Active wet scrubbing filtration system

Patent metadata

Field	Value
Publication number	US-11260336-B2
Application number	US-201916694238-A
Country	US
Kind code	B2
Filing date	Nov 25, 2019
Priority date	Dec 20, 2018
Publication date	Mar 1, 2022
Grant date	Mar 1, 2022

Abstract

An active wet scrubbing filtration system for decontamination of a gas stream comprises components including one or more of: a) a vortexing apparatus which induces a contaminant-bearing gas into a helical flow; b) an initial scrubbing fluid spray section configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream; c) an absorption structure; d) a condenser; and e) first and second scrubbing fluid decontamination systems that may be engaged or disengaged independently of each other. In some embodiments, the worksite comprises a clean room or one or more a semiconductor processing tools, which may include photolithography tools or photolithography tool clusters. In some embodiments, the active wet scrubbing filtration system may be useful in cleaning and recycling air or other process gasses for use in clean rooms or semiconductor processing tools.

First claim

We claim:

1. An apparatus for decontamination of a gas stream, comprising:
a) a gas stream input to receive a contaminant-bearing gas stream;
b) a vortexing apparatus receiving the contaminant-bearing gas stream from the gas stream input and configured to induce the contaminant-bearing gas into a helical flow;
c) an absorption structure equipped with a scrubbing fluid application system to apply a flow of scrubbing fluid to the absorption structure, wherein the contaminant-bearing gas stream is directed to impinge the absorption structure in a helical flow by the vortexing apparatus and passes through the absorption structure thereby contacting the scrubbing fluid which at least partially removes contaminants from the gas stream to form an at least partly decontaminated gas stream;
d) a gas stream output receiving the at least partly decontaminated gas stream and configured to deliver the at least partly decontaminated gas stream;
e) a first scrubbing fluid decontamination system operably connected to receive scrubbing fluid exiting the absorption structure and configured to decontaminate the scrubbing fluid and to return the scrubbing fluid to the scrubbing fluid application system for reuse; and
f) a second scrubbing fluid decontamination system operably connected to receive scrubbing fluid exiting the absorption structure and configured to decontaminate the scrubbing fluid and to return the scrubbing fluid to the scrubbing fluid application system for reuse, wherein the first and the second scrubbing fluid decontamination systems may be engaged or disengaged independently of each other.

2. The apparatus according to claim 1 , wherein the vortexing apparatus is a passive vortexing apparatus comprising one or more stationary vanes.

3. The apparatus according to claim 1 , wherein the helical flow is around an axis parallel to a net motion of the contaminant-bearing gas stream.

4. The apparatus according to claim 1 , wherein the contaminant-bearing gas stream is drawn from a worksite and wherein the at least partly decontaminated gas stream is returned to the worksite.

5. The apparatus according to claim 1 , further comprising:
g) an initial scrubbing fluid spray section positioned between the vortexing apparatus and the absorption structure such that the contaminant-bearing gas stream induced into a helical flow by the vortexing apparatus passes through the initial scrubbing fluid spray section before passing into the absorption structure, wherein the initial scrubbing fluid spray section is configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream.

6. The apparatus according to claim 5 , wherein the scrubbing fluid application system and initial scrubbing fluid spray section are located at opposite ends of the absorption structure.

7. The apparatus according to claim 5 , further comprising:
h) a condenser; configured such that the at least partially decontaminated gas stream exiting the gas stream output contacts the condenser which at least partially removes dissolved or entrained scrubbing fluid from the at least partly decontaminated gas stream.

8. The apparatus according to claim 7 , further comprising a condensed scrubbing fluid recycling apparatus adapted to collect condensed scrubbing fluid removed from the at least partly decontaminated gas stream by the action of the condenser and to return the condensed scrubbing fluid to the scrubbing fluid application system for reuse as scrubbing fluid.

9. The apparatus according to claim 7 , wherein the contaminant-bearing gas stream is drawn from a worksite and wherein the dried and at least partly decontaminated gas stream is returned to the worksite.

10. The apparatus according to claim 1 , wherein the contaminant-bearing gas stream comprises air.

11. The apparatus according to claim 1 , wherein the scrubbing fluid comprises water.

12. The apparatus according to claim 1 , wherein the scrubbing fluid comprises de-ionized (DI) water.

13. The apparatus according to claim 1 , wherein the scrubbing fluid comprises chemisorptive aqueous solutions.

14. The apparatus according to claim 1 , further comprising:
an initial scrubbing fluid spray section positioned between the vortexing apparatus and the absorption structure such that the contaminant-bearing gas stream induced into a helical flow by the vortexing apparatus passes through the initial scrubbing fluid spray section before passing into the absorption structure, wherein the initial scrubbing fluid spray section is configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream.

15. An apparatus for decontamination of a gas stream, comprising:
a) a gas stream input to receive a contaminant-bearing gas stream;
b) a vortexing apparatus receiving the contaminant-bearing gas stream from the gas stream input and configured to induce the contaminant-bearing gas into a helical flow;
c) an absorption structure equipped with a scrubbing fluid application system to apply a flow of scrubbing fluid to the absorption structure, wherein the contaminant-bearing gas stream is directed to impinge the absorption structure in a helical flow by the vortexing apparatus and passes through the absorption structure thereby contacting the scrubbing fluid which at least partially removes contaminants from the gas stream to form an at least partly decontaminated gas stream;
d) a gas stream output receiving the at least partly decontaminated gas stream and configured to deliver the at least partly decontaminated gas stream,
wherein the vortexing apparatus is an active vortexing apparatus comprising one or more mobile vanes.

16. An apparatus for decontamination of a gas stream comprising:
a) a gas stream input to receive a contaminant-bearing gas stream;
b) a vortexing apparatus receiving the contaminant-bearing gas stream from the gas stream input and configured to induce the contaminant-bearing gas into a helical flow;
c) an absorption structure equipped with a scrubbing fluid application system to apply a flow of scrubbing fluid to the absorption structure, wherein the contaminant-bearing gas stream is directed to impinge the absorption structure in a helical flow by the vortexing apparatus and passes through the absorption structure thereby contacting the scrubbing fluid which at least partially removes contaminants from the gas stream to form an at least partly decontaminated gas stream;
d) a gas stream output receiving the at least partly decontaminated gas stream and configured to deliver the at least partly decontaminated gas stream;
e) an initial scrubbing fluid spray section positioned between the vortexing apparatus and the absorption structure such that the contaminant-bearing gas stream induced into a helical flow by the vortexing apparatus passes through the initial scrubbing fluid spray section before passing into the absorption structure, wherein the initial scrubbing fluid spray section is configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream; and
f) a condenser; configured such that the at least partially decontaminated gas stream exiting the gas stream output contacts the condenser which at least partially removes dissolved or entrained scrubbing fluid from the at least partly decontaminated gas stream.

17. An apparatus for decontamination of a gas stream comprising:
a) a gas stream input to receive a contaminant-bearing gas stream;
b) a vortexing apparatus receiving the contaminant-bearing gas stream from the gas stream input and configured to induce the contamin

Assignees

• Entegris Inc

Inventors

• Moulton Tyler
• Britto James
• Leblanc Thomas
• Gaudreau John C

Classifications

• B01D2253/102

  Carbon · CPC title

• B01D2247/106

  using a structured demister, e.g. tortuous channels · CPC title

• B01D2247/12

  Fan arrangements for providing forced draft · CPC title

• B01D53/86 Primary

  Catalytic processes · CPC title

• B01D50/60

  Combinations of devices covered by groups B01D46/00 and B01D47/00 · CPC title