Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use

Patent metadata

Field	Value
Publication number	US-11262340-B2
Application number	US-201816205064-A
Country	US
Kind code	B2
Filing date	Nov 29, 2018
Priority date	Dec 1, 2017
Publication date	Mar 1, 2022
Grant date	Mar 1, 2022

Abstract

The present application is directed to a multi-sensor gas sampling detection system and method for detecting and measuring the radicals in a radical gas stream and includes at least one radical gas generator in communication with at least one gas source. The radical gas generator may be configured to generate at least one radical gas stream which may be used within a processing chamber. As such, the processing chamber is in fluid communication with the radical gas generator. At least one analysis circuit in fluid communication with the radical gas generator may be used in the detection and measurement system. The analysis may be configured to receive a defined volume and/or flow rate of the radical gas stream. In one embodiment, the analysis circuit may be configured to react at least one reagent with radicals within the defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream. At least one sensor module within the analysis circuit may be configured to measure a concentration of the chemical species within the compound stream. One or more flow measurement modules may be in fluid communication with the sensor module. During use, the flow measurement module may be configured to measure the volume of at least one of the compound stream and radical gas stream.

First claim

What is claimed is:

1. A system for measuring the concentration of radicals in a gas stream, comprising:
at least one radical gas generator in communication with at least one gas source, the radical gas generator configured to generate at least one radical gas stream;
at least one processing chamber in fluid communication with the at least one radical gas generator, the at least one processing chamber configured to receive a portion of the at least one radical gas stream;
at least one sampling reaction module in fluid communication with the at least one radical gas generator, the sampling reaction module having at least one thermal control module in thermal communication with at least one sampling tube, the at least one sampling tube configured to receive a portion of the radical gas stream from the at least one radical gas generator therein and react at least one reagent with at least one radical gas within a defined volume of the at least one radical gas stream thereby forming at least one chemical species within at least one compound stream;
at least one sensor module positioned within the at least one sampling reaction module and configured to measure a change of temperature of the at least one sampling tube due to interaction of the at least one chemical species within the at least one compound stream and the sampling tube and calculate a concentration of the at least one chemical species within the at least one compound stream flowing within the at least on sampling tube based on the measured temperature change of the at least one sampling tube;
at least one flow measurement module in fluid communication with at least one sampling reaction module, the at least one flow measurement module configured to measure a volume of the at least one of the at least one radical gas stream and at least one compound stream; and
at least one exhaust conduit configured to exhaust the at least one radical gas stream from the flow measurement module.

2. The system of claim 1 wherein the at least one reagent comprises carbon-based materials.

3. The system of claim 1 wherein the at least one reagent comprises at least one material selected from the group consisting of graphite, silica, carbon fiber, silicon dioxide, and silicon carbide.

4. The system of claim 1 wherein the at least one sampling module includes at least one calorimetry measurement system.

5. The system of claim 1 wherein the at least one sensor module comprises at least one Fourier transform infrared spectroscopy system.

6. The system of claim 1 wherein at least one flow measurement module includes at least one mass flow verifier.

7. The system of claim 1 further comprising at least one processor in communication with at least one of the at least one radical gas generator, at least one sampling module, at least one sensor module, and at least one flow measurement module, the at least one processor configured to controllably adjust to generation of at least one radical gas stream emitted from the at least one radical gas generator based on data received from at least one of the at least one analysis circuit, the at least one sampling module, the at least one sensor module, and the at least one flow measurement module.

Assignees

• Mks Instr
• Mks Instr Inc

Inventors

• Chiu Johannes
• Chen Xing
• Tai Chiu-Ying
• Harris Michael
• Gupta Atul

Classifications

• G01K17/06

  Measuring quantity of heat conveyed by flowing media, e.g. in heating systems (G01K17/02, G01K17/04 take precedence){e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device} · CPC title

• G01N33/0031 Primary

  comprising two or more sensors, e.g. a sensor array · CPC title

• G01N21/75

  Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated (systems in which material is burnt in a flame or plasma G01N21/72, G01N21/73) · CPC title

• G01N25/28

  the rise in temperature of the gases resulting from combustion being measured directly · CPC title

• G01N21/3504

  for analysing gases, e.g. multi-gas analysis · CPC title