Microwave plasma processing apparatus and microwave plasma processing method
US-2017358835-A1 · Dec 14, 2017 · US
US11233306B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-11233306-B1 |
| Application number | US-202016891637-A |
| Country | US |
| Kind code | B1 |
| Filing date | Jun 3, 2020 |
| Priority date | Dec 11, 2019 |
| Publication date | Jan 25, 2022 |
| Grant date | Jan 25, 2022 |
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A duo-quad wideband wave guide combiner includes a circular waveguide having a center axis with a cross section with four quadrants; and two waveguides, each waveguide being bifurcated at an input to the wave guide combiner by a thin septum to split each of the two waveguide into two bifurcated waveguides, each of the bifurcated waveguides rotating to a respective one of the four quadrants about the center axis of the circular waveguide with converging walls terminating when a composite cross section becomes circular.
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What is claimed is: 1. A duo-quad wideband wave guide combiner comprising: a circular waveguide having a center axis with a cross section with four quadrants; and two waveguides, each waveguide being bifurcated at an input to the wave guide combiner by a thin septum to split each of the two waveguide into two bifurcated waveguides, each of the bifurcated waveguides rotating to a respective one of the four quadrants about the center axis of the circular waveguide with converging walls terminating when a composite cross section becomes circular. 2. The duo-quad wideband wave guide combiner as recited in claim 1 wherein each one of the bifurcated waveguides accommodates a TE 10 rectangular mode signal and transitions from a rectangular cross section to a cross section resembling a pie slice spanning one quadrant of the four quadrants of a composite circular cross section of the circular waveguide. 3. The duo-quad wideband wave guide combiner as recited in claim 2 comprising: successive machined layers of metal stacked upon each other with each machined layer shaped accordingly to provide the transition from the rectangular cross section to the cross section resembling the pie slice spanning one quadrant of the four quadrants of the composite circular cross section of the circular waveguide. 4. The duo-quad wideband wave guide combiner as recited in claim 2 comprising: successive machined layers of metal stacked upon each other with each machined layer shaped accordingly to provide the transition for each one of the bifurcated waveguides from the rectangular cross section to the cross section resembling the pie slice spanning one quadrant of the four quadrants of the composite circular cross section to provide the four quadrants of the composite circular cross section. 5. The duo-quad wideband wave guide combiner as recited in claim 2 wherein each one of the bifurcated waveguides once transitioned to a cross section resembling the pie slice spanning one quadrant of the four quadrants of the composite circular cross section to provide the composite circular cross section terminates the thin septum between adjacent pie slice cross sections. 6. A power combiner for combining radio frequency signals from two inputs into a combined output signal at an output having a TE 01 circular mode comprising: a first rectangular waveguide having a TE 10 rectangular mode, the first rectangular waveguide having a thin septum to bifurcate the first rectangular waveguide into two bifurcated waveguides, each one of the two bifurcated waveguides of the first rectangular waveguide transitions from a rectangular cross section to a cross section resembling a pie slice spanning one quadrant of a composite circular cross section; a second rectangular waveguide having a TE 10 rectangular mode, the second rectangular waveguide having a thin septum to bifurcate the second rectangular waveguide into two bifurcated waveguides, each one of the two bifurcated waveguides of the second rectangular waveguide transitions from a rectangular cross section to a cross section resembling a pie slice spanning one quadrant of a composite circular cross section; and a circular waveguide having TE 01 circular mode, the circular waveguide disposed at converging walls of each one of the quadrants of the composite circular cross section which form a thin septa between each one of the quadrants. 7. The power combiner as recited in claim 6 wherein each one of the thin septa terminates at the circular waveguide. 8. The power combiner as recited in claim 6 wherein each one of the bifurcated waveguides rotates to a respective quadrant to provide the pie slice spanning one quadrant of the composite circular cross section about the center axis of the circular output and transitions from a rectangular cross-section to a cross-section resembling the pie slice spanning one quadrant of the composite circular cross section of circular waveguide. 9. The power combiner as recited in claim 6 comprising successive machined layers of metal stacked upon each other with each machined layer shaped accordingly to provide the transition from a rectangular cross section to a cross section resembling the pie slice spanning one quadrant of four quadrants of the composite circular cross section. 10. The power combiner as recited in claim 9 comprising a metallic plate with the successive machined layers of metal stacked upon each other stacked on the metallic plate ending with a metal ring and held together with metal rods. 11. A method of providing a power combiner for combining two TE 10 rectangular mode microwave signals into a combined output TE 01 circular mode microwave signal comprising: providing a metallic plate having a first rectangular opening and a second rectangular opening, each opening accommodating a rectangular waveguide as an input to the power combiner, the first rectangular opening bifurcated by a first thin septum to split the first rectangular waveguide into a first bifurcated waveguide and a second bifurcated waveguide, the second rectangular opening bifurcated by a second thin septum to split the second rectangular waveguide into a third bifurcated waveguide and a fourth bifurcated waveguide; providing a first metallic layer having a first side and a second side with four openings, each of the four openings on the first side mating with a respective bifurcated waveguide of the first, second, third or fourth bifurcated waveguides in the metallic plate, each of the four opening partially rotates to a respective quadrant about a center axis of a circular output and transitions from a rectangular cross-section to a cross-section resembling a pie slice spanning one quadrant of a composite circular cross section of circular waveguide; providing a second metallic layer having a first side and a second side with four openings, each of the four openings on the first side mating with a respective opening in the second side of the first metallic layer, each of the four opening partially rotates to a respective quadrant about a center axis of a circular output and transitions from a rectangular cross-section to a cross-section resembling a pie slice spanning one quadrant of a composite circular cross section of circular waveguide; providing successive layers having a first side and a second side with four openings, each of the four openings on the first side mating with a respective opening in the second side of an adjacent metallic layer, each of the four opening partially rotates to a respective quadrant about a center axis of a circular output until a transition from a rectangular cross-section to a cross-section resembling a pie slice spanning one quadrant of a composite circular cross section of circular waveguide is completed; and providing a ring with an aperture disposed adjacent the successive layer having a completed composite circular cross section, the aperture sized to match the circular cross section in the successive layer and providing the output of the power combiner. 12. A method as recited in claim 11 wherein the providing successive layers comprises: ensuring transitioning geometry of the layers are disposed so all surfaces have a continuous with no discontinuities in the direction of wave propagation to minimize reflection and the waveguide preserves the wave impedance of the rectangular waveguide throughout the transition.
Conjugate devices, i.e. devices having at least one port decoupled from one other port · CPC title
Transitions between hollow waveguides of different shape, e.g. between a rectangular and a circular waveguide · CPC title
specifically adapted for selection or promotion of the TE01 circular-electric mode · CPC title
the guides being hollow waveguides · CPC title
using hollow waveguide filters (H01P1/2131 takes precedence) · CPC title
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