Coating apparatus and coating method capable of easily adjusting thickness of coating layer
US-2024216946-A1 · Jul 4, 2024 · US
US11286392B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11286392-B2 |
| Application number | US-201415024742-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 25, 2014 |
| Priority date | Sep 25, 2013 |
| Publication date | Mar 29, 2022 |
| Grant date | Mar 29, 2022 |
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The invention relates to a solid plasma polymer body, especially a plasma polymer layer, which has an exceptionally high modulus of elasticity at a given C/O ratio. It further relates to a solid body comprising a substrate and, applied to this substrate, a plasma polymer layer of the invention.
Opening claim text (preview).
The invention claimed is: 1. A plasma polymer layer for being disposed upon a solid body, wherein a lower limit of a modulus of elasticity of the plasma polymer layer is determined by a following function (1): E= 25−31.5* x+ 13.5* x 2 −1.85* x 3 (1) with x=a C/O ratio determined by means of XPS, E=the modulus of elasticity [GPa], wherein the E or the modulus of elasticity is ≥1.25 GPa and ≤30.0 GPa, and the x is ≥0.5 and ≤2.0; wherein at the E or the modulus of elasticity of ≥1.25 GPa and <10 GPa, the maximum of the Si 2p peak on a surface of the plasma polymer layer as measured by means of XPS is between 102.5 eV-102.8 eV; and wherein the plasma polymer layer is produced using a system having a ratio of electrode area and mass area resulting in a self-bias of less than 10 V. 2. The plasma polymer layer as claimed in claim 1 , wherein a maximum polar component of a surface energy of the surface of the plasma polymer layer is determined by a function (2) or a function (2a): σ( p )=0.28* E+ 0.106 (2) or σ( p )=1.2 (2a), whichever value of the function (2) and the function (2a) is greater, with σ(p)=a polar component of the surface energy [mN/m], E=the modulus of elasticity [GPa], wherein the E or the modulus of elasticity is ≥1.25 GPa and ≤30.0 GPa. 3. The plasma polymer layer as claimed in claim 1 , wherein the surface of the plasma polymer layer has a refractive index at 550 nm of 1.4 to 1.54. 4. The plasma polymer layer as claimed in claim 1 , wherein the plasma polymer layer has a thickness of 5 nm-20 μm. 5. The plasma polymer layer as claimed in claim 1 , wherein a hardness of the plasma polymer layer as measured by means of nanoindentation is ≥0.5 GPa. 6. The plasma polymer layer as claimed in claim 1 , wherein a molar ratio on the surface of the plasma polymer layer as measured by means of XPS is defined by at least one of: O: Si 1.0-2.0, and C: Si 1.1-2.5. 7. The plasma polymer layer as claimed in claim 1 , wherein based on a total number of atoms present in the plasma polymer layer excluding H, a molar proportion on the surface of the plasma polymer layer measured by means of XPS is: O: 25-50 at %, Si: 22-28 at %, and C: 28-50 at %. 8. The plasma polymer layer as claimed in claim 1 , wherein the plasma polymer layer is disposed on the solid body in a mold as a separation layer. 9. The plasma polymer layer as claimed in claim 8 , wherein the solid body is a fiber composite plastic. 10. The plasma polymer layer as claimed in claim 9 , wherein the fiber composite plastic is selected from the group consisting of an elastomer, a thermoplastic and a thermoset. 11. A layer for improving a cleanability of the solid body with a cleaning substance selected from the group consisting of a water, an aqueous substance, a CO 2 substance and a solvent, wherein the layer comprises the plasma polymer layer as claimed in claim 1 . 12. An anticorrosion layer for a surface of the solid body comprising the plasma polymer layer as claimed in claim 1 . 13. A component comprising the plasma polymer layer as claimed in claim 12 , wherein the plasma polymer layer is disposed on a surface of the solid body, and wherein the surface of the solid body consists of a metal or a metal alloy or comprises the metal or the metal alloy. 14. The component as claimed in claim 13 , wherein the metal is selected from the group of substances consisting essentially of an iron, an aluminum, a magnesium, a copper, a silver, a nickel, a zinc, and a titanium, or the metal alloy consists essentially of a combination of one or more of the aforementioned substances. 15. A component comprising the plasma polymer layer as claimed in claim 1 and the solid body, wherein the plasma polymer layer is disposed on a substrate of the solid body. 16. The component as claimed in claim 15 , wherein the substrate of the solid body comprises a metal or a metal alloy on a surface of the substrate, and the plasma polymer layer is disposed upon the metal or the metal alloy on the surface of the substrate. 17. The component as claimed in claim 16 , wherein the solid body is selected from the group consisting of a heat transferer, an automotive wheel rim, a furniture decorative element, a pull-out rail, an automotive decorative element, an automobile functional element, a medical equipment element, a tool and a railing. 18. The component as claimed in claim 15 , wherein the solid body is selected from the group consisting of a device for shaping FRPs or other plastics, a press, a mold forming device, an injection mold device, a casting mold device, a static sealing device, a component of an adhesive application device, a cooking device, a cooking pan, a photovoltaic module, a power-generating element, a packaging component, a conveyor, a transport element, a painting device, a printing device, a conduit, a cover, and an ink vessel. 19. A method of producing a coated substrate, comprising the steps of: a) providing a substrate to be coated; and b) coating the substrate with a layer as claimed in claim 1 . 20. The method as claimed in claim 19 , wherein a) the substrate is a body having a surface containing metal or metal alloy; and b) the substrate is provided with a surface layer as claimed in claim 1 at least in the region of the metal or metal alloy. 21. The plasma polymer layer as claimed in claim 1 , wherein an upper limit of a surface energy of the surface of the plasma polymer layer is determined by a function (3): σ=0.9* E+ 21.7 (3) and a lower limit of the surface energy of the surface of the plasma polymer layer is determined by a function (4): σ=0.25* E+ 22.25 (4) with α=the surface energy [mN/m] E=the modulus of elasticity [GPa]. 22. The plasma polymer layer, as claimed in claim 2 , wherein an upper limit of the surface energy of the surface is determined by a function (3): σ=0.9* E+ 21.7 (3) and a lower limit of the surface energy of the surface is determined by a function (4): σ=0.25* E+ 22.25 (4) with σ=the surface energy [mN/m] E=the modulus of elasticity [GPa]. 23. The plasma polymer layer as claimed in claim 1 , wherein the plasma polymer layer has a layer thickness of 200 nm-10 μm. 24. The plasma polymer layer as claimed in claim 1 , wherein the plasma polymer layer has a layer thickness of 400 nm-5 μm. 25. The plasma polymer layer as claimed in claim 1 , wherein a hardness of the plasma polymer layer as measured by means of nanoindentation is ≥1 GPa. 26. The plasma polymer layer as claimed in claim 1 , wherein a hardness of the plasma polymer layer as measured by means of nanoindentation is ≥1.5 GPa. 27. The plasma polymer layer as claimed in claim 1 , wherein at the modulus of elasticity of ≥10 GPa and ≤20 GPa, maximum of the Si 2p peak on the surface of the plasma polymer layer as measured by means of XPS is between 102.7 eV-103.1 eV, and wherein at the modulus of elasticity of ≥20 GPa and ≤30 GPa on the surface of the plasma polymer layer as measured by means of XPS, the maximum of the Si 2p peak is >103.0 eV. 28. The plasma polymer layer as claimed in claim 1 , wherein the plasma polymer layer consists to an extent of 90% entirely of the elements Carbon Oxygen, Silicon, and Hydrogen. 29. The plasma polymer layer as claimed in claim 1 , wherein the plasma polymer layer consi
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