Imprint apparatus, foreign particle removal method, and method of manufacturing article
US-2015174816-A1 · Jun 25, 2015 · US
US11262651B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11262651-B2 |
| Application number | US-202016886102-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 28, 2020 |
| Priority date | May 28, 2020 |
| Publication date | Mar 1, 2022 |
| Grant date | Mar 1, 2022 |
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A method of inspecting a dispenser including a faceplate comprises translating a sensor across the faceplate while measuring a distance between the sensor and the faceplate. The sensor is oriented such that a longitudinal axis of the sensor extends at an acute angle relative to a longitudinal axis of the faceplate. The method may include translating another sensor across the faceplate while measuring the same distance. Or the method may include another translating of the sensor across the faceplate while measuring the same distance. In either case, the sensor is oriented such that the longitudinal axis of the sensor extends at an obtuse angle relative to the longitudinal axis of the faceplate. The method includes determining, based on the measured distances, whether an amount of accumulated formable material on the surface of the faceplate is greater than a predetermined value.
Opening claim text (preview).
What is claimed is: 1. A method of inspecting a dispenser including a faceplate, the faceplate having a first end, a second end, a surface, a length extending from the first end to the second end, and a longitudinal axis along the length, the method comprising: translating a sensor across the length of the faceplate while measuring a distance between the sensor and the faceplate, wherein the sensor is oriented such that a longitudinal axis of the sensor extends at an acute angle relative to the longitudinal axis of the faceplate; a step selected from the group consisting of: a) translating another sensor across the length of the faceplate while measuring a distance between the other sensor and the faceplate, wherein the other sensor is oriented such that a longitudinal axis of the other sensor extends at an obtuse angle relative to the longitudinal axis of the faceplate, and b) another translating of the sensor across the length of the faceplate while measuring the distance between the sensor and the faceplate, wherein the sensor is oriented such that the longitudinal axis of the sensor extends at an obtuse angle relative to the longitudinal axis of the faceplate; and determining, based on the measured distances, whether an amount of accumulated formable material on the surface of the faceplate is greater than a predetermined value. 2. The method of claim, 1 wherein the sensor and the other sensor are capacitive sensors. 3. The method of claim 1 , wherein the sensor and the other sensor each have an aspect ratio of 40:1 to 10:1. 4. The method of claim 1 , wherein the sensor and the other sensor each have a length that is equal to or greater than the width of the faceplate. 5. The method of claim 1 , wherein the acute angle is from 42° to 48° and the obtuse angle is from 132° to 138°. 6. The method of claim 1 , comprising the translating of the other sensor across the length of the faceplate while measuring the distance between the other sensor and the faceplate. 7. The method of claim 6 , wherein the sensor and the other sensor are translated across the length of the faceplate together. 8. The method of claim 6 , wherein, during the translating of the sensor and the translating of the other sensor, the longitudinal axis of the sensor and the longitudinal axis of the other sensor are angled relative to each other by an angle of 88° to 92°. 9. The method of claim 6 , wherein a speed of travel of the sensor and the other sensor is selected such that the sensor and the other sensor are translated across the length of the faceplate within 0.01 to 0.10 seconds. 10. The method of claim 6 , wherein during the translating of the sensor and the other sensor, the sensor and the other sensor are oriented such that the longitudinal axis of the first sensor, the longitudinal axis of the second sensor, and the longitudinal axis of the faceplate, when projected onto a horizontal plane, intersect to form a triangle having two acute angles. 11. The method of claim 1 , comprising the other translating of the sensor across the length of the faceplate while measuring the distance between the sensor and the faceplate. 12. The method of claim 11 , wherein the translating of the sensor and the other translating of the sensor are performed successively. 13. The method of claim 12 , wherein the translating of sensor is performed in a first direction and the other translating is performed in a second direction opposite the first direction. 14. The method of claim 11 , wherein the sensor has a first orientation during the translating and a second orientation during the other translating such that the longitudinal axis of the sensor in the first orientation and the longitudinal axis of the sensor in the second orientation, when superimposed and projected onto the horizontal plane, intersect to form at an angle of 88° to 92°. 15. The method of claim 11 , wherein the sensor has a first orientation during the translating and a second orientation during the other translating such that the longitudinal axis of the sensor in the first orientation, the longitudinal axis of the sensor in the second orientation, and the longitudinal axis of the faceplate, when superimposed and projected onto the horizontal plane, intersect to form a triangle having two acute angles. 16. The method of claim 1 , further comprising, prior to translating the sensor across the length of the faceplate and prior to step a) or step b): translating the sensor across the length of a faceplate free of formable material while measuring a distance between the sensor and the faceplate free of formable material, wherein the sensor is oriented such that the longitudinal axis of the sensor extends at the acute angle relative to the longitudinal axis of the faceplate free of formable material; and a step selected from the group consisting of: c) translating the other sensor across the length of the faceplate free of formable material while measuring a distance between the other sensor and the faceplate free of formable material, wherein the other sensor is oriented such that the longitudinal axis of the other sensor extends at the obtuse angle relative to the longitudinal axis of the faceplate free of formable material, and d) another translating of the sensor across the length of the faceplate free of formable material while measuring the distance between the sensor and the faceplate free of formable material, wherein the sensor is oriented such that the longitudinal axis of the sensor extends at the obtuse angle relative to the longitudinal axis of the faceplate free of formable material, wherein the determining of whether the amount of accumulated formable material on the surface of the faceplate is greater than a predetermined value is further based on the distances measured for the faceplate free of formable material. 17. The method of claim 1 , wherein the sensor and the other sensor are located on a surface of an applique facing the faceplate. 18. The method of claim 17 , wherein the translating of the sensor, the translating of the other sensor, and the other translating of the sensor comprise moving the applique. 19. The method of claim 1 , further comprising, in a case that the amount of accumulated formable material is determined to be greater than a predetermined value, cleaning the surface of the faceplate. 20. A system for inspecting a dispenser including a faceplate, the faceplate having: a first end; a second end; a surface; a length extending from the first end to the second end; and a longitudinal axis along the length, the system comprising: at least one sensor; one or more processors; and one or more memories storing instructions, when executed by the one or more processors, for: translating a sensor of the at least one sensor across the length of the faceplate while measuring a distance between the sensor and the faceplate, wherein the sensor is oriented such that a longitudinal axis of the sensor extends at an acute angle relative to the longitudinal axis of the faceplate; performing a step selected from the group consisting of: a) translating another sensor of the at least one sensor across the length of the faceplate while measuring a distance between the other sensor and the faceplate, wherein the other sensor is oriented such that a longitudinal axis of the other sensor extends at an obtuse angle relative to the longitudinal axis of the faceplate, and b) another translating of the sensor across the length of the faceplate while measurin
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