Ultra-low power magnetoelectric magnetic field sensor
US-2018259599-A1 · Sep 13, 2018 · US
US11276728B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11276728-B2 |
| Application number | US-202016784351-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 7, 2020 |
| Priority date | Feb 7, 2020 |
| Publication date | Mar 15, 2022 |
| Grant date | Mar 15, 2022 |
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A heterostructure includes a substrate exhibiting a piezoelectric effect, and a magnetostrictive film supported by the substrate. The magnetostrictive film includes an iron-gallium alloy. The iron-gallium alloy has a gallium composition greater than 20%.
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What is claimed is: 1. A heterostructure comprising: a substrate exhibiting a piezoelectric effect; and a magnetostrictive film supported by the substrate; wherein the magnetostrictive film comprises an iron-gallium alloy, and wherein the iron-gallium alloy has a gallium composition greater than 20%, and wherein the iron-gallium alloy is arranged in A2 crystalline phase. 2. The heterostructure of claim 1 , further comprising a buffer layer disposed between the substrate and the magnetostrictive film, wherein the buffer layer comprises iron. 3. The heterostructure of claim 1 , wherein the gallium composition is less than about 30%. 4. The heterostructure of claim 1 , wherein the iron-gallium alloy is single-phase. 5. The heterostructure of claim 1 , wherein the iron-gallium alloy is arranged in single crystalline form. 6. The heterostructure of claim 1 , wherein the substrate comprises a ferroelectric material. 7. The heterostructure of claim 1 , wherein the substrate comprises (1-x)PbMg 1/3 Nb 2/3 O 3 -(x)PbTiO 3 . 8. The heterostructure of claim 1 , wherein the substrate is a uniform, piezoelectric substrate. 9. A device comprising: a substrate comprising a first surface and a second surface opposite the first surface, the substrate exhibiting a piezoelectric effect; a conductive element disposed along the first surface of the substrate, the conductive element comprising a magnetostrictive film, the magnetostrictive film being patterned to define a lateral extent of the conductive element; and a contact disposed along the second surface and positioned in accordance with the lateral extent of the conductive element to define a voltage across the substrate that correlates with a strain along the first surface for coupling to the conductive element; wherein the magnetostrictive film comprises an iron-gallium alloy, and wherein the iron-gallium alloy has a gallium composition greater than 20%, and wherein the iron-gallium alloy is single-phase. 10. The device of claim 9 , wherein the conductive element comprises a current channel of a switch arrangement such that the contact is configured to operate as a gate of the switch arrangement. 11. The device of claim 9 , further comprising a voltage source coupled to the conductive element and configured to establish a magnetization resonance condition via the magnetostrictive film. 12. The device of claim 9 , wherein the gallium composition is less than about 30%. 13. The device of claim 9 , wherein the iron-gallium alloy is arranged in single-crystalline, A2 phase. 14. The device of claim 9 , further comprising a buffer layer disposed at the first surface between the substrate and the magnetostrictive film, wherein the buffer layer comprises iron. 15. The device of claim 9 , wherein the substrate is a uniform, piezoelectric substrate. 16. A method of fabricating a heterostructure, the method comprising: providing a substrate, the substrate exhibiting a piezoelectric effect; and growing epitaxially a magnetostrictive film, such that the magnetostrictive film is supported by the substrate, the magnetostrictive film comprising an iron-gallium alloy; wherein growing the magnetostrictive film comprises supplying an iron flux and a gallium flux to the substrate such that the iron-gallium alloy has a gallium composition greater than 20%. 17. The method of claim 16 , further comprising: patterning the magnetostrictive film via an ion bombardment process, the ion bombardment process damaging an oxide layer of the magnetostrictive film; and removing the damaged oxide layer of the magnetostrictive film with an acidic solution. 18. The method of claim 16 , further comprising depositing, on the substrate, a buffer layer on which the magnetostrictive film is grown. 19. The method of claim 16 , wherein the gallium composition is less than about 30%. 20. The method of claim 16 , wherein growing the magnetostrictive film is implemented such that the iron-gallium alloy is arranged in single crystalline form. 21. The method of claim 16 , wherein providing the substrate comprises fabricating a composite substrate, the composite substrate comprising a piezoelectric layer.
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