Semiconductor device including two-dimensional material, and method of manufacturing the semiconductor device
US-2016343891-A1 · Nov 24, 2016 · US
US11276792B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11276792-B2 |
| Application number | US-202016863681-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 30, 2020 |
| Priority date | Apr 30, 2019 |
| Publication date | Mar 15, 2022 |
| Grant date | Mar 15, 2022 |
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Provided are methods for obtaining n-type doped metal chalcogenide quantum dot solid-state films. In some embodiments, the methods include forming an metal chalcogenide quantum dot solid-state film, carrying out a n-doping process on the metal chalcogenide quantum dots of the metal chalcogenide quantum dot solid-state film so that they exhibit intraband absorption, wherein the process includes partially substituting chalcogen atoms by halogen atoms in the metal chalcogenide quantum dots and providing a substance on the plurality of metal chalcogenide quantum dots, to avoid oxygen p-doping of the metal chalcogenide quantum dots. Also provided are optoelectronic devices, which in some embodiments can include an n-type doped metal chalcogenide quantum dot solid-state film (A) obtained by a method as disclosed herein and first (E1) and second (E2) electrodes in physical contact with two respective distanced regions of the film (A).
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What is claimed is: 1. A method for obtaining an n-type doped metal chalcogenide quantum dot solid-state film, comprising: forming a metal chalcogenide quantum dot solid-state film, and carrying out an n-doping process on at least a plurality of the metal chalcogenide quantum dots of said metal chalcogenide quantum dot solid-state film so that they exhibit intraband absorption, wherein said n-doping process comprises: partially substituting chalcogen atoms by halogen atoms in at least said plurality of metal chalcogenide quantum dots; and providing a substance on at least said plurality of metal chalcogenide quantum dots, wherein said substance is made and arranged to avoid oxygen p-doping of the plurality of metal chalcogenide quantum dots. 2. The method according to claim 1 , wherein said metal chalcogenide is at least one of Pb-, Cd-, and Hg-chalcogenide, wherein said chalcogen atoms are at least one of sulphur, selenium, and tellurium atoms, and wherein said halogen atoms are at least one of iodine, bromine, and chlorine atoms. 3. The method according to claim 1 , comprising providing said substance to at least one of: coat said metal chalcogenide quantum dot solid-state film to isolate the same from ambient oxygen; and infiltrate within the metal chalcogenide quantum dot solid-state film to react with oxygen present therein for suppressing their p-doping effect. 4. The method according to claim 1 , comprising providing said substance by atomic layer deposition (ALD). 5. The method according to claim 1 , wherein said substance is at least one of alumina, titania, ZnO, and hafnia. 6. The method according to claim 1 , wherein said step of forming said metal chalcogenide quantum dot film comprises forming a blend with a host matrix of first metal chalcogenide quantum dots and, embedded therein, second metal chalcogenide quantum dots having a smaller bandgap, wherein said second metal chalcogenide quantum dots are larger and have a different morphology than said first metal chalcogenide quantum dots so that the second metal chalcogenide quantum dots possess more exposed facets containing chalcogen atoms, and wherein the method comprises applying said n-doping process on the whole formed metal chalcogenide quantum dot film such that the second metal chalcogenide quantum dots are heavily n-doped while the first metal chalcogenide quantum dots are not n-doped or only slightly n-doped. 7. The method according to claim 1 , wherein said step of forming said metal chalcogenide quantum dot film comprises forming a layered structure alternating layers of first and second metal chalcogenide quantum dots, wherein said second metal chalcogenide quantum dots have a smaller bandgap, and are larger and have a different morphology than said first metal chalcogenide quantum dots so that the second metal chalcogenide quantum dots possess more exposed facets containing chalcogen atoms, and wherein the method comprises applying said n-doping process: on the whole formed metal chalcogenide quantum dot film such that the second metal chalcogenide quantum dots are heavily n-doped while the first metal chalcogenide quantum dots are not n-doped or only slightly n-doped; or only on the layer or layers of second metal chalcogenide quantum dots. 8. The method according to claim 6 , comprising selecting the bandgaps and band alignment of the first and second metal chalcogenide quantum dots such that they form a type-I heterojunction and a band offset which makes that the energy difference in the conduction or in the valence bands is equal or smaller than the intraband energy of the second metal chalcogenide quantum dots. 9. The method according to claim 6 , comprising forming said blend with a concentration of second metal chalcogenide quantum dots ranging from 1% up to 50% by volume, preferably between 5% and 25% by volume. 10. The method according to claim 6 , comprising selecting the size and morphology of the first metal chalcogenide quantum dots such that they do not possess any chalcogen-rich exposed facet, and selecting the size and morphology of the second metal chalcogenide quantum dots such that they do possess from one to six chalcogen-rich exposed facets. 11. A product, comprising at least one n-type doped metal chalcogenide quantum dot solid-state film obtained according to a method comprising: forming a metal chalcogenide quantum dot solid-state film, and carrying out an n-doping process on at least a plurality of the metal chalcogenide quantum dots of said metal chalcogenide quantum dot solid-state film so that they exhibit intraband absorption, wherein said n-doping process comprises: partially substituting chalcogen atoms by halogen atoms in at least said plurality of metal chalcogenide quantum dots; and providing a substance on at least said plurality of metal chalcogenide quantum dots, wherein said substance is made and arranged to avoid oxygen p-doping of the plurality of metal chalcogenide quantum dots. 12. The product according to claim 11 , which constitutes an optoelectronic device comprising: said at least one n-type doped metal chalcogenide quantum dot solid-state film; and first and second electrically conductive electrodes in physical contact with two respective distanced regions of said at least one n-type doped metal chalcogenide quantum dot solid-state film. 13. The product according to claim 12 , wherein the at least one n-type doped metal chalcogenide quantum dot solid-state film is a light absorption film made to exhibit intraband absorption to light having a wavelength included in a predetermined wavelength range that extends beyond the absorption range of the bandgap of the metal chalcogenide quantum dots when not n-doped. 14. The product according to claim 13 , wherein the optoelectronic device implements a photodetector made to detect light with any wavelength included in said predetermined wavelength range, as well as within the wavelength range of interband absorption of the metal chalcogenide quantum dots of the n-type doped metal chalcogenide quantum dot solid-state film. 15. The product according to claim 14 , wherein said photodetector is a planar photodetector, comprising a substrate on top of which the at least one n-type doped metal chalcogenide quantum dot solid-state film and the first and second electrically conductive electrodes are deposited, and wherein: said substrate is not transparent to light having a wavelength included in said predetermined wavelength range, so that the photodetector detects light coming from top directly incident on the at least one n-type doped metal chalcogenide quantum dot solid-state film; or said substrate is transparent to light of any wavelength included in said predetermined wavelength range, so that the photodetector detects light coming from bottom passing through the substrate before impinging on the at least one n-type doped metal chalcogenide quantum dot solid-state film. 16. The product according to claim 14 , wherein said photodetector is a vertical photodetector, comprising a substrate on top of which the first electrically conductive electrode is deposited, wherein the at least one n-type doped metal chalcogenide quantum dot solid-state film is deposited on top of the first electrically conductive electrode, and the second electrically conductive electrode is deposited on top of the at least one n-type doped metal chalcogenide quantum dot solid-state film, and wherein: said substrate and the second electrically conductive electrode are, respectively, non-transparent and transparent to light having a wavelength included in
comprising inorganic nanostructures, e.g. CdSe nanoparticles · CPC title
Photovoltaic [PV] devices · CPC title
Quantum dots · CPC title
characterised by the dopants · CPC title
characterised by the dopants · CPC title
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