High performance accelerometer

Patent metadata

Field	Value
Publication number	US-11287443-B2
Application number	US-202016794952-A
Country	US
Kind code	B2
Filing date	Feb 19, 2020
Priority date	Feb 20, 2019
Publication date	Mar 29, 2022
Grant date	Mar 29, 2022

Abstract

A MEMS accelerometer includes a suspended spring-mass system that has a frequency response to accelerations experienced over a range of frequencies. The components of the suspended spring-mass system such as the proof masses respond to acceleration in a substantially uniform manner at frequencies that fall within a designed bandwidth for the MEMS accelerometer. Digital compensation circuitry compensates for motion of the proof masses outside of the designed bandwidth, such that the functional bandwidth of the MEMS accelerometer is significantly greater than the designed bandwidth.

First claim

What is claimed is:

1. A microelectromechanical (MEMS) accelerometer, comprising:
a suspended spring-mass system comprising at least one proof mass that moves in response to acceleration, wherein the suspended spring-mass system has a designed bandwidth for sensing acceleration;
sense circuitry coupled to receive an acceleration signal from the suspended spring-mass system, wherein a gain of the acceleration signal is uniform while a frequency of the acceleration signal corresponds to the designed bandwidth for sensing acceleration, and wherein the gain of the acceleration signal varies when the frequency of the acceleration signal exceeds the designed bandwidth for sensing acceleration; and
compensation circuitry configured to receive a sense signal that is based on an output of the sensing circuitry, wherein a gain of the sense signal is based on the gain of the acceleration signal, wherein the compensation circuitry is further configured to modify the gain of the sense signal when the frequency of the acceleration signal exceeds the designed bandwidth for sensing acceleration, and wherein the modification of the gain of the sense signal is complementary to a frequency response of the suspended spring-mass system at the frequency of the acceleration signal.

2. The MEMS accelerometer of claim 1 , wherein the sense circuitry comprises a capacitance-to-voltage (“C2V”) converter.

3. The MEMS accelerometer of claim 1 , wherein the compensation circuitry comprises a compensation filter that modifies the designed bandwidth of the MEMS.

4. The MEMS sensor of claim 1 , wherein the sense circuitry further comprises filtering circuitry, wherein the filtering circuitry modifies the gain of the acceleration signal, an offset of the acceleration signal, or a sensitivity of the acceleration signal, and wherein an output of the filtering circuitry comprises the sense signal.

5. The MEMS accelerometer of claim 1 , wherein the MEMS accelerometer has a quality factor greater than 0.7.

6. The MEMS accelerometer of claim 1 , wherein the compensation circuitry comprises a digital compensation filter.

7. The MEMS accelerometer of claim 6 , wherein the digital compensation filter comprises a FIR filter.

8. The MEMS accelerometer of claim 6 , wherein the digital compensation filter comprises an IIR filter with poles and zeros.

9. The MEMS accelerometer of claim 6 , wherein a transfer function of the digital compensation filter is a function of temperature.

10. The MEMS accelerometer of claim 1 , further comprising:
a test input coupled to the suspended spring-mass system, wherein the test input is configured to receive a plurality of test motion signals to apply to the suspended spring-mass system to cause test movements of the at least one proof mass at a plurality of test frequencies; and
a test output coupled to the sense circuitry to output a plurality of test acceleration signals associated with the plurality of test frequencies.

11. The MEMS accelerometer of claim 10 , wherein a self-test circuit associated with the test input and the test output measures the designed bandwidth based on the test motion signals and the test acceleration signals.

12. The MEMS accelerometer of claim 10 , further comprising calibration circuitry configured to generate the test input and to identify values for the modification of the sense signal based on the test motion signals and the test acceleration signals.

13. The MEMS accelerometer of claim 12 , wherein the compensation circuitry modifies the gain of the sense signal based on the identified values.

14. The MEMS accelerometer of claim 12 , wherein the calibration circuitry is further configured to measure a plurality of test temperatures, wherein the designed bandwidth or the modification of the sense signal is dependent on the test temperatures.

15. The MEMS accelerometer of claim 13 , wherein the compensation circuitry is configured to modify the sense signal based on a sensed temperature.

16. A method for operating a MEMS accelerometer, comprising:
outputting, by sense circuitry, a sense signal that is based on a movement of at least one proof mass of a suspended spring-mass system, wherein the suspended spring-mass system has a designed bandwidth for sensing acceleration;
receiving, by compensation circuitry, the sense signal, wherein a gain associated with the sense signal is uniform while a frequency of an acceleration represented by the sense signal corresponds to the designed bandwidth for sensing acceleration, and wherein the gain associated with the sense signal varies when the frequency of the acceleration exceeds the designed bandwidth for sensing acceleration; and
modifying, by the compensation circuitry, the gain of the sense signal while the frequency of the acceleration exceeds the designed bandwidth for sensing acceleration, wherein the modification of the gain of the sense signal is complementary to a frequency response of the suspended spring-mass system at the frequency of the sense signal.

17. The method of claim 16 , further comprising:
measuring a plurality of temperatures for the MEMS accelerometer;
measuring a plurality of sensed accelerations associated with a plurality of frequencies of the movement of the at least one proof mass; and
determining the modification of the sense signal based on the plurality of temperatures, the plurality of sensed accelerations, and the plurality of frequencies.

18. The method of claim 17 , further comprising updating a plurality of values of the compensation circuitry based on the determined modification.

19. The method of claim 17 , further comprising:
measuring a temperature associated with the sense signal; and
updating the modification of the gain of the sense signal based on the measured temperature.

Assignees

• Invensense Inc

Inventors

• Dakshinamurthy Sriraman
• Tsinker Vadim
• Thompson Matthew Julian

Classifications

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• G01P2015/0868

  using self-test structures integrated into the microstructure · CPC title

• B81B2201/0235

  Accelerometers · CPC title

• G01P15/0802

  Details · CPC title

• G01P15/08

  with conversion into electric or magnetic values · CPC title