Permanent magnet comprising an antiferromagnetic layer and a ferromagnetic layer

Patent metadata

Field	Value
Publication number	US-11250979-B2
Application number	US-201816762004-A
Country	US
Kind code	B2
Filing date	Sep 25, 2018
Priority date	Nov 10, 2017
Publication date	Feb 15, 2022
Grant date	Feb 15, 2022

Abstract

A permanent magnet comprising an antiferromagnetic layer and a ferromagnetic layer having a first sub-layer made of a first type of ferromagnetic material, the first type of ferromagnetic material being an at least partially crystallized alloy of iron and cobalt, and a second sub-layer made of a second type of ferromagnetic material, this second type of ferromagnetic material also being an alloy of iron and cobalt in which the proportion of face-centered cubic crystals is less than the proportion of face-centered cubic crystals in the first type of ferromagnetic material.

First claim

The invention claimed is:

1. A permanent magnet comprising:
an antiferromagnetic layer,
a ferromagnetic layer having a magnetization direction set by exchange coupling to the antiferromagnetic layer, the ferromagnetic layer comprising:
a first sublayer making contact with the antiferromagnetic layer or solely separated from the antiferromagnetic layer by an intermediate ferromagnetic sublayer the thickness of which is smaller than 2 nm, the thickness of this first sublayer being larger than 2 nm, this first sublayer being made of a first type of ferromagnetic material, the first type of ferromagnetic material being an alloy of iron and cobalt that is at least partially crystallized, and
a second sublayer separated from the antiferromagnetic layer by the first sublayer, the thickness of this second sublayer being larger than 2 nm, this second sublayer being made of a second type of ferromagnetic material, wherein the second type of ferromagnetic material is also an alloy of iron and cobalt in which a proportion of face-centered cubic crystals is lower than a proportion of face-centered cubic crystals in the first type of ferromagnetic material.

2. The permanent magnet of claim 1 , wherein:
the proportion, in atomic percent, of iron in the first type of material is equal to the proportion, in atomic percent, of iron in the second type of material, and
the proportion, in atomic percent, of cobalt in the first type of material is equal to the proportion, in atomic percent, of cobalt in the second type of material.

3. The permanent magnet of claim 2 , wherein:
the first sublayer is obtained using a sputtering deposition process, and
the second sublayer is obtained using the same sputtering deposition process but has a deposition rate for the second sublayer that is at least five times lower than a deposition rate of the first sublayer.

4. The permanent magnet of claim 1 , wherein:
in the first type of material, the proportions, in atomic percent, of iron and of cobalt are lower than 40% and higher than 60%, respectively, and
in the second type of material, the proportions, in atomic percent, of iron and of cobalt are higher than 50% and lower than 50%, respectively.

5. The permanent magnet of claim 1 , wherein the proportions, in atomic percent, of iron and of cobalt in the second type of material are equal to x% and y%, respectively, where x is between 60 and 70, and y is between 30 and 40.

6. A stacked permanent magnet, comprising:
a stack of N patterns stacked immediately on one another in a stacking direction, where N is an integer greater than or equal to 2, each pattern comprising:
the permanent magnet of claim 1 ,
wherein the antiferromagnetic layer of each permanent magnet is made of an antiferromagnetic material,
wherein the ferromagnetic layer of each permanent magnet is made of a ferromagnetic material, and
wherein the magnetization directions of the ferromagnetic layers are all identical.

7. The stacked permanent magnet of claim 6 , wherein:
the magnetization direction of each ferromagnetic layer of N-1 patterns is set by an exchange coupling to an antiferromagnetic layer of a pattern immediately adjacent in the stack,
each ferromagnetic layer in each of these N-1 patterns further comprises a third sublayer,
the third sublayer is in contact with the antiferromagnetic layer of the adjacent pattern or the third sublayer is solely separated from the antiferromagnetic layer of the adjacent pattern by an additional intermediate sublayer made of a ferromagnetic material having a thickness smaller than 2 nm,
the second sublayer is interposed between the first and third sublayers,
the thickness of the third sublayer is larger than 2 nm, and
the third sublayer is made of the first type of ferromagnetic material.

8. The stacked permanent magnet of claim 6 , wherein N is an integer greater than or equal to five.

9. The permanent magnet of claim 1 , wherein the proportion of face-centered cubic crystals in the first type of ferromagnetic material is 1.1 times greater than the proportion of face-centered cubic crystals in the second type of ferromagnetic material.

10. The permanent magnet of claim 1 ,
wherein the intermediate ferromagnetic sublayer is present, and
wherein a thickness of the intermediate ferromagnetic sublayer is smaller than 1 nm.

11. A magnetic-field sensor comprising:
a planar substrate,
at least one permanent magnet of claim 1 , which is movable with respect to the planar substrate in response to a variation in the amplitude or in the direction of a magnetic field to be measured, and
a transducer fastened to the planar substrate, which is able to convert a movement of the at least one permanent magnet into an electrical quantity representative of the amplitude or of the direction of the magnetic field to be measured.

12. A process for manufacturing the permanent magnet of claim 1 , the process comprising:
forming a stack, the stack comprising, stacked on one another in a stacking direction:
the antiferromagnetic layer, and
the ferromagnetic layer.

13. The process of claim 12 , wherein the step of forming the stack comprises:
depositing the first sublayer using a sputtering deposition process, and
depositing the second sublayer using the same sputtering deposition process but having a deposition rate for the second sublayer that is at least five times lower than a deposition rate of the first sublayer.

Assignees

• Commissariat Energie Atomique

Inventors

• Hida Rachid
• Delaet Bertrand
• Giroud Sophie

Classifications

• H01F10/3218 Primary

  Exchange coupling of magnetic films via an antiferromagnetic interface (H01F10/3268 takes precedence) · CPC title

• G01R33/0023

  Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration (G01R33/0017 takes precedence) · CPC title

• G01R15/207

  Constructional details independent of the type of device used · CPC title

• G01R33/07

  Hall effect devices · CPC title

• G01R33/02

  Measuring direction or magnitude of magnetic fields or magnetic flux (G01R33/20 takes precedence) · CPC title