Extreme Ultraviolet Photoresist With High-Efficiency Electron Transfer
US-2022382156-A1 · Dec 1, 2022 · US
US11286334B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11286334-B2 |
| Application number | US-202016788519-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 12, 2020 |
| Priority date | Nov 26, 2019 |
| Publication date | Mar 29, 2022 |
| Grant date | Mar 29, 2022 |
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A method for preparing a latent hardener includes, in the order recited, introducing a hardener into a dry mixer that is a high-energy-type mixer; injecting carbon dioxide gas or an inert gas into the dry mixer; and mechanochemically deactivating only a surface of the hardener using the dry mixer. The hardener may be an amine-based adduct, an imidazole-based adduct, dicyandiamide, a dihydride-based compound, a dichlorophenyl dimethylurea compound and combinations thereof. The inert gas may be helium, nitrogen, argon, neon, krypton, and combinations thereof.
Opening claim text (preview).
What is claimed is: 1. A method for preparing a latent hardener, the method consisting essentially of, in the order recited: introducing a hardener into a dry mixer that is a high-energy-type mixer; injecting carbon dioxide gas or an inert gas into the dry mixer; and mechanochemically deactivating only a surface of the hardener using the dry mixer. 2. The method of claim 1 , wherein the hardener is selected from the group consisting of an amine-based adduct, an imidazole-based adduct, dicyandiamide, a dihydride-based compound, a dichlorophenyl dimethylurea compound, and combinations thereof. 3. The method of claim 1 , wherein the inert gas is selected from the group consisting of helium, nitrogen, argon, neon, krypton, and combinations thereof. 4. The method of claim 1 , wherein the carbon dioxide or inert gas is injected into the dry mixer at a flow rate of 0.1 to 10 L/min, and mechanochemically deactivating only the surface of the hardener is performed for a time ranging from 1 to 240 minutes. 5. The method of claim 1 , wherein the dry mixer comprises a vessel having an adjustable temperature, a rotating inner vessel, a pressure-applying arm, and a scraper, and wherein the method is performed by a condition selected from the group consisting of a rotation speed of the rotating inner vessel, a gap between the rotating inner vessel and the pressure-applying arm, a type of gas, a gas inflow amount, temperature, and combinations thereof. 6. The method of claim 5 , wherein the rotation speed of the rotating inner vessel is 20 to 15,000 rpm, the gap between the rotating inner vessel and the pressure-applying arm is 0.2 to 10 mm, and the temperature is 20 to 60° C.
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