Methods for high precision etching of substrates
US-9768033-B2 · Sep 19, 2017 · US
US11273491B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11273491-B2 |
| Application number | US-202016827322-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 23, 2020 |
| Priority date | Jun 19, 2018 |
| Publication date | Mar 15, 2022 |
| Grant date | Mar 15, 2022 |
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Disclosed herein are embodiments of methods, devices, and assemblies for processing feedstock materials using microwave plasma processing. Specifically, the feedstock materials disclosed herein pertains to scrap materials, dehydrogenated or non-hydrogenated feed material, and recycled used powder. Microwave plasma processing can be used to spheroidize and remove contaminants. Advantageously, microwave plasma processed feedstock can be used in various applications such as additive manufacturing or powdered metallurgy (PM) applications that require high powder flowability.
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What is claimed is: 1. A method for manufacturing a spheroidized powder from scrap metal or used metal parts, the method comprising: providing scrap metal or used metal parts comprising a material selected from the group consisting of metal and metal alloys; processing the scrap metal or used metal parts to produce metallic particles suitable for use as feedstock in a plasma process; and applying a plasma process to the metallic particles to form spheroidized powder; wherein the scrap metal or used metal parts comprise a work hardened microstructure that is retained in the spheroidized powder after applying the plasma process. 2. The method of claim 1 , wherein the scrap metal or used metal parts comprise nickel or nickel alloy. 3. The method of claim 1 , wherein the scrap metal or used metal parts comprises Inconel 625 or Inconel 718. 4. The method of claim 1 , wherein the plasma process is applied to the metallic particles within a range of particle volumes between 15 and 63 microns 3 . 5. The method of claim 1 , wherein the scrap metal or used metal parts comprises Ti 6Al-4V. 6. The method of claim 1 , wherein applying the plasma process to the metallic particles comprises introducing the metallic particles into an exhaust of a plasma torch or into a plume of a plasma torch. 7. The method of claim 1 , wherein a collective average or median aspect ratio of the metallic particles is between 5:1 and 200:1. 8. The method of claim 1 , wherein the scrap metal or used metal parts comprise sharp turnings, saw swarfs, grinding swarfs, grinding fines, and/or wash line fines. 9. A method for producing a spheroidized powder from a feed material comprising dehydrogenated or non-hydrogenated titanium or titanium alloy, the method comprising: introducing a feed material comprising dehydrogenated or non-hydrogenated titanium or titanium alloy particles into a plasma torch; and melting and spheroidizing the particles within a plasma generated by the plasma torch to form spheroidized powder being made of spheroidized particles having a martensitic microstructure, wherein at least two regions are created in the spheroidized powder, each region having a different microstructure. 10. The method of claim 9 , wherein the at least two regions include a core portion and a skin portion, the skin portion having a microstructure that is different from a microstructure of the feed material. 11. The method of claim 9 , wherein the feed material comprises Ti-6-4. 12. The method of claim 9 , wherein the spheroidized particles have a median sphericity of at least 0.75. 13. The method of claim 9 , wherein the feed material has a particle size of no less than 1.0 microns and no more than 300 microns. 14. The method of claim 9 , wherein the feed material comprises titanium or titanium alloy particles processed by a hydrogenation-dehydrogenation (HDH) process. 15. A method for manufacturing a spheroidized powder from recycled powder, the method comprising: providing powder particles comprising satellites, agglomerations, or contaminants; introducing the powder particles into a microwave plasma torch; and melting and spheroidizing the powder particles within the microwave plasma torch to form spheroidized powder particles having the satellites, agglomerations, or contaminants removed and having a reduced median particle size compared to a median particle size of the powder particles, wherein the powder particles were formed from an additive manufacturing process selected from the group consisting of laser sintering, electron-beam melting, filament fused deposition, directed energy deposition, powder bed fusion, and binder jetting. 16. The method of claim 15 , wherein the powder particles comprise a material selected from the group consisting of metal, metal alloy, and ceramic. 17. The method of claim 15 , wherein carbon and nitrogen are removed from the powder particles during the melting and spheroidizing. 18. The method of claim 15 , wherein the spheroidized powder particles retain a bulk density and flowability of the powder particles after the melting and spheroidizing.
Thermal or thermo-mechanical treatment · CPC title
Spherical particles · CPC title
Materials specially adapted for additive manufacturing · CPC title
Process efficiency · CPC title
starting from solid material, e.g. by crushing, grinding or milling ({C22C1/1084 takes precedence}; crushing, grinding or milling, in general, see the relevant subclasses, e.g. B02C) · CPC title
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