Polygon mirror assembly and scan device

Patent metadata

Field	Value
Publication number	US-11269178-B2
Application number	US-201916668574-A
Country	US
Kind code	B2
Filing date	Oct 30, 2019
Priority date	Nov 14, 2018
Publication date	Mar 8, 2022
Grant date	Mar 8, 2022

Abstract

Provided are a polygon mirror assembly and a scan device. A polygon mirror assembly includes: a polygon mirror including a plurality of reflection surfaces spaced apart from a rotation axis by a predetermined distance; a first motor for rotating the polygon mirror around the rotation axis; a second motor for moving the polygon mirror in a first axial direction such that the rotation axis is tilted while the first motor rotates the polygon mirror; and a clock signal extraction surface for extracting a clock signal for detecting a change in a rotational speed of the first motor.

First claim

What is claimed is:

1. A polygon mirror assembly comprising:
a polygon mirror including a plurality of reflection surfaces spaced apart from a rotation axis by a predetermined distance;
a first motor for rotating the polygon mirror around the rotation axis;
a second motor for moving the polygon mirror in a first axial direction such that the rotation axis is tilted while the first motor rotates the polygon mirror; and
a clock signal extraction surface for extracting a clock signal for detecting a change in a rotational speed of the first motor.

2. The polygon mirror assembly of claim 1 , wherein the second motor repeatedly moves the polygon mirror such that the rotation axis is tilted only within a predetermined angle range.

3. The polygon mirror assembly of claim 1 , wherein a shaft of the first motor is disposed on the rotation axis of the polygon mirror.

4. The polygon mirror assembly of claim 1 , wherein the second motor is coupled to the polygon mirror via an intermediate connection, and one end of the intermediate connection is coupled to the first motor, while the another end of the intermediate connection is coupled to a shaft of the second motor.

5. The polygon mirror assembly of claim 1 , wherein the rotational speed of the first motor is faster than a rotational speed of the second motor.

6. The polygon mirror assembly of claim 1 , wherein the clock signal extraction surface reflects electromagnetic waves incident from a light source at an angle at which the polygon mirror does not scan a specimen.

7. The polygon mirror assembly of claim 1 , wherein the clock signal extraction surface is disposed inside the polygon mirror, and reflects electromagnetic waves generated from a light source and is incident on the polygon mirror.

8. The polygon mirror assembly of claim 1 , wherein the clock signal extraction surface is disposed outside the polygon mirror, and reflects electromagnetic waves incident after reflection on the polygon mirror.

9. The polygon mirror assembly of claim 1 , wherein the polygon mirror includes acrylonitrile butadiene styrene copolymer (ABS) resin, and the plurality of reflection surfaces are chrome plated.

10. A polygon mirror assembly comprising:
a polygon mirror including a plurality of reflection surfaces spaced apart from a rotation axis by a predetermined distance;
a first motor rotating the polygon mirror around the rotation axis;
a second motor for moving the polygon mirror in a first axial direction such that the rotation axis is tilted; and
an intermediate connection at which one end is coupled to the first motor and the another end is coupled to a shaft of the second motor.

11. The polygon mirror assembly of claim 10 , wherein a shaft of the first motor is disposed on the rotation axis of the polygon mirror.

12. The polygon mirror assembly of claim 10 , wherein the second motor repeatedly moves the polygon mirror such that the rotation axis is tilted only within a predetermined angle range.

13. The polygon mirror assembly of claim 10 , wherein the polygon mirror includes a clock signal extraction surface that reflects electromagnetic waves incident on the polygon mirror at an angle at which the polygon mirror does not scan a specimen.

14. The polygon mirror assembly of claim 10 , wherein the first motor is a brushless direct current (BLDC) motor, and the second motor is a stepping motor.

15. A scan device comprising:
a light source for generating electromagnetic waves including millimeter waves or terra waves;
a collimating lens for forming the electromagnetic waves generated from the light source in parallel;
a polygon mirror assembly including a polygon mirror, the polygon mirror assembly moving the polygon mirror in a first axial direction such that a rotation axis is tilted using a second motor, while rotating the polygon mirror around the rotation axis using a first motor;
a detector for detecting electromagnetic waves reflected from the polygon mirror and obtaining a two-dimensional image of a specimen; and
a clock signal extraction surface for extracting a clock signal for detecting a change in a rotational speed of the first motor.

16. The scan device of claim 15 , wherein the second motor repeatedly moves the polygon mirror such that the rotation axis is tilted only within a predetermined angle range.

17. The scan device of claim 15 , wherein the clock signal extraction surface reflects electromagnetic waves incident from a light source at an angle at which the polygon mirror does not scan the specimen.

18. The scan device of claim 15 , wherein the clock signal extraction surface is disposed inside the polygon mirror, and reflects electromagnetic waves generated from the light source and incident on the polygon mirror.

19. The scan device of claim 15 , wherein the clock signal extraction surface is disposed outside the polygon mirror, and reflects electromagnetic waves incident after reflection on the polygon mirror.

20. The scan device of claim 15 , wherein the two-dimensional image of the specimen includes a plurality of rows, each of the plurality of rows including an image signal for the specimen and the clock signal, and the detector corrects distortion of the two-dimensional image due to the change in the rotational speed of the first motor by aligning the plurality of rows based on the clock signal.

Assignees

• Electronics & Telecommunications Res Inst

Inventors

• Lee Eui Su
• Park Kyung Hyun
• Lee Il Min
• Moon Kiwon
• Park Dong Woo
• Kim Hyun Soo
• Lee Ho Jin
• Park Jeong Woo
• Shin Jun Hwan
• Choi Kyeong Sun
• Choi Dahye

Classifications

• G02B26/122 Primary

  Control of the scanning speed of the polygonal mirror · CPC title

• G02B26/0816 Primary

  by means of one or more reflecting elements · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title