Grinding wheel and grinding apparatus

Patent metadata

Field	Value
Publication number	US-11273534-B2
Application number	US-201816124354-A
Country	US
Kind code	B2
Filing date	Sep 7, 2018
Priority date	Sep 13, 2017
Publication date	Mar 15, 2022
Grant date	Mar 15, 2022

Abstract

A grinding wheel includes a plurality of grinding stone groups arranged in an annular array, each of the grinding stone groups including at least three grinding stone segments having different thicknesses which include a smallest thickness, an intermediate thickness, and a largest thickness. The grinding stone segments in each of the grinding stone groups are successively arranged in the order of the grinding stone segment having the smallest thickness, the grinding stone segment having the intermediate thickness, and the grinding stone segment having the largest thickness, with uniform gaps left therebetween. The grinding stone segments in the grinding stone groups have respective radially inner edges aligned with each other in an annular shape.

First claim

What is claimed is:

1. A grinding wheel comprising:
a plurality of grinding stone groups arranged in an annular array, each of the grinding stone groups including at least three grinding stone segments having different thicknesses in a radial direction which include a smallest thickness, an intermediate thickness, and a largest thickness;
wherein the grinding stone segments in each of the grinding stone groups are successively arranged in the order of the grinding stone segment having the smallest thickness, the grinding stone segment having the intermediate thickness, and the grinding stone segment having the largest thickness, with uniform gaps left therebetween, and the grinding stone segments in the grinding stone groups have respective radially inner edges aligned with each other in an annular shape.

2. A grinding apparatus comprising:
a holding table having a holding surface for holding a wafer thereon;
a holding table rotating unit configured to rotate the holding table in a predetermined direction;
a grinding unit having a spindle and a grinding wheel mounted on a distal end of the spindle, configured to grind the wafer held on the holding table by rotating the grinding wheel in the same direction as the predetermined direction while in contact with the wafer held on the holding table;
a grinding feed unit configured to grinding-feed the grinding unit in vertical directions; and
a reciprocable unit configured to linearly move the holding table toward and away from the grinding unit;
wherein the grinding wheel includes a plurality of grinding stone groups arranged in an annular array, each of the grinding stone groups including at least three grinding stone segments having different thicknesses in a radical direction which include a smallest thickness, an intermediate thickness, and a largest thickness;
the grinding stone segments in each of the grinding stone groups are successively arranged in the order of the grinding stone segment having the smallest thickness, the grinding stone segment having the intermediate thickness, and the grinding stone segment having the largest thickness, with uniform gaps left therebetween, and the grinding stone segments in the grinding stone groups have respective radially inner edges aligned with each other in an annular shape; and
the reciprocable unit positions the center of the wafer held on the holding table at a grinding position where the grinding stone segments pass, and when the grinding wheel is rotated, the grinding stone segments in each of the grinding stone groups, successively in the order of the grinding stone segment having the smallest thickness, the grinding stone segment having the intermediate thickness, and the grinding stone segment having the largest thickness, enter a grinding area on the wafer held on the holding table from an outer circumferential edge of the wafer.

Assignees

• Disco Corp

Inventors

• Pekija Dejan

Classifications

• B24B27/0015

  Hanging grinding machines · CPC title

• B24B47/20

  relating to feed movement · CPC title

• B24D7/066 Primary

  Grinding blocks; their mountings or supports · CPC title

• B24B7/228 Primary

  for grinding thin, brittle parts, e.g. semiconductors, wafers (grinding edges of thin, brittle parts B24B9/065) · CPC title

• B24B7/04

  involving a rotary work-table · CPC title