Mask frame assembly

Patent metadata

Field	Value
Publication number	US-11268184-B2
Application number	US-201916621964-A
Country	US
Kind code	B2
Filing date	Aug 8, 2019
Priority date	Aug 17, 2018
Publication date	Mar 8, 2022
Grant date	Mar 8, 2022

Abstract

The present disclosure generally relates to display technologies, and in particular, to a mask frame assembly that is suitable for use in the production of a display device, for example, an organismic light emitting diode (OLED) device. A mask frame assembly includes a frame, and an alignment mask secured to the frame. The frame includes at least one alignment mark and a cover plate on the at least one at least one alignment mark. The cover plate includes a first through-hole and a plurality of first auxiliary through-holes. The alignment mask includes at least one second through-hole and a plurality of second auxiliary through-holes.

First claim

What is claimed is:

1. A mask frame assembly, comprising:
a frame, and
an alignment mask secured to the frame,
wherein the frame comprises at least one alignment mark and a cover plate on the at least one alignment mark,
wherein the cover plate comprises a first through-hole and a plurality of first auxiliary through-holes, the first through-hole and the plurality of first auxiliary through-holes defining a first via hole area, and the first through-hole overlapping with the at least one alignment mark,
wherein the alignment mask comprises at least one second through-hole and a plurality of second auxiliary through-holes, the at least one second through-hole and the plurality of second auxiliary through-holes defining a second via hole area, the at least one second through-hole being aligned with the at least one first through-hole,
wherein the first via hole area overlaps with the second via hole area, and
wherein the plurality of first auxiliary through-holes and the plurality of second auxiliary through-holes are staggered relative to each other.

2. The mask frame assembly according to claim 1 , wherein the plurality of first auxiliary through-holes do not overlap entirely with any of the plurality of second auxiliary through-holes.

3. The mask frame assembly according to claim 1 , wherein the plurality of first auxiliary through-holes do not overlap with any of the plurality of second auxiliary through-holes.

4. The mask frame assembly according to claim 1 ,
wherein the first through-hole and second through-hole are off-center relative to a center of the alignment mark.

5. The mask frame assembly according to claim 1 ,
wherein the at least one alignment mark is formed with a stepped edge, and
wherein the cover plate is anchored against the stepped edge, so that a surface of the cover plate is flush with a surface of the frame facing the alignment mask.

6. The mask frame assembly according to claim 1 ,
wherein the at least one alignment mark is a blind hole,
wherein a diameter of an opening of the blind hole is from 5 mm to 7 mm, and
wherein a depth of the blind hole is from 2 mm to 4 mm.

7. The mask frame assembly according to claim 1 ,
wherein a diameter of an opening of the first through-hole is from 0.5 mm to 0.7 mm, and
wherein a diameter of an opening of the second through-hole is from 0.4 mm to 0.6 mm.

8. The mask frame assembly according to claim 1 ,
wherein a diameter of an opening of the first through-hole is either larger or the same as a diameter of an opening of the second through-hole.

9. The mask frame assembly according to claim 1 ,
wherein an orthographic projection of the second through-hole onto an imaginary plane parallel to a surface of the frame facing the alignment mask is completely within an orthographic projection of the first through-hole onto the imaginary plane.

10. The mask frame assembly according to claim 1 ,
wherein the first through-hole is larger than any of the plurality of first auxiliary through-holes, and
wherein the second through-hole is larger than any of the plurality of second auxiliary through-holes.

11. The mask frame assembly according to claim 10 ,
wherein a diameter of an opening of each of the plurality of first auxiliary through-holes and the plurality of second auxiliary through-holes is from 0.1 mm to 0.5 mm.

12. The mask frame assembly according to claim 11 ,
wherein the plurality of first auxiliary through-holes are either larger or of the same size as the plurality of second auxiliary through-holes.

13. The mask frame assembly according to claim 12 ,
wherein the plurality of first auxiliary through-holes are larger than the plurality of second auxiliary through-holes, and
wherein the diameter of the opening of each of the plurality of first auxiliary through-holes is 1.2 to 3.0 times the diameter of the opening of each of the plurality of second auxiliary through-holes.

14. The mask frame assembly according to claim 1 ,
wherein a distance between the first through-hole and a nearest first auxiliary through-hole is from 0.1 mm to 0.25 mm, and
wherein a distance between the second through-hole and a nearest second auxiliary through-hole is from 0.1 mm to 0.25 mm.

15. The mask frame assembly according to claim 1 , wherein none of the plurality of first auxiliary through-holes are provided within 0.1 mm to 0.25 mm of the first through-hole.

16. The mask frame assembly according to claim 1 , wherein none of the plurality of second auxiliary through-holes are provided within 0.1 mm to 0.25 mm of the second through-hole.

17. The mask frame assembly according to claim 1 , wherein the cover plate has a thickness of from 10 μm to 50 μm.

18. The mask frame assembly according to claim 1 ,
wherein the alignment mask is a rectangular strip, and
wherein the at least one second through-hole is provided at a longitudinal end of the rectangular strip.

Assignees

• Ordos Yuansheng Optoelectronics Co Ltd
• Boe Technology Group Co Ltd

Inventors

• Qi Haiping

Classifications

• C23C14/24

  Vacuum evaporation · CPC title

• C23C14/042 Primary

  using masks · CPC title

• C23C14/12 Primary

  Organic material · CPC title

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title