Semiconductor device, inverter circuit, driving device, vehicle, and elevator having a reduced on-resistance with a silicon carbide layer

Patent metadata

Field	Value
Publication number	US-11276758-B2
Application number	US-201916551822-A
Country	US
Kind code	B2
Filing date	Aug 27, 2019
Priority date	Jan 4, 2019
Publication date	Mar 15, 2022
Grant date	Mar 15, 2022

Abstract

An embodiment is a semiconductor device includes a silicon carbide layer having a first plane and a second plane facing the first plane; a gate electrode; an aluminum nitride layer located between the silicon carbide layer and the gate electrode, the aluminum nitride layer containing an aluminum nitride crystal; a first insulating layer located between the silicon carbide layer and the aluminum nitride layer; and a second insulating layer located between the aluminum nitride layer and the gate electrode and having a wider band gap than the aluminum nitride layer.

First claim

What is claimed is:

1. A semiconductor device comprising:
a silicon carbide layer having a first plane and a second plane facing the first plane;
a gate electrode;
an aluminum nitride layer located between the silicon carbide layer and the gate electrode, the aluminum nitride layer containing an aluminum nitride crystal and a thickness of the aluminum nitride layer being larger than 30 nm;
a first insulating layer located between the silicon carbide layer and the aluminum nitride layer; and
a second insulating layer located between the aluminum nitride layer and the gate electrode and having a wider band gap than the aluminum nitride layer.

2. The semiconductor device according to claim 1 , wherein the thickness of the aluminum nitride layer is equal to or smaller than 60 nm.

3. The semiconductor device according to claim 1 , wherein a thickness of the first insulating layer is 0.5 nm or more and 10 nm or less.

4. The semiconductor device according to claim 1 , wherein the first insulating layer contains a silicon oxide.

5. The semiconductor device according to claim 1 , wherein a thickness of the first insulating layer is smaller than a thickness of the second insulating layer.

6. The semiconductor device according to claim 5 , wherein a thickness of the first insulating layer is 5 nm or less.

7. The semiconductor device according to claim 1 , wherein the aluminum nitride layer contains at least one element selected from a group consisting of scandium (Sc), yttrium (Y), and lanthanides (La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu).

8. The semiconductor device according to claim 1 , further comprising a region located between the silicon carbide layer and the first insulating layer and containing at least one element selected from a group consisting of nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb), bismuth (Bi), scandium (Sc), yttrium (Y), and lanthanides (La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu).

9. The semiconductor device according to claim 1 , further comprising:
a first silicon carbide region of a first conductivity type existing in the silicon carbide layer;
a second silicon carbide region of a second conductivity type existing in the silicon carbide layer and being located between the first silicon carbide region and the first plane;
a third silicon carbide region of the first conductivity type existing in the silicon carbide layer and being located between the second silicon carbide region and the first plane;
a first electrode located on a side of the silicon carbide layer closer to the first plane; and
a second electrode located on a side of the silicon carbide layer closer to the second plane,
wherein the aluminum nitride layer is located between the second silicon carbide region and the gate electrode.

10. The semiconductor device according to claim 9 , wherein a face of the second silicon carbide region facing the aluminum nitride layer is a plane inclined at an angle of 0 degrees to 10 degrees with respect to an m-face or a plane inclined at an angle of 0 degrees to 10 degrees with respect to an a-face.

11. The semiconductor device according to claim 9 , wherein a second conductivity type impurity concentration of the second silicon carbide region is 5×10 17 cm −3 or more.

12. The semiconductor device according to claim 9 , wherein the second silicon carbide region includes a first portion and a second portion located between the first portion and the aluminum nitride layer, and the second portion having a second conductivity type impurity concentration lower than that of the first portion.

13. The semiconductor device according to claim 9 , wherein, in a case where the first conductivity type is n-type and the second conductivity type is p-type, an angle between a c-axis direction of the aluminum nitride crystal contained in the aluminum nitride layer and a direction from the second silicon carbide region toward the gate electrode is less than 90 degrees.

14. The semiconductor device according to claim 13 , wherein the angle is 45 degrees or less.

15. The semiconductor device according to claim 1 ,
wherein the silicon carbide layer has a trench, and
wherein the gate electrode is located in the trench.

16. An inverter circuit comprising the semiconductor device according to claim 1 .

17. A driving device comprising the semiconductor device according to claim 1 .

18. A vehicle comprising the semiconductor device according to claim 1 .

19. An elevator comprising the semiconductor device according to claim 1 .

Assignees

• Toshiba Kk

Inventors

• Shimizu Tatsuo
• Oshima Toshiyuki
• Iijima Ryosuke
• Yoshida Hisashi
• Kimura Shigeya

Classifications

• H10P14/69391

  the material containing aluminium, e.g. Al2O3 · CPC title

• H10D64/01366 Primary

  the semiconductor being silicon carbide · CPC title

• H10D30/662

  having a drift region having a doping concentration that is higher between adjacent body regions relative to other parts of the drift region · CPC title

• H10D64/693

  the insulator comprising nitrogen, e.g. nitrides, oxynitrides or nitrogen-doped materials · CPC title

• H10D64/681

  having a compositional variation, e.g. multilayered · CPC title