Apparatus for inspecting object surface

Patent metadata

Field	Value
Publication number	US-11249028-B2
Application number	US-202017079668-A
Country	US
Kind code	B2
Filing date	Oct 26, 2020
Priority date	Jan 15, 2018
Publication date	Feb 15, 2022
Grant date	Feb 15, 2022

Abstract

An apparatus for inspecting object surface according to an embodiment includes: an imaging device including an imaging area; an optical source; and a group of optical devices including a mirror and a lens, and causing a reflected light other than a regular reflection light from an object to be reflected by a mirror surface of the mirror, and to form an image in the imaging area of the imaging device through the lens, the regular reflection light being caused by a light incident to a surface of the object from the optical source, wherein the optical source, the mirror, the lens, and the imaging device are arranged in such a manner that the regular reflection light is not incident to the imaging area of the imaging device through the mirror and the lens.

First claim

The invention claimed is:

1. An apparatus for inspecting object surface comprising:
an imaging device including an imaging area;
an optical source faced to a surface of an object to be inspected;
a first mirror including a first mirror surface and a second mirror surface opposed to the first mirror surface;
a second mirror configured to reflect a light reflected by the first mirror and cause the light reflected by the first mirror to be incident to a surface of the object; and
a lens,
wherein a reflected light other than a regular reflection light caused by a light incident to the surface of the object is reflected by the second mirror surface of the first mirror and forms an image in the imaging area of the imaging device through the lens, and
the optical source, the first mirror, the second mirror, the lens, and the imaging device are arranged in such a manner that the regular reflection light is not incident to the imaging area of the imaging device through the second mirror surface of the first mirror and the lens.

2. The apparatus according to claim 1 , wherein an optical axis of the optical source is parallel to a central axis of the object,
an optical axis of the lens intersects with the optical axis of the optical source and coincides with a central axis of the imaging area of the imaging device,
the first mirror surface is inclined with respect to the optical axis of the optical source, and the second mirror surface is inclined with respect to the central axis of the object and the optical axis of the lens, and
a mirror surface of the second mirror is inclined with respect to the optical axis and the optical axis of the lens.

3. The apparatus according to claim 1 , wherein the following relational expression is satisfied, where L denotes a distance between the optical source and a point at which the optical axis intersects with the first mirror surface of the first mirror, 2l denotes a length of the first mirror surface of the first mirror, and NA denotes a numerical aperture of the optical source,

L
≦

ℓ

2

⁢

{

1
+

1

tan
⁡

(

sin

-
1

⁢
NA

)

}

.

4. The apparatus according to claim 1 , wherein the first mirror is a half mirror.

5. The apparatus according to claim 1 , wherein the object is moved along a delivering path.

6. The apparatus according to claim 1 , further comprising an image processor that obtains a surface information of the object based on the image formed by the imaging device.

Assignees

• Toshiba Kk

Inventors

• Kamikawa Takahiro
• Ohno Hiroshi
• Hato Takehiro

Classifications

• G01N2201/0636

  Reflectors · CPC title

• G01N21/8806 Primary

  Specially adapted optical and illumination features · CPC title

• G01N21/47

  Scattering, i.e. diffuse reflection (G01N21/25, G01N21/41 take precedence {G01N21/55 takes precedence}) · CPC title