Processing substrate apparatus and method
US-2024165758-A1 · May 23, 2024 · US
US11267090B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11267090-B2 |
| Application number | US-201916720317-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 19, 2019 |
| Priority date | Dec 20, 2018 |
| Publication date | Mar 8, 2022 |
| Grant date | Mar 8, 2022 |
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A system for supporting workpieces comprises a base and a plurality of support members (1), each support member (1) comprising a plate (11) and means for positioning the plate (11) in relation to the base. In at least some of the support members (1). The means for positioning the plate (11) comprise at least three controllably extendable members (13) arranged for determining the position and inclination of the plate (11) in relation to the base, thereby allowing for controlled positioning of the plate (11) in relation to the base and for controlled inclination of the plate (11).
Opening claim text (preview).
The invention claimed is: 1. A system for supporting workpieces, the system comprising a base and a plurality of support members ( 1 ), each support member ( 1 ) comprising a plate ( 11 ) and means for positioning the plate ( 11 ) in relation to the base, wherein in at least some of the plurality of support members ( 1 ), the means for positioning the plate ( 11 ) comprise at least three controllably extendable members ( 13 ) each arranged at a distance from each other for determining the position, and inclination of the plate ( 11 ) in relation to the base, thereby allowing for controlled positioning of the plate ( 11 ) in relation to the base and for controlled inclination of the plate ( 11 ). 2. The system according to claim 1 , further comprising a flexible cover ( 2 ) supported by the plates ( 11 ), whereby the shape of the cover is at least in part determined by the positions and orientations of the plates ( 11 ). 3. The system according to claim 2 , wherein more than one of the at least some of the plurality of support members ( 1 ) include, in correspondence with the plate ( 11 ), at least one roller ( 12 ) for attachment to the flexible cover ( 2 ), the roller ( 12 ) being capable of rotation around at least one axis. 4. The system according to claim 3 , wherein the roller ( 12 ) is capable of rotation around at least two axes (X, Y). 5. The system according to claim 4 , wherein the roller ( 12 ) is capable of rotation around at least one axis (X) parallel with a top surface of the plate ( 11 ), and around one axis (Y) perpendicular to the top surface of the plate ( 11 ). 6. The system according to claim 3 , wherein the roller ( 12 ) is configured for attachment to the cover by magnetic means, by adhesive, by velcro ( 12 c ), or by vacuum. 7. The system according to claim 3 , wherein more than one of the at least some of the plurality of support members include means ( 14 ) for blocking rotation of the roller ( 12 ). 8. The system according to claim 3 , wherein the roller ( 12 ) has a substantially spherical or cylindrical shape. 9. The system according to claim 2 , wherein the cover ( 2 ) comprises a layer ( 21 ) of an elastomeric material, and wherein the cover additionally comprises a plurality of rigidifying members ( 22 ) of a material having a higher rigidity than the material of the layer ( 21 ), wherein the rigidifying members ( 22 ) are arranged so that they are axially displaceable in relation to the layer ( 21 ). 10. The system according to claim 9 , wherein at least some of the rigidifying members ( 22 ) comprise a core ( 22 a ) of a material having higher rigidity than the elastomeric material, the core being surrounded by at least one layer ( 22 b , 22 c ) of a material having a lower rigidity than the material of the core ( 22 a ) but a higher rigidity than the elastomeric material, and/or wherein the cover comprises through holes ( 25 ). 11. The system according to claim 1 , wherein at least some of the Controllably extendable members ( 13 ) comprise actuator's. 12. The system according to claim 1 , wherein more than one of the at least some of the plurality of support members comprise passive controllably extendable members ( 13 ), and wherein the support members with passive controllably extendable members additionally comprise a drive member ( 14 ) for driving the plate ( 11 ) away from the base, whereby the controllably extendable members ( 13 ) are configured to each extend while the plate is being driven away from the base, until reaching a pre-selected extension, whereby further extension of the controllably extendable member is prevented when its pre-selected extension is reached, wherein the drive member optionally comprises at least one inflatable element ( 14 ). 13. The system according to claim 1 , wherein the controllably extendible members ( 13 ) are attached to the respective plate ( 11 ) by ball joints ( 13 a ). 14. The system according to claim 13 , wherein at least two of the ball joints ( 13 a ) are arranged for allowing a translational movement thereof in relation to the plate, so that the distance between the ball joints can change as a consequence of extension and retraction of the controllably extendible members. 15. Method of modifying the three-dimensional shape of the cover of a system for supporting workpieces, the system comprising a base and a plurality of support members ( 1 ), each of the plurality of support members ( 1 ) comprising a plate ( 11 ) and means for positioning the plate ( 11 ) in relation to the base, wherein in at least some of the plurality of support members ( 1 ), the means for positioning the plate ( 11 ) comprises at least three extendable members ( 13 ) arranged for determining the position and inclination of the plate ( 11 ) in relation to the base, thereby allowing for controlled positioning of the plate ( 11 ) in relation to the base and for controlled inclination of the plates ( 11 ), and a flexible cover ( 2 ) supported by the plates ( 11 ), and in correspondence with the plates ( 11 ), wherein more than one of the at least some of the plurality of support members ( 1 ) include, in correspondence with the plate ( 11 ), at least one roller ( 12 ) for attachment to the flexible cover ( 2 ), the roller ( 12 ) being capable of rotation around at least one axis, the method comprising the steps of: modifying the position and inclination of a plurality of the plates ( 11 ) by selective extension and/or retraction of the three controllably extendable members ( 13 ), while allowing the rollers ( 12 ) to rotate; thereafter, blocking the rollers ( 12 ) so as to prevent them from rotating.
with positive adjustment means · CPC title
Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders (for holding or positioning work for welding, soldering, or cutting by applying heat locally B23K37/04; specially adapted to machine tools B23Q3/00) · CPC title
for mounting on a work-table, tool-slide, or analogous part (B23Q3/15 takes precedence) · CPC title
with an array of longitudinally movable rods defining a reconfigurable support surface · CPC title
adjustable in inclination · CPC title
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