Charged particle optical apparatus for through-the-lens detection of particles

Patent metadata

Field	Value
Publication number	US-11276547-B2
Application number	US-202017078334-A
Country	US
Kind code	B2
Filing date	Oct 23, 2020
Priority date	Dec 1, 2015
Publication date	Mar 15, 2022
Grant date	Mar 15, 2022

Abstract

Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.

First claim

The invention claimed is:

1. A method of operating a charged particle optical apparatus, wherein the charged particle optical apparatus comprises:
a particle optical arrangement configured to define a primary particle beam path for inspecting an object;
a specimen chamber configured to accommodate the object in a pressure-controlled interior of the specimen chamber during the inspection of the object; and
a differential pressure aperture disposed in the beam path of the primary particle beam path, wherein the primary particle beam path enters into the pressure-controlled interior of the specimen chamber by traversing the differential pressure aperture;
wherein the method comprises:
acquiring a first image using a detector which is disposed in the specimen chamber, and
acquiring a second image using a detector which is configured to detect emitted particles which are emitted from the object and which traverse the differential pressure aperture;
wherein at least a portion of the first image and at least a portion of the second image represent a same object portion of the object; and
wherein the method further comprises combining the portion of the first image and the portion of the second image.

2. The method of claim 1 , wherein the detector, which is disposed in the specimen chamber, is a gaseous detector.

3. The method of claim 1 , wherein the detector, which is configured to detect the emitted particles which are emitted from the object and which traverse the differential pressure aperture, is a through-the-lens detector.

4. The method of claim 1 wherein the combining is performed to generate a combined image.

5. The method of claim 4 , wherein a portion of the combined image shows one or more intensity valleys which substantially correspond to one or more intensity valleys of the first image.

6. The method of claim 1 , wherein the charged particle optical apparatus further comprises an objective lens configured to generate a magnetic field for focusing the primary particle beam;
wherein, during the acquiring of the second image, the magnetic field generated by the objective lens has a magnetic field strength greater than 10 mT at a location where the primary particle beam path enters into the vacuum zone of the pressure-controlled interior of the specimen chamber.

7. The method of claim 2 , wherein the first image is a gaseous amplification image.

8. The method of claim 2 , wherein the first image is recorded while a gas pressure in the specimen chamber is greater than 5 Pa.

9. The method of claim 1 , wherein in the first image and the second image are simultaneously acquired.

10. The method of claim 1 , further comprising adapting at least one operating parameter of the charged particle optical apparatus,
wherein one of the first image and the second image is acquired before the adapting of the at least one operating parameter of the charged particle optical apparatus, and
wherein the other one of the first image and the second image is acquired after the adapting of the at least one operating parameter of the charged particle optical apparatus.

11. The method of claim 4 , wherein the combining of the first image and the second image includes combing a first image portion of the first image and a second image portion of the second image, wherein the first and second portions represent complementary, non-overlapping object portions of the object.

12. The method of claim 4 , wherein the first image includes a shadow region,
wherein the combined image represents features from the first image in a region corresponding to a region outside of the shadow region, and
wherein the combined image represents features from the second image in a region corresponding to the shadow region.

13. The method of claim 1 , wherein the combining of the first image and the second image includes one of forming a pixel-by-pixel sum, a weighted pixel-by-pixel sum, a pixel-by-pixel difference and a weighted pixel-by-pixel difference.

14. A method of operating a charged particle optical apparatus, wherein the charged particle optical apparatus comprises:
a particle optical arrangement configured to define a primary particle beam path for inspecting an object;
a specimen chamber configured to accommodate the object in a pressure-controlled interior of the specimen chamber during the inspection of the object; and
a differential pressure aperture disposed in the beam path of the primary particle beam path,
wherein the primary particle beam path enters into the pressure-controlled interior of the specimen chamber by traversing the differential pressure aperture;
wherein the method comprises:
acquiring a first image using a detector which is disposed in the specimen chamber, and
acquiring a second image using a detector which is configured to detect emitted particles
which are emitted from the object and which traverse the differential pressure aperture;

wherein at least a portion of the first image and at least a portion of the second image represent a same object portion of the object; and
wherein the first image is recorded while a gas pressure in the specimen chamber is greater than 5 Pa.

15. The method of claim 14 , wherein the charged particle optical apparatus further comprises an objective lens disposed in the beam path of the primary particle beam path,
wherein the differential pressure aperture is disposed, when seen along the beam path of the primary particle beam path, between the objective lens and the object.

16. The method of claim 15 , wherein the objective lens includes a magnetic lens and an electrostatic lens.

17. The method of claim 16 , further comprising generating an electrostatic lens field of the electrostatic lens by applying a first electric potential to a first electrode and second electric potential to a second electrode,
wherein a difference between the first and second electric potentials is greater than 1 kV.

Assignees

• Zeiss Carl Microscopy Gmbh

Inventors

• Essers Erik
• Albiez Michael
• Meyer Stefan
• Kirsten Daniel
• Bean Stewart

Classifications

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J2237/24445

  using avalanche in a gas · CPC title

• H01J2237/2448

  Secondary particle detectors · CPC title

• H01J2237/188

  Differential pressure · CPC title

• H01J2237/2608

  with environmental specimen chamber · CPC title