Atomic layer deposition bonding for heterogeneous integration of photonics and electronics

Patent metadata

Field	Value
Publication number	US-11237325-B2
Application number	US-202016844492-A
Country	US
Kind code	B2
Filing date	Apr 9, 2020
Priority date	Jan 18, 2017
Publication date	Feb 1, 2022
Grant date	Feb 1, 2022

Abstract

Methods and systems are presented for heterogeneous integration of photonics and electronics with atomic layer deposition (ALD) bonding. One method includes operations for forming a compound semiconductor and for depositing (e.g., via atomic layer deposition) a continuous film of a protection material (e.g., Al2O3) on a first surface of the compound semiconductor. Further, the method includes an operation for forming a silicon on insulator (SOI) wafer, with the SOI wafer comprising one or more waveguides. The method further includes bonding the compound semiconductor at the first surface to the SOI wafer to form a bonded structure and processing the bonded structure. The protection material protects the compound semiconductor from acid etchants during further processing of the bonded structure.

First claim

What is claimed is:

1. A method comprising:
forming a semiconductor wafer comprising a film of protection material deposited on a first side of the semiconductor wafer;
separating the semiconductor wafer into a plurality of semiconductor dies;
forming a bonded structure by placing the plurality of dies on a silicon-on-insulator (SOI) wafer that comprises one or more waveguides, the plurality of dies placed on the SOI wafer such that the film of protection material on the first side of each of the plurality of dies is in contact with a second side of the SOI wafer; and
applying an etchant to the bonded structure, the film of protection material protecting bonds between the plurality of dies and the SOI wafer from the etchant.

2. The method of claim 1 , wherein the etchant is an acid etchant that patterns circuits on the plurality of semiconductor dies of the bonded structure, the film of protection material protecting the plurality of dies from the acid etchant.

3. The method of claim 2 , wherein the film on the plurality of dies further protects the second side of the SOI wafer from the acid etchant.

4. The method of claim 2 , wherein the protection material is a first dielectric material deposited on the first side of the semiconductor wafer, wherein a second dielectric material is on the second side of the SOI wafer, the first dielectric material and the second dielectric material being different types of dielectric materials.

5. The method of claim 4 , wherein the first dielectric material and the second dielectric material are different dielectric oxide materials.

6. The method of claim 4 , wherein the first dielectric material is aluminum oxide.

7. The method of claim 4 , wherein the second dielectric material is silicon oxide.

8. The method of claim 1 , wherein forming the bonded structure comprises applying heat.

9. The method of claim 8 , wherein the heat is applied to one or more of the plurality of dies.

10. The method of claim 1 , wherein forming the bonded structure comprises applying pressure.

11. The method of claim 10 , wherein the pressure is applied to one or more of the plurality of dies.

12. The method of claim 1 , wherein the film is a vapor deposited thin film.

13. The method of claim 12 , wherein the vapor deposited thin film is a continuous film with no discontinuities.

14. The method of claim 1 , wherein the film has a height between 2 and 50 nanometers.

Assignees

• Juniper Networks Inc

Inventors

• Parker John
• Fish Gregory Alan
• Spannagel Martin A
• Labaro Antonio

Classifications

• H10W10/181

  Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers · CPC title

• H10P90/1914 Primary

  using bonding · CPC title

• H10P50/648

  Anisotropic liquid etching · CPC title

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/69395

  the material containing zirconium, e.g. ZrO2 · CPC title