Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing

Patent metadata

Field	Value
Publication number	US-11263424-B2
Application number	US-202016805555-A
Country	US
Kind code	B2
Filing date	Feb 28, 2020
Priority date	Nov 28, 2012
Publication date	Mar 1, 2022
Grant date	Mar 1, 2022

Abstract

Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.

First claim

What is claimed is:

1. A microelectromechanical systems (MEMS) device, comprising:
a MEMS ultrasound transducer (MUT) structure and a piezoelectric material comprising scandium disposed within the MEMS device comprising a piezoelectric MUT (PMUT) array of a fingerprint sensor adapted to sense a characteristic of a fingerprint placed adjacent to the MUT structure;
a first metal conductive layer disposed on the piezoelectric material; and
a plurality of metal electrodes configured to form electrical connections between the first metal conductive layer, the piezoelectric material, and a complementary metal oxide semiconductor (CMOS) structure, wherein the pMUT structure and the CMOS structure are vertically stacked, wherein the PMUT array comprises the MUT structure in an array of MUT structures, and wherein the MUT structure and the array of MUT structures comprise a first two of the array of MUT structures in the rhombus configuration and a second two of the array of MUT structures in the hexagonal configuration arranged as a unit cell.

2. The MEMS device of claim 1 , further comprising:
a second metal conductive layer disposed on the piezoelectric material and opposite the first metal conductive layer.

3. The MEMS device of claim 1 , further comprising:
a stand-off formed on the piezoelectric material.

4. The MEMS device of claim 3 , wherein the stand-off comprises a silicon dioxide layer deposited over the piezoelectric material.

5. The MEMS device of claim 3 , wherein the MUT structure is bonded to the CMOS structure at the standoff via at least one of a eutectic bonding layer, a compression bond, or a conductive epoxy.

6. The MEMS device of claim 5 , wherein the eutectic bonding layer comprises an aluminum-germanium eutectic bonding layer.

7. The MEMS device of claim 5 , wherein the MUT structure is electrically coupled to the CMOS structure at the standoff.

8. The MEMS device of claim 1 , wherein the piezoelectric material comprises scandium doped aluminum nitride.

9. The MEMS device of claim 1 , further comprising:
a piezoelectric layer comprising an aluminum nitride (AlN) seed layer, a bottom metal layer, and an aluminum nitride (AlN) layer.

Assignees

• Invensense Inc

Inventors

• Tsai Julius Ming-Lin
• Daneman Mike
• Kapoor Sanjiv

Classifications

• B81C1/00238 Primary

  Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure · CPC title

• B81B2201/032

  Bimorph and unimorph actuators, e.g. piezo and thermo · CPC title

• B81C1/00301

  Connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias · CPC title

• B81B2207/012

  the micromechanical device and the control or processing electronics being separate parts in the same package · CPC title

• B81B7/007

  Interconnections between the MEMS and external electrical signals · CPC title