and
the beam includes the device layer, and the heat dissipation block includes the handle layer and is coupled to the fixing portion.

14. The displacement enlarging mechanism according to claim 1 , wherein
the substrate is configured such that the device layer, the oxide layer, and the handle layer are stacked on each other in this order, and
the actuator and the beam include the device layer, and the movement portion includes a first portion having the device layer and a second portion having the device layer, the oxide layer, and the handle layer.

15. An optical apparatus comprising:
the displacement enlarging mechanism according to claim 1 ;
a first electrode arranged on the fixing portion of the displacement enlarging mechanism and electrically connected to one end of the actuator; and
a second electrode arranged on the fixing portion of the displacement enlarging mechanism and electrically connected to the other end of the actuator,
wherein the movement portion reflects light entering the displacement enlarging mechanism, allows the light to penetrate the movement portion, or absorbs the light.

16. The displacement enlarging mechanism according to claim 3 , wherein
the actuator includes a first actuator and a second actuator, and
the first beam is coupled to the first actuator, and the second beam is coupled to the second actuator.

17. The displacement enlarging mechanism according to claim 10 , wherein
the fixing portion has a recessed portion configured to house the second protruding portion, and a side surface of the recessed portion and a side surface of the second protruding portion are provided with a predetermined spacing.

Assignees

• Sumitomo Precision Prod Co

Inventors

• Kiuchi Mario

Classifications

• G02B26/0866

  the reflecting means being moved or deformed by thermal means · CPC title

• B81B3/0037 Primary

  For increasing stroke, i.e. achieve large displacement of actuated parts · CPC title

• G01J1/04

  Optical or mechanical part {supplementary adjustable parts} · CPC title

• B81B2201/04

  Optical MEMS · CPC title

• B81B3/0021

  Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title