Graphene transfer system using heat treatment module and graphene transfer method using same
US-2024400396-A1 · Dec 5, 2024 · US
US11241870B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11241870-B2 |
| Application number | US-201716067808-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 11, 2017 |
| Priority date | Jun 7, 2017 |
| Publication date | Feb 8, 2022 |
| Grant date | Feb 8, 2022 |
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A membrane bearing device, a membrane attaching apparatus and a method for attaching a membrane are provided in embodiments of the disclosure. The membrane bearing device includes: a base plate, comprising a first bearing surface configured to bear a membrane; and a roller, which is rotatably mounted onto the base plate, and is configured to transfer and attach the membrane from the first bearing surface to a substrate onto which the membrane is to be attached, by rolling on the membrane.
Opening claim text (preview).
What is claimed is: 1. A membrane bearing device, comprising: a base plate, comprising a first bearing surface configured to bear a membrane; and a roller, which is rotatably mounted onto the base plate, and is configured to transfer and attach the membrane from the first bearing surface to a substrate onto which the membrane is to be attached, by rolling on the membrane, wherein a swinger configured to function as a first positioner is provided on the base plate and is swayable to one of a first position and a second position, relative to the base plate; wherein the swinger is provided with a first positioning surface, and in response to the swinger being swayed to the first position, the first positioning surface is aligned with an attachment starting end of the membrane so as to define a specific position of the membrane on the first bearing surface; and wherein in response to the swinger being located at the second position, the swinger is located away from the attachment starting end of the membrane. 2. The membrane bearing device according to claim 1 , wherein the roller is provided on a side surface of the base plate adjacent to the first bearing surface. 3. The membrane bearing device according to claim 1 , wherein in response to the swinger being swayed to the first position, the first positioning surface is perpendicular to the first bearing surface. 4. The membrane bearing device according to claim 1 , wherein the swinger comprises a first supporting pillar, a second supporting pillar and a positioning plate; wherein a first end of the first supporting pillar and a first end of the second supporting pillar are provided respectively on two side surfaces of the base plate which side surfaces are adjacent to the first bearing surface and opposite to each other, and the first supporting pillar and the second supporting pillar are swayable relative to the base plate; and wherein the positioning plate is connected between a second end of the first supporting pillar and a second end of the second supporting pillar, the second end of the first supporting pillar being opposite to the first end of the first supporting pillar and the second end of the second supporting pillar being opposite to the first end of the second supporting pillar, and the positioning plate is driven by both the first pillar and the second pillar to sway to the first position at which the positioning plate is in contact with the roller. 5. The membrane bearing device according to claim 1 , wherein the base plate is provided with a vacuum adsorption device for adsorbing the membrane onto the first bearing surface. 6. The membrane bearing device according to claim 1 , wherein a handle is provided at a surface of the base plate facing away from the first bearing surface for holding the base plate by hand. 7. A membrane attaching apparatus comprising the membrane bearing device according to claim 1 , and further comprising a base table, the base table comprising a second bearing surface for supporting the substrate onto which the membrane is to be attached, wherein the base plate is movable relative to the base table for supporting the substrate onto which the membrane is to be attached and used to bear the membrane in a removable manner, and the roller is used to roll on the membrane to attach the membrane onto the substrate onto which the membrane is to be attached on the base table in response to the base plate being moved relative to the base table. 8. The membrane attaching apparatus according to claim 7 , further comprising a base plate positioner on the base table for defining a position of the roller and in turn aligning the attachment starting end of the membrane with an attachment starting end of the substrate onto which the membrane is to be attached. 9. The membrane attaching apparatus according to claim 8 , wherein the base plate positioner comprises a first stop on the base table, and the first stop comprises a second positioning surface used to align the attachment starting end of the membrane with the attachment starting end of the substrate onto which the membrane is to be attached in response to the roller being in touch with the second positioning surface. 10. The membrane attaching apparatus according to claim 9 , wherein the second positioning surface is perpendicular to the second bearing surface. 11. The membrane attaching apparatus according to claim 9 , wherein the base plate positioner further comprises an adjusting screw and a mounting plate for mounting the adjusting screw thereon; wherein the mounting plate is provided on the base table and located at a side of the first stop facing away from the second positioning surface, and the mounting plate is provided with a screw hole whose axis is perpendicular to the second positioning surface; and wherein the adjusting screw passes through and is in a threaded connection with the screw hole, and is rotatably connected with the first stop which is movable relative to the base table. 12. The membrane attaching apparatus according to claim 7 , wherein the base table is further provided with a second stop which has a third positioning surface and a fourth positioning surface, the third positioning surface and the fourth positioning surface being aligned with the attachment starting end of the substrate onto which the membrane is to be attached and a side thereof adjacent to the attachment starting end of the substrate respectively so as to define a position of the substrate onto which the membrane is to be attached on the second bearing surface. 13. The membrane attaching apparatus according to claim 12 , wherein the third positioning surface and the fourth positioning surface are perpendicular to each other and both are perpendicular to the second bearing surface. 14. The membrane attaching apparatus according to claim 7 , wherein the base table is further provided with a third stop which has a fifth positioning surface, and the base plate is provided with a positioning pillar; and wherein in response to the base plate being moved relative to the base table, the positioning pillar moves along the fifth positioning surface and in turn defines a direction in which the base plate moves. 15. The membrane attaching apparatus according to claim 14 , wherein the positioning pillar is provided with a rolling device which rolls along the fifth positioning surface in response to the base plate being moved relative to the base table.
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