Monitoring dry-etching of polymer layer for transferring semiconductor devices
US-2020006108-A1 · Jan 2, 2020 · US
US11264531B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11264531-B2 |
| Application number | US-201916688577-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 19, 2019 |
| Priority date | Nov 20, 2018 |
| Publication date | Mar 1, 2022 |
| Grant date | Mar 1, 2022 |
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A micro light emitting diode (LED) transfer device includes a transfer part configured to transfer a plurality of LEDs arranged on a first substrate to a relay substrate; a memory configured to store characteristic information of each of the plurality of LEDs; and a processor configured to determine arrangement locations of each of the plurality of LEDs on the relay substrate based on the stored characteristic information, and control the transfer part to transfer the plurality of LEDs to the determined arrangement locations.
Opening claim text (preview).
What is claimed is: 1. A light emitting diode (LED) transfer device comprising: a transfer part configured to transfer a plurality of LEDs arranged on a first substrate to a relay substrate; a memory configured to store characteristic information of each of the plurality of LEDs; and a processor configured to: determine arrangement locations of each of the plurality of LEDs on the relay substrate based on the stored characteristic information, and control the transfer part to transfer the plurality of LEDs to the determined arrangement locations, wherein the processor is further configured to: divide the relay substrate into a plurality of second areas, and determine the arrangement locations of each of the plurality of LEDs on the relay substrate such that output characteristics of the plurality of second areas are uniform, based on the stored characteristic information. 2. The LED transfer device of claim 1 , wherein the relay substrate has a size that is different from a size of the first substrate. 3. The LED transfer device of claim 1 , wherein the plurality of LEDs are arranged in a pattern on the relay substrate. 4. The LED transfer device of claim 1 , wherein the plurality of LEDs include a first LED emitting red light, a second LED emitting green light, and a third LED emitting blue light, and wherein the first LED, the second LED, and the third LED are sequentially arranged on the relay substrate. 5. The LED transfer device of claim 1 , wherein the processor is further configured to: divide the first substrate a plurality of first areas, and arrange the plurality of LEDs in the plurality of first areas of the first substrate into one of the plurality of second areas of the relay substrate. 6. The LED transfer device of claim 5 , wherein the processor is further configured to control the transfer part so that the plurality of LEDs in the plurality of first areas of the first substrate are alternatively arranged in the one of the plurality of second areas of the relay substrate. 7. The LED transfer device of claim 1 , wherein the transfer part is configured to simultaneously collect the plurality of LEDs on the first substrate and arrange the collected plurality of LEDs on the relay substrate, and wherein the processor is further configured to control the transfer part so that the plurality of LEDs spaced apart from one another on the first substrate are simultaneously collected. 8. The LED transfer device of claim 1 , wherein the transfer part comprises a mask device having openings formed in locations corresponding to the determined arrangement locations of the plurality of LEDs on the first substrate, and wherein the processor is further configured to control a light source to irradiate laser light on the mask device and control the mask device to transfer the plurality of LEDs on the relay substrate. 9. The LED transfer device of claim 1 , wherein the characteristic information is at least one of output wavelengths, luminance, and performance levels of the plurality of LEDs. 10. The LED transfer device of claim 1 , wherein the relay substrate is provided on a stage and is moveable in a horizontal direction.
used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate · CPC title
characterised by multiple measurements, corrections, marking or sorting processes · CPC title
using temporarily an auxiliary support · CPC title
Package configurations · CPC title
Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates · CPC title
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