Optical modulating device, beam steering device, and system employing the same

Patent metadata

Field	Value
Publication number	US-11237452-B2
Application number	US-201715683879-A
Country	US
Kind code	B2
Filing date	Aug 23, 2017
Priority date	Aug 23, 2016
Publication date	Feb 1, 2022
Grant date	Feb 1, 2022

Abstract

An optical modulating device, a beam steering device, and a system employing the same are provided. The optical modulating device includes an active layer, a driver configured to electrically control a refraction index of the active layer, and a nano-antenna disposed on the active layer, and having a dual nano-antenna structure including a first nano-antenna and a second nano-antenna, the first nano-antenna having a length different from a length of the second nano-antenna, and the first nano-antenna being spaced apart from the second nano-antenna. The driver includes a first driver electrically connected to the first nano-antenna, and a second driver electrically connected to the second nano-antenna.

First claim

What is claimed is:

1. An optical modulating device comprising:
an active layer;
a driver configured to electrically control a refraction index of the active layer; and
a nano-antenna disposed on the active layer, and having a dual nano-antenna structure comprising:
a first nano-antenna portion;
a first electrode extending from the first nano-antenna portion at a first angle;
a second nano-antenna portion; and
a second electrode extending from the second nano-antenna portion at a second angle,
wherein the first nano-antenna portion has a first length in a first direction, the first length being different from a second length of the second nano-antenna portion in the first direction,
wherein the first nano-antenna portion is spaced apart from the second nano-antenna portion by a gap in a second direction crossing the first direction, and
wherein the driver comprises a first driver electrically connected to the first nano-antenna portion, and a second driver electrically connected to the second nano-antenna portion,
wherein the first electrode extends away from the second nano-antenna portion in the second direction without extending into the gap,
wherein the second electrode extends away from the first nano-antenna portion in the second direction without extending into the gap,
wherein the gap between the first nano-antenna portion and the second nano-antenna portion is formed by an empty space without including any electrode, and
wherein the first electrode extends in a first extension direction from the first nano-antenna and the second electrode extends in a second extension direction opposite to the first extension direction from the second nano-antenna portion, the first extension direction and the second extension direction being perpendicular to the first direction.

2. The optical modulating device of claim 1 , wherein, when the first length of the first nano-antenna portion is denoted by L 1 , the second length of the second nano-antenna portion is denoted by L 2 , and a distance between the first nano-antenna portion and the second nano-antenna portion is denoted by D,
L1≠L2, and

D is less than L 1 and L 2 , and is a coupling distance over which the first nano-antenna portion and the second nano-antenna portion are able to be coupled.

3. The optical modulating device of claim 1 , wherein the nano-antenna satisfies any one or any combination of conditions comprising:
the first length of the first nano-antenna portion being from about 230 nm to about 270 nm;
the second length of the second nano-antenna portion being from about 210 nm to about 250 nm;
a distance between the first nano-antenna portion and the second nano-antenna portion being less than about 120 nm; and
a first width of either one or both of the first nano-antenna portion and the second nano-antenna portion that is parallel to the second direction being from about 60 nm to about 80 nm.

4. The optical modulating device of claim 3 , wherein a second width of either one or both of the first electrode and the second electrode that is parallel to the first direction is from about 100 nm to about 180 nm.

5. The optical modulating device of claim 1 , wherein the first nano-antenna portion is parallel to the second nano-antenna portion.

6. The optical modulating device of claim 1 , further comprising a metal layer disposed below the active layer.

7. The optical modulating device of claim 1 , further comprising a dielectric layer disposed between the active layer and the nano-antenna.

8. The optical modulating device of claim 1 , further comprising an array of nano-antennas disposed on the active layer.

9. The optical modulating device of claim 1 , wherein the first electrode and the second electrode are collinear.

10. The optical modulating device of claim 1 , wherein the nano-antenna has a cross shape, and
wherein the gap extends through a central portion of the cross shape in the first direction from an edge of the nano-antenna to an opposite edge of the nano-antenna.

11. The optical modulating device of claim 1 , wherein the first nano-antenna portion comprises a first rectangular face defining a first side of the gap and the second nano-antenna portion comprises a second rectangular face defining a second side of the gap, and
wherein a length of the first rectangular face is different from a length of the second rectangular face.

12. A beam steering device comprising:
an active layer;
a driver configured to electrically control a refraction index of the active layer; and
a plurality of nano-antennas disposed on the active layer, each of the plurality of nano-antennas being spaced apart from each other in a first direction, and each of the plurality of nano-antennas comprising:
a first nano-antenna portion;
a first electrode extending from the first nano-antenna portion at a first angle;
a second nano-antenna portion; and
a second electrode extending from the second nano-antenna portion at a second angle,
wherein the first nano-antenna portion has a first length in the first direction, the first length being different from a second length of the second nano-antenna portion in the first direction, and
wherein the first nano-antenna portion is spaced apart from the second nano-antenna portion by a gap in a second direction crossing the first direction,
wherein the first electrode extends away from the second nano-antenna portion in the second direction without extending into the gap,
wherein the second electrode extends away from the first nano-antenna portion in the second direction without extending into the gap,
wherein the gap between the first nano-antenna portion and the second nano-antenna portion is formed by an empty space without including any electrode, and
wherein the first electrode extends in a first extension direction from the first nano-antenna and the second electrode extends in a second extension direction opposite to the first extension direction from the second nano-antenna portion, the first extension direction and the second extension direction being perpendicular to the first direction.

13. The beam steering device of claim 12 , wherein, when the first length of the first nano-antenna portion is denoted by L 1 , the second length of the second nano-antenna portion is denoted by L 2 , and a distance between the first nano-antenna portion and the second nano-antenna portion is denoted by D,
L1≠L2, and

D is less than L 1 and L 2 , and is a coupling distance over which the first nano-antenna portion and the second nano-antenna portion are able to be coupled.

14. The beam steering device of claim 12 , wherein each of the plurality of nano-antennas satisfies any one or any combination of conditions comprising:
the first length of the first nano-antenna portion being from about 230 nm to about 270 nm;
the second length of the second nano-antenna portion being from about 210 nm to about 250 nm;
a distance between the first nano-antenna portion and the second nano-antenna portion being less than about 120 nm; and
a first width of either one or both of the first nano-antenna portion and the second nano-antenna portion that is parallel to the second direction being from about 60 nm to about 80 nm.

15. The beam steering device of claim 14 , wherein a second width of either one or both of the first electrode and the second electrode that is parallel to the first direction is from about 100 nm to about 180 nm.

16. The beam steering device of claim 12 , wherein the first nano-antenna portion is parallel to the second nano-antenna portion.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kyoung Jisoo
• Song Seokho
• Shin Changgyun
• Lee Duhyun

Classifications

• G02F2201/12

  electrode · CPC title

• H01S3/0071

  Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction · CPC title

• G02B26/02 Primary

  for controlling the intensity of light {(G02B26/004 takes precedence)} · CPC title

• G02F1/292 Primary

  by controlled diffraction or phased-array beam steering (controlled diffraction for optical switching G02F1/31) · CPC title

• G02F1/2955

  by controlled diffraction or phased-array beam steering (controlled diffraction for optical waveguide switching G02F1/313) · CPC title