Substrate perforation system and method using polygon mirror(s)

Patent metadata

Field	Value
Publication number	US-11237386-B2
Application number	US-202016815874-A
Country	US
Kind code	B2
Filing date	Mar 11, 2020
Priority date	Mar 11, 2020
Publication date	Feb 1, 2022
Grant date	Feb 1, 2022

Abstract

Various arrangements and methods are disclosed for forming one or more perforations on a substrate surface using a laser system, at least one rotating polygon mirror, and at least one other movable mirror. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface by incrementing (e.g., moving) a first mirror between a plurality of fixed (e.g., pointing) positions. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate using a first mirror that is maintained in a fixed (e.g., pointing) position. A first rotating polygon mirror and a second rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface, where the first and second polygon mirrors are used to define an extent of a given perforation in two dimensions on the substrate.

First claim

What is claimed:

1. A method for creating a perforation in a substrate, comprising:
directing a laser beam from a laser;
rotating a first polygon mirror comprising a plurality of faces that are disposed on a perimeter of said first polygon mirror;
reflecting said laser beam from a face of said plurality of faces;
removing material from a substrate, after said reflecting step, by impacting said laser beam on said substrate;
repeating said reflecting and removing steps a plurality of times to define a first perforation in said substrate;
defining a first plurality of perforations on said substrate using said repeating step, wherein each perforation of said first plurality of perforations is spaced from a remainder of said first plurality of perforations, and wherein said first plurality of perforations comprises said first perforation;
wherein an optical system comprises said first polygon mirror and said laser, wherein said optical system is in a first position for said defining a first plurality of perforations step, said method further comprising:
moving an entirety of said optical system from said first position to a second position; and
defining a second plurality of perforations on said substrate using said repeating step, wherein each perforation of said second plurality of perforations is spaced from a remainder of said second plurality of perforations, wherein said first plurality of perforations and said second plurality of perforations are defined in non-overlapping portions of said substrate, and wherein said optical system is in said second position for said defining a second plurality of perforations step.

2. The method of claim 1 , wherein multiple executions of said reflecting and removing steps are required to define both a desired depth of said first perforation and a desired perimeter configuration of said first perforation.

3. The method of claim 1 , wherein a movable mirror and said first polygon mirror are in an optical path proceeding from said laser to said substrate, wherein said first polygon mirror defines a plurality of said first perforations in at least a first dimension and said movable mirror defines at least part of at least some of said plurality of said first perforations in a second dimension that is orthogonal to said first dimension.

4. The method of claim 1 , wherein each said face of said plurality of faces is a planar surface and is parallel to a rotational axis of said first polygon mirror.

5. The method of claim 4 , further comprising:
executing a first repeating step comprising repeating said reflecting and removing steps a plurality of times at spaced locations in each of a first plurality of rows that each correspond with an x dimension of said substrate, wherein each row of said first plurality of rows are spaced from one another in a y dimension of said substrate, wherein said first plurality of rows define a first row set, and wherein a plurality of said first perforations are defined in said first row set and are spaced from one another along said first row set.

6. The method of claim 5 , further comprising incrementally moving a first mirror between a first plurality of fixed positions, wherein each fixed position of said first plurality of fixed positions corresponds with a different said row of said first row set.

7. The method of claim 1 , wherein each said face of said plurality of faces is a planar surface and is disposed at a different angle relative to a rotational axis of said first polygon mirror.

8. The method of claim 7 , further comprising maintaining a first mirror in a first fixed position until completion of said first perforation, wherein said first mirror is disposed between said laser and said first polygon mirror in an optical path proceeding from said laser to said substrate.

9. The method of claim 8 , further comprising:
incrementing said first mirror to a second fixed position; and
repeating said reflecting and removing steps a plurality of times to define a second perforation in said substrate and with said first mirror remaining in said second fixed position, wherein said first and second perforations are spaced from one another in a y dimension of said substrate.

10. The method of claim 1 , further comprising the steps of:
rotating a second polygon mirror comprising a plurality of faces that are disposed on a perimeter of said second polygon mirror;
wherein said first polygon mirror comprises a first rotational axis, wherein said second polygon mirror comprises a second rotational axis, and wherein said first rotational axis is disposed in a different orientation than said second rotational axis.

11. The method of claim 10 , wherein said first polygon mirror is used to define an extent of said first perforation in an x dimension of said substrate, and wherein said second polygon mirror is used to define an extent of said first perforation in a y dimension of said substrate.

12. The method of claim 10 , wherein said repeating step comprises impacting said laser beam on each of a plurality of different locations within each row of each row set of a plurality of row sets, said method further comprising:
defining a plurality of said first perforations in each said row set using said repeating step.

13. The method of claim 12 , wherein all of said plurality of first perforations in a given said row set are defined prior to initiating execution of said defining step in a different said row set.

14. The method of claim 12 , wherein said defining a plurality of said first perforations comprises:
a first sequencing step comprising sequencing said laser beam a single time through each said row set of said plurality of row sets to impact a first plurality of different locations within each said row set; and
executing a second sequencing step after said first sequencing step, and comprising sequencing said laser beam a single time through each said row set of said plurality of row sets to impact a second plurality of different locations within each said row set.

15. A perforation system, comprising:
a movable base;
a laser mounted in a fixed position on said movable base;
a first polygon mirror rotatably mounted on said movable base; and
a controller configured:
to dispose said movable base in a plurality of fixed positions; and
to operate said laser and to rotate said first polygon mirror at a fixed rotational speed to define a plurality of perforations throughout a predetermined area of a substrate for each of said plurality of fixed positions of said movable base.

16. The perforation system of claim 15 , further comprising a first mirror mounted on said movable base.

17. The perforation system of claim 15 , further comprising:
a second polygon mirror rotatably mounted on said movable base and a first mirror movably mounted on said movable base.

18. The perforation system of claim 17 , wherein said first polygon mirror is disposed between said laser and said second polygon mirror along an optical path.

19. A method for creating a perforation in a substrate, comprising:
directing a laser beam from a laser;
rotating a first polygon mirror comprising a plurality of faces that are disposed on a perimeter of said first polygon mirror, wherein each said face of said plurality of faces is a planar surface and is disposed at a different angle relative to a rotational axis of said first polygon mirror;
reflecting said laser beam from a face of said plurality of faces;
removing material from a substrate, after said reflecting step, by impacting said

Assignees

• Rohr Inc

Inventors

• Mueller Arabella
• Cabrera Angel
• Ghebremichael Fassil
• Novak Charles
• Adan Andrew
• Elliott Dominic J

Classifications

• B23K26/382

  by boring · CPC title

• G02B26/125

  Details of the optical system between the polygonal mirror and the image plane (G02B26/123, G02B26/127 take precedence; F-Theta lenses G02B13/0005) · CPC title

• B23K26/0821 Primary

  using multifaceted mirrors, e.g. polygonal mirror · CPC title

• B23K26/082

  Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head · CPC title

• B23K26/0622

  by shaping pulses · CPC title