Separator for secondary battery, manufacturing method thereof, method for manufacturing secondary battery comprising the separator and secondary battery manufactured by the method
US-12183949-B2 · Dec 31, 2024 · US
US11233248B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11233248-B2 |
| Application number | US-201816012156-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 19, 2018 |
| Priority date | Feb 23, 2015 |
| Publication date | Jan 25, 2022 |
| Grant date | Jan 25, 2022 |
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The method for coating a separator for a fuel cell according to one form of the present disclosure includes the steps of: vaporizing a metal nitride precursor to obtain a precursor gas; introducing a metal nitride coating layer-forming gas containing the precursor gas and a reactive gas to a reaction chamber; applying a voltage to the reaction chamber so that the precursor gas and reactive gas may be converted into a plasma state, thereby forming a metal nitride coating layer on a substrate; introducing a carbon layer-forming gas containing a carbonaceous gas to the reaction chamber; and applying a voltage to the reaction chamber so that the carbonaceous gas may be converted into a plasma state, thereby forming a carbon coating layer on the metal nitride coating layer.
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What is claimed is: 1. A method for coating a separator for a fuel cell, the method comprising: vaporizing a metal nitride precursor to obtain a precursor gas; introducing a metal nitride coating layer-forming gas containing the precursor gas and a reactive gas to a reaction chamber; applying a voltage to the reaction chamber so that the precursor gas and reactive gas may be converted into a plasma state, thereby forming a metal nitride coating layer on a substrate; introducing a carbon layer-forming gas containing a carbonaceous gas to the reaction chamber; and applying a voltage to the reaction chamber so that the carbonaceous gas is converted into a plasma state, thereby forming a carbon coating layer on the metal nitride coating layer, wherein the step of introducing a metal nitride coating layer-forming gas to a reaction chamber, the step of forming a metal nitride coating layer, the step of introducing a carbon layer-forming gas to the reaction chamber, and the step of forming a carbon coating layer are repeated 5 to 50 times, wherein the metal nitride coating layer includes metal nitride in an amount of 10 at % to 30 at %, and wherein the carbon coating layer includes carbon with an SP2 structure and carbon with an SP3 structure. 2. The method for coating a separator for a fuel cell of claim 1 , wherein the metal nitride precursor is a material selected from the group consisting of titanium nitride, chromium nitride, molybdenum nitride, tungsten nitride, copper nitride, and niobium nitride precursor. 3. The method for coating a separator for a fuel cell of claim 1 , wherein the metal nitride precursor comprises a compound represented by the following Chemical Formula 1: wherein each of R 1 to R 8 independently represents a substituted or non-substituted C1 to C10 alkyl group, and Me is Ti, Cr, Mo, W, Cu, or Nb. 4. The method for coating a separator for a fuel cell of claim 3 , wherein: the metal nitride precursor further comprises a compound represented by the following Chemical Formula 2 wherein each of R 9 to R 16 independently represents a substituted or non-substituted C1 to C10 alkyl group, and Me is Ti, Cr, Mo, W, Cu, or Nb. 5. The method for coating a separator for a fuel cell of claim 4 , wherein each of R 1 to R 16 represents a methyl group (CH 3 ). 6. The method for coating a separator for a fuel cell of claim 1 , wherein the step of vaporizing a metal nitride precursor to obtain a precursor gas is carried out at a temperature ranging from 50° C. to 80° C. 7. The method for coating a separator for a fuel cell of claim 1 , wherein the reactive gas is one of a nitrogen compound gas and a nitrogen gas. 8. The method for coating a separator for a fuel cell of claim 7 , wherein the reactive gas is one of NH 3 and N 2 . 9. The method for coating a separator for a fuel cell of claim 1 , wherein the carbonaceous gas is selected from the group consisting of C 2 H 2 , CH 4 , C 6 H 12 , C 7 H 14 , and combinations thereof. 10. The method for coating a separator for a fuel cell of claim 1 , wherein the metal nitride coating layer-forming gas further comprises an inert gas and hydrogen gas. 11. The method for coating a separator for a fuel cell of claim 1 , wherein the carbon coating layer-forming gas further comprises an inert gas. 12. The method for coating a separator for a fuel cell of claim 1 , wherein the step of forming a metal nitride coating layer and the step of forming a carbon coating layer are carried out at a temperature ranging from 100° C. to 200° C. 13. The method for coating a separator for a fuel cell of claim 1 further comprising a step of introducing a reactive gas to the reaction chamber and activating the plasma to carry out nitriding of a topmost layer.
using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title
Pulsed gas flow or change of composition over time · CPC title
Fuel cells in motive systems, e.g. vehicle, ship, plane · CPC title
Manufacturing processes of separators, membranes or diaphragms · CPC title
including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides · CPC title
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