Anti-reflective coatings on optical waveguides

Patent metadata

Field	Value
Publication number	US-11280937-B2
Application number	US-201816214575-A
Country	US
Kind code	B2
Filing date	Dec 10, 2018
Priority date	Dec 10, 2017
Publication date	Mar 22, 2022
Grant date	Mar 22, 2022

Abstract

An anti-reflective waveguide assembly comprising a waveguide substrate having a first index of refraction, a plurality of diffractive optical elements disposed upon a first surface of the waveguide and an anti-reflective coating disposed upon a second surface of the waveguide. The anti-reflective coating preferably increases absorption of light through a surface to which it is applied into the waveguide so that at least 97 percent of the light is transmitted. The anti-reflective coating is composed of four layers of material having different indices of refraction that the first index of refraction and an imaginary refractive index less than 1×10−3 but preferably less than 5×10−4.

First claim

What is claimed is:

1. An anti-reflective waveguide, comprising:
a first planar waveguide substrate having first and second opposite surfaces and a first index of refraction;
a plurality of diffractive optical elements disposed upon the first surface of the first planar waveguide to diffract light in a first direction out of the first planar waveguide substrate towards a viewer and in a second direction into the first planar waveguide substrate away from the viewer;
an anti-reflective coating disposed upon the second surface of the first planar waveguide substrate through which the light refracted in the second direction leaves the first planar waveguide substrate with the anti-reflective coating increasing transmission through the second surface of the first planar waveguide substrate; and
a second planar waveguide substrate having first and second opposite surfaces and the first index of refraction, wherein the anti-reflective coating reduces reflection from and increases transmission of light through the second surface of the first planar waveguide substrate waveguide substrate into the second planar waveguide substrate.

2. The anti-reflective waveguide of claim 1 , wherein the first planar waveguide substrate is configured to propagate light by total internal reflection between the plurality of diffractive optical elements and the anti-reflective coating in a substantially first direction, and outcouple light in a second direction substantially orthogonal to the first direction.

3. The anti-reflective waveguide of claim 2 , wherein the light propagating by total internal reflection comprises an s polarization component and a p polarization component.

4. The anti-reflective waveguide of claim 3 , wherein the anti-reflective coating is configured to reduce phase retardation between the two components such that an angle of incidence of the s component is substantially similar to that of the p component through the waveguide.

5. The anti-reflective waveguide of claim 1 , wherein at least 97 percent of the light is transmitted through the second surface.

6. The anti-reflective waveguide of claim 3 , wherein the first planar waveguide substrate is glass and the anti-reflective coating comprises a layer of MgF 2 .

7. The anti-reflective waveguide of claim 6 , wherein the layer of MgF 2 has a thickness between 75 and 125 nm.

8. The anti-reflective waveguide of claim 6 , wherein the anti-reflective coating comprises a layer of SiO 2 .

9. The anti-reflective waveguide of claim 7 , wherein the layer of MgF 2 is disposed immediately adjacent to the second surface of the first planar waveguide substrate.

10. The anti-reflective waveguide of claim 9 , wherein a layer of SiO 2 is disposed upon the layer of MgF 2 .

11. The anti-reflective waveguide of claim 10 , wherein a cumulative index of refraction of the anti-reflective coating has an imaginary refractive index component value less than 5×10 −4 .

12. The anti-reflective waveguide of claim 10 , wherein a cumulative index of refraction of the anti-reflective coating has an imaginary refractive index component value between 5×10 −4 and 1×10 −3 .

13. The anti-reflective waveguide of claim 3 , wherein the anti-reflective coating is comprised less than eight layers alternating between a first material and a second material.

14. The anti-reflective waveguide of claim 13 , wherein the anti-reflective coating consists of four layers.

15. The anti-reflective waveguide of claim 13 , wherein the first material has comparatively higher index of refraction than the second material.

16. The anti-reflective waveguide of claim 13 , wherein the first material is TiO 2 .

17. The anti-reflective waveguide of claim 13 , wherein each layer of TiO 2 has an index of refraction greater than 2.

18. The anti-reflective waveguide of claim 13 , wherein the second material is SiO 2 .

19. The anti-reflective waveguide of claim 18 , wherein each layer of SiO 2 has an index of refraction between 1.45 and 1.58.

20. The anti-reflective waveguide of claim 19 , wherein a cumulative index of refraction of the anti-reflective coating has an imaginary refractive index component value less than 5×10 −4 .

21. The anti-reflective waveguide of claim 19 , wherein a cumulative index of refraction of the anti-reflective coating has an imaginary refractive index component value between 5×10 −4 and 1×10 −3 .

22. The anti-reflective waveguide of claim 1 , wherein a cumulative index of refraction of the anti-reflective coating has an imaginary refractive index component value less than 5×10 −4 .

Assignees

• Magic Leap Inc

Inventors

• Peroz Christophe
• Messer Kevin

Classifications

• Y02E10/52

  PV systems with concentrators · CPC title

• G02B6/0026

  Wavelength selective element, sheet or layer, e.g. filter or grating · CPC title

• G02B6/0065

  Manufacturing aspects; Material aspects · CPC title

• G02B2005/1804

  Transmission gratings · CPC title

• G02B1/115 Primary

  Multilayers · CPC title