Method and apparatus for load-locked printing

Patent metadata

Field	Value
Publication number	US-11230757-B2
Application number	US-202016949412-A
Country	US
Kind code	B2
Filing date	Oct 28, 2020
Priority date	Jun 13, 2008
Publication date	Jan 25, 2022
Grant date	Jan 25, 2022

Abstract

The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.

First claim

What is claimed is:

1. A method for forming a film on a substrate, the method comprising:
floating a substrate on a flotation system in a substrate-printing region having an inert gas environment, the floatation system comprising at least one gas inlet port and at least one gas outlet port;
while floating the substrate in the substrate-printing region:
moving the substrate in a first direction and moving at least one print-head in a second direction, the first and second directions being substantially orthogonal to each other,
controlling a float height of the substrate using gas flow through the at least one gas inlet port and the at least one gas outlet port, and
printing a material on a surface of the substrate with the at least one print-head having at least one nozzle,
wherein each of the first and second directions is substantially orthogonal to a direction normal to the surface of the substrate the material is printed on;

transporting the substrate to a substrate-outlet region; and
removing the substrate from the substrate-outlet region.

2. The method of claim 1 , further comprising transporting the substrate to the substrate-printing region from a substrate-inlet region having an inert gas environment.

3. The method of claim 2 , further comprising receiving the substrate at the substrate-inlet region, isolating the substrate-inlet region, and forming the inert gas environment prior to transporting the substrate to the substrate-printing region.

4. The method of claim 2 , wherein the substrate-inlet region and the substrate-outlet region are the same region.

5. The method of claim 1 , wherein the substrate-printing region and the substrate-outlet region are enclosed in a housing and separated by a partition.

6. The method of claim 5 , wherein the partition is a gate.

7. The method of claim 1 , further comprising, while floating the substrate in the substrate-printing region, isolating the substrate-printing region.

8. The method of claim 1 , further comprising aligning the substrate along the first direction before printing the material on the substrate.

9. The method of claim 1 , further comprising after transporting the substrate to the substrate-outlet region, isolating the substrate-printing region from the substrate-outlet region.

10. A method for forming a film on a substrate, the method comprising:
floating a substrate on a flotation system in a substrate-printing region having an inert gas environment comprising nitrogen gas, the floatation system comprising at least one gas inlet port and at least one gas outlet port;
while floating the substrate in the substrate-printing region:
moving the substrate in a first direction and moving at least one print-head in a second direction, the first and second directions being substantially orthogonal to each other,
controlling a float height of the substrate using gas flow through the at least one gas inlet port and the at least one gas outlet port, the gas flow comprising an inert gas, and
printing a material on a surface of the substrate with the at least one print-head having at least one nozzle,
wherein each of the first and second directions is substantially orthogonal to a direction normal to the surface of the substrate the material is printed on;

transporting the substrate to a substrate-outlet region; and
removing the substrate from the substrate-outlet region.

11. The method of claim 10 , wherein printing the material on the surface of the substrate comprises printing the material in a pattern on the surface of the substrate.

12. The method of claim 11 , wherein the material is printed in a pattern on the surface of the substrate to form a display device.

13. The method of claim 10 , wherein the material comprises an organic material.

14. The method of claim 13 , wherein the organic material comprises an OLED material.

15. The method of claim 10 , wherein the print-head comprises an ink chamber in flow communication with a nozzle.

16. The method of claim 10 , wherein the at least one print-head is an inkjet print-head.

17. The method of claim 10 , wherein:
the at least one print-head comprises an energizing element, and
in response to energizing of the energizing element, the at least one print-head is actuated to dispense a metered quantity of ink.

18. A method for forming a film on a substrate, the method comprising:
receiving a substrate in a substrate-inlet region of a printing system enclosure;
isolating the substrate-inlet region;
establishing an inert gas environment in the substrate-inlet region;
transporting the substrate from the substrate-inlet region to a substrate-printing region of the printing system enclosure;
floating the substrate on a flotation system in the substrate-printing region, the floatation system comprising at least one gas inlet port and at least one gas outlet port;
establishing an inert gas environment in the substrate-printing region;
while floating the substrate in the substrate-printing region:
moving the substrate in a first direction and moving at least one print-head in a second direction, the first and second directions being substantially orthogonal to each other,
controlling a float height of the substrate using gas flow through the at least one gas inlet port and the at least one gas outlet port, the gas flow comprising an inert gas, and
printing a material on a surface of the substrate with the at least one print-head having at least one nozzle,

wherein each of the first and second directions is substantially orthogonal to a direction normal to the surface of the substrate the material is printed on;
transporting the substrate to a substrate-outlet region of the printing system enclosure; and
removing the substrate from the substrate-outlet region.

19. The method of claim 18 , wherein the substrate-inlet region and the substrate-outlet region are the same region of the printing system enclosure.

20. The method of claim 18 , wherein the material comprises an organic material.

Assignees

• Kateeva Inc

Inventors

• Somekh Sass
• Vronsky Eliyahu
• Madigan Conor F

Classifications

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/36

  using air tracks · CPC title

• B41J2/16523

  Waste ink transport from caps or spittoons, e.g. by suction (Collecting or collectors of waste ink B41J2/1721) · CPC title

• B41J2/16508

  connected with the printer frame · CPC title

• C23C4/137 Primary

  Spraying in vacuum or in an inert atmosphere · CPC title