Pyroelectric detection device with rigid membrane

Patent metadata

Field	Value
Publication number	US-11262246-B2
Application number	US-201916591970-A
Country	US
Kind code	B2
Filing date	Oct 3, 2019
Priority date	Oct 5, 2018
Publication date	Mar 1, 2022
Grant date	Mar 1, 2022

Abstract

Pyroelectric detection device, including at least:
a substrate; a membrane arranged on the substrate; a pyroelectric detection element arranged on the membrane or forming at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second electrodes; a cavity passing through the substrate, emerging opposite a part of the membrane which forms a bottom wall of the cavity, and including side edges formed by the substrate; an element for stiffening the membrane arranged in the cavity, partially filling the cavity, made integral with the side edges of the cavity at at least two distinct anchoring regions, and arranged against the membrane.

First claim

The invention claimed is:

1. A pyroelectric detection device, comprising:
a substrate;
a membrane arranged on the substrate;
a pyroelectric detection element arranged on the membrane or forming at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second electrodes;
a cavity passing through the substrate, emerging opposite a part of the membrane which forms a bottom wall of the cavity, and including side edges formed by the substrate;
an element for stiffening the membrane arranged in the cavity, partially filling the cavity, made integral with the side edges of the cavity at at least two distinct anchoring regions, and arranged against the membrane, wherein the stiffening element is formed by one or more portions of the substrate such that the stiffening element and the substrate are made of a same material,
in which a ratio between the surface area of the part of the membrane forming the bottom wall of the cavity which is in contact with the stiffening element and the total surface area of the part of the membrane forming the bottom wall of the cavity is comprised between around 0.05 and 0.6.

2. The pyroelectric detection device according to claim 1 , in which the stiffening element comprises several distinct portions of elongated shape and extending into the cavity between the side edges along one or more directions.

3. The pyroelectric detection device according to claim 1 , in which the pyroelectric detection element is arranged on the membrane which comprises at least one layer of material distinct from the pyroelectric detection element.

4. The pyroelectric detection device according to claim 3 , in which the layer of material of the membrane comprises at least one of the following materials: SiO 2 , Si, SiN.

5. The pyroelectric detection device according to claim 1 , in which the membrane forms part of the pyroelectric detection element and is formed at least by the first electrode on which the at least one portion of pyroelectric material rests.

6. The pyroelectric detection device according to claim 1 , in which the pyroelectric detection element comprises a black body formed by at least one of the second electrode which is configured to receive an incident infrared radiation intended to be detected by the device and of a portion of infrared radiation absorbing material such that the second electrode is arranged between the portion of infrared radiation absorbing material and the portion of pyroelectric material.

7. The pyroelectric detection device according to claim 6 , in which the infrared radiation absorbing material comprises at least one of the following materials: TiN, Ni—Cr, Ni, black metal.

8. The pyroelectric detection device according to claim 7 , in which the material of the stiffening element is different from the layer of the infrared radiation absorbing material.

9. The pyroelectric detection device according to claim 1 , in which:
the pyroelectric material corresponds to at least one of the following materials: PZT, doped PZT, AlN, KNN, NBT-BT, PMN-PT, LTO, LNO, PVDF, or
the first electrode comprises at least one of a metal and of a metal oxide, or
the second electrode comprises at least one of the following materials: Pt, Ru, Ir, TiW, Au, Ni, Ni—Cr, TiN.

10. The pyroelectric detection device according to claim 1 , in which a height of the stiffening element is equal to a height of the substrate surrounding the cavity.

11. The pyroelectric detection device according to claim 1 , in which the portions of the substrate that form the stiffening element includes a first set of parallel portions extending in a first direction, each end of the first set of parallel portions being integral with the side edges of the cavity, and a second set of parallel portions extending in a second direction that is perpendicular to the first direction, each end of the second set of parallel portions being integral with the side edges of the cavity.

12. A method for producing a pyroelectric detection device, comprising:
producing, on a substrate, a membrane and a pyroelectric detection element such that it is arranged on the membrane or that it forms at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second electrodes;
producing at least one cavity passing through the substrate, emerging opposite a part of the membrane which forms a bottom wall of the cavity, and including side edges formed by the substrate;
producing at least one element for stiffening the membrane arranged in the cavity, partially filling the cavity, made integral with the side edges of the cavity at at least two distinct anchoring regions, and arranged against the membrane,
wherein the stiffening element is formed by one or more portions of the substrate such that the stiffening element and the substrate are made of a same material, and
wherein a ratio between the surface area of the part of the membrane forming the bottom wall of the cavity which is in contact with the stiffening element and the total surface area of the part of the membrane forming the bottom wall of the cavity is comprised between around 0.05 and 0.6.

13. The method according to claim 12 , in which the cavity and the stiffening element are produced by a same etching step from a rear face of the substrate.

14. The method according to claim 12 , in which the production of the membrane comprises a step of producing, on the substrate, at least one layer of material intended to form the membrane and on which the pyroelectric detection element is next produced.

15. The method according to claim 14 , in which the layer of material is produced by at least one of a thermal oxidation of the substrate which comprises at least one semiconductor, and of a deposition of SiO 2 on the substrate.

16. The method according to claim 14 , in which the production of the pyroelectric detection element comprises the implementation of the following steps:
producing at least one first electrode layer on the layer of material;
producing at least one layer of pyroelectric material on the first electrode layer;
producing at least one second electrode layer on the layer of pyroelectric material;
structuring each of the first and second electrode layers and the layer of pyroelectric material such that remaining portions of these layers form the pyroelectric detection element.

17. The method according to claim 16 , further comprising, between the step of deposition of the second electrode layer and the structuring step, a step of deposition of at least one layer of infrared radiation absorbing material on the second electrode layer, and in which the structuring step is also implemented for the layer of infrared radiation absorbing material such that a remaining portion of this layer of infrared radiation absorbing material arranged on the second electrode forms part of a black body of the pyroelectric detection element.

18. The method according to claim 17 , in which the material of the stiffening element is different from the layer of the infrared radiation absorbing material.

19. The method according to claim 12 , in which the membrane is obtained by the implementation of the following steps:
producing, on the substrate, at least one first electrode layer;
producing at least one layer of pyroelectric material on the first electrode layer;
producing at least one second electrode layer on the layer of pyroelectric material;
structuring the second electrode layer and the

Assignees

• Commissariat Energie Atomique

Inventors

• Le Rhun Gwenael
• Fanget Stephane
• Rouzaud Andre

Classifications

• G01J5/34 Primary

  using capacitors, e.g. pyroelectric capacitors · CPC title

• H10N15/10

  Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point · CPC title

• G01J5/044

  Environment with strong vibrations or shocks · CPC title

• G01J5/068

  by controlling parameters other than temperature · CPC title

• G01J5/0225

  Shape of the cavity itself or of elements contained in or suspended over the cavity · CPC title