Mitigating pyrophoric deposits in exhaust piping during SIC CVI/CVD processes by introducing water vapor into an outlet portion of a reaction chamber

Patent metadata

Field	Value
Publication number	US-11236021-B2
Application number	US-201715852835-A
Country	US
Kind code	B2
Filing date	Dec 22, 2017
Priority date	Dec 22, 2017
Publication date	Feb 1, 2022
Grant date	Feb 1, 2022

Abstract

Systems for and methods of manufacturing a ceramic matrix composite include introducing a gaseous precursor into an inlet portion of a reaction furnace having a chamber comprising the inlet portion and an outlet portion that is downstream of the inlet portion, and delivering a mitigation agent, such as water vapor or ammonia, into an exhaust conduit in fluid communication with and downstream of the outlet portion of the reaction chamber so as to control chemical reactions occurring with the exhaust chamber. Introducing the gaseous precursor densities a porous preform, and introducing the mitigation agent shifts the reaction equilibrium to disfavor the formation of harmful and/or pyrophoric byproduct deposits within the exhaust conduit.

First claim

What is claimed is:

1. A system for manufacturing a ceramic matrix composite component, comprising:
a reaction chamber including an inlet portion configured to receive a porous preform and a gaseous precursor, and further including an outlet portion configured to define a gas mixing space;
an exhaust conduit in fluid communication with the outlet portion of the reaction chamber; and
a supply conduit configured to deliver a mitigation agent to the exhaust conduit downstream of the outlet portion;
wherein the outlet portion comprises a porous gas mixing substrate disposed downstream from the inlet portion, wherein the porous gas mixing substrate comprises one of a volcanic rock and a graphite;
the porous preform comprises silicon carbide (SiC);
the gaseous precursor comprises at least one of a chlorosilane, a chlorinated carbosilane, and a methyltrichlorosilane;
the mitigating agent comprises at least one of water vapor and ammonia; and
a chlorine in at least one of (i) the gaseous precursor and (ii) an intermediate species of the gaseous precursor is replaced with a hydroxyl group in response to being reacted with the mitigating agent.

2. The system of claim 1 , wherein the mitigation agent comprises water vapor.

3. The system of claim 1 , wherein the mitigation agent comprises ammonia.

4. The system of claim 1 , wherein the mitigation agent is configured to control chemical reactions within the exhaust conduit.

5. The system of claim 1 , wherein the mitigation agent is configured to decrease a flammability of polychlorosilane within the exhaust conduit.

6. The system of claim 1 , further comprising a mass flow controller configured to control the mitigation agent delivered to the exhaust conduit.

7. The system of claim 6 , wherein the mass flow controller is configured to control at least one of an amount, pressure, temperature, and timing of the mitigation agent delivered to the exhaust conduit.

8. The system of claim 1 , wherein the gaseous precursor is introduced into the reaction chamber at a first flow rate, the mitigation agent is introduced into the exhaust conduit at a second flow rate, and the second flow rate is between 50% and 300% higher than the first flow rate of the gaseous precursor.

9. The system of claim 1 , further comprising a vacuum pump, wherein the supply conduit configured to deliver the mitigation agent to the exhaust conduit upstream from the vacuum pump.

10. The system of claim 1 , wherein the reaction chamber further includes a gas distributor configured to facilitate the mixing and distribution of the gaseous precursor flowing through the porous preform.

11. The system of claim 10 , wherein the gas distributor divides the inlet portion into at least a first sub-compartment and a second sub-compartment.

Assignees

• Goodrich Corp

Inventors

• She Ying
• Menon Naveen
• Richards Gavin Charles
• Dardas Zissis A
• Filburn Thomas P

Classifications

• C04B2235/5244

  Silicon carbide · CPC title

• C23C16/045

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• C23C16/325

  Silicon carbide · CPC title

• C04B2235/46

  Gases other than oxygen used as reactant, e.g. nitrogen used to make a nitride phase · CPC title