Microfluidic systems having photodetectors disposed therein and methods of producing the same

Patent metadata

Field	Value
Publication number	US-11247207-B2
Application number	US-201916654657-A
Country	US
Kind code	B2
Filing date	Oct 16, 2019
Priority date	Oct 16, 2018
Publication date	Feb 15, 2022
Grant date	Feb 15, 2022

Abstract

Microfluidic systems having photodetectors disclosed therein and methods of producing the same are disclosed herein. According to an aspect, a microfluidic system includes a body including an interior wall that at least partially defines an interior space for receipt of fluid. Further, the microfluidic system includes a photodetector disposed on the interior wall and positioned to receive light from fluid in the interior space for generating an electrical signal representative of the received light.

First claim

What is claimed is:

1. A microfluidic system comprising:
a body including an interior wall that at least partially defines an interior space for receipt of fluid, wherein the body defines a first aperture that extends into the interior space through the body and the interior wall for providing a path for light to illuminate the fluid; and
a photodetector disposed on the interior wall and positioned to receive light from the illuminated fluid in the interior space for generating an electrical signal representative of the received light, wherein the photodetector defines a second aperture for forming the path for light with the first aperture, wherein the first aperture and the second aperture are substantially aligned.

2. The microfluidic system of claim 1 , wherein the body comprises a substrate comprising a side upon which the photodetector is disposed.

3. The microfluidic system of claim 2 , wherein the substrate is made of a transparent material.

4. The microfluidic system of claim 1 , wherein the body comprises a top plate and a bottom plate, wherein the top plate and the bottom plate are attached together one of permanently or non-permanently, and wherein the bottom plate and the top plate define the interior space therebetween.

5. The microfluidic system of claim 4 , wherein the bottom plate comprises silicon including one of an anti-reflection coating and a fluoropolymer.

6. The microfluidic system of claim 4 , wherein the bottom plate comprises a first layer comprising silicon, a second layer comprising SiO 2 , a third layer comprising Si 3 N 4 , a fourth layer comprising indium tin oxide (ITO), a fifth layer comprising parylene, and a sixth layer comprising a hydrophobic coating.

7. The microfluidic system of claim 6 , wherein the bottom plate further includes a gasket.

8. The microfluidic system of claim 1 , wherein the interior space comprises a microfluidic channel for receiving a continuous flow of fluid, or a surface for receipt of a droplet of fluid.

9. The microfluidic system of claim 1 ,
further comprising a light source configured to direct light into the first aperture and the second aperture, and to the interior space for illuminating fluid in the interior space.

10. The microfluidic system of claim 1 , wherein the photodetector comprises one of a p-n junction, a p-i-n junction, an avalanche photodiode, a phototransistor, a photoconductor, a diode, transistor, a thin film photodetector, or semiconductor device that converts the received light to current.

11. The microfluidic system of claim 1 , wherein the photodetector is substantially annular in shape, and wherein the second aperture extends through approximately a center of the photodetector.

12. The microfluidic system of claim 1 , wherein the light received by the photodetector is fluorescence from the fluid.

13. The microfluidic system of claim 1 , wherein the photodetector comprises a plurality of layers including a p-Si epilayer and an n-Si epilayer.

14. The microfluidic system of claim 13 , wherein the p-Si epilayer and the n-Si epilayer contact each other, and
wherein the plurality of layers further comprises contact layers, wherein the p-Si epilayer and the n-Si epilayer are positioned between the contact layers.

15. The microfluidic system of claim 1 ,
further comprising an optical source configured to be coupled to fluid in the interior space through the first aperture and the second aperture via an optical fiber.

16. The microfluidic system of claim 1 , wherein the photodetector is positioned in the interior space such that the photodetector contacts the fluid when the fluid is in the interior space.

17. The microfluidic system of claim 16 ,
further comprising a light source configured to direct light to the interior space for illuminating fluid in the interior space.

18. The microfluidic system of claim 1 , wherein the body includes a portion that is transparent or translucent for allowing light to pass from outside the body to the interior space, and
wherein the microfluidic system further comprises a light source configured to direct light from outside the body, through the portion of the body, and to the interior space for illuminating fluid in the interior space.

19. A method of producing a microfluidic system, the method comprising:
fabricating a photodetector on a side of substrate, wherein the substrate defines a first aperture that extends through the substrate for providing a path for light; and
using the substrate to form a body with an interior space for receipt of fluid and for receipt of the light through the first aperture, the photodetector being positioned within the interior space to receive light from fluid in the interior space for generating an electrical signal representative of the received light, wherein the photodetector defines a second aperture for forming the path for light with the first aperture, wherein the first aperture and the second aperture are substantially aligned.

20. The method of claim 19 , wherein the body comprises a top plate and a bottom plate, and
wherein the method further comprises attaching the top plate and the bottom plate together to define the interior space therebetween.

21. The method of claim 20 , wherein the bottom plate comprises a first layer comprising a mechanical bottom plate support, and subsequent layers that provide or enhance optical and fluidic system functions.

22. The method of claim 20 , wherein the bottom plate comprises a first layer comprising silicon, a second layer comprising SiO 2 , a third layer comprising Si 3 N 4 , a fourth layer comprising indium tin oxide (ITO), and a fifth layer comprising parylene, and a sixth layer comprising of Cytop.

23. The method of claim 20 , wherein the bottom plate includes microfluidic structures.

24. The method of claim 19 , wherein the interior space comprises a microfluidic channel for receiving a continuous flow of fluid, or a surface for receipt of a droplet of fluid.

Assignees

• Univ Duke

Inventors

• Jokerst Nan Marie
• Dighe Aditi
• Fair Richard

Classifications

• H10F77/147

  Shapes of bodies · CPC title

• B01L3/502715 Primary

  characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces · CPC title

• B01L3/502707

  characterised by the manufacture of the container or its components · CPC title

• B01L2300/168

  Specific optical properties, e.g. reflective coatings · CPC title

• B01L2300/12

  Specific details about materials · CPC title