Substrate storage container with umbrella-shaped seal lip

Patent metadata

Field	Value
Publication number	US-11230427-B2
Application number	US-201917041461-A
Country	US
Kind code	B2
Filing date	Mar 1, 2019
Priority date	Mar 28, 2018
Publication date	Jan 25, 2022
Grant date	Jan 25, 2022

Abstract

Corrosion resistance of valves is enhanced, while ensuring the check valve function of the valves against an inflow of outside air. Disclosed is a substrate storage container that includes: a container body for storing at least one substrate; a lid for closing an opening of the container body; and at least one valve for controlling gas flow to the container body or from the container body. The at least one valve includes an elastic, non-metallic seal lip in a communication passage that extends in a first direction and communicates between an outside of the container body and an inside of the container body. The seal lip has an umbrella-like form which closes on one side in the first direction and opens on the other side in the first direction, the seal lip abutting an inner peripheral wall of the communication passage on the other side.

First claim

The invention claimed is:

1. A substrate storage container, comprising:
a container body for storing at least one substrate;
a lid for closing an opening of the container body; and
at least one valve for controlling gas flow to the container body or from the container body,
wherein the at least one valve comprises a shaft portion that extends along a first direction and an elastic, non-metallic seal lip in a communication passage that extends in the first direction and communicates between an outside of the container body and an inside of the container body, and
wherein the seal lip extends around the shaft portion when viewed in the first direction to form a substantially umbrella shape which closes to be coupled to the shaft portion on one side in the first direction and opens on the other side in the first direction,
wherein the communication passage is partitioned by the seal lip into a first passage that communicates with the outside of the container body and a second passage that communicates with the inside of container body, and
wherein an end of the seal lip on the other side is configured to elastically deform in a manner away from the inner peripheral wall of the communication passage to fluidly connect the first passage to the second passage when a pressure to the seal lip applied from a close side toward an open side of the substantially umbrella shape is higher than a pressure to the seal lip applied from the open side toward the close side of the substantially umbrella shape by a predetermined value or more, otherwise the end of the seal lip on the other side abuts an inner peripheral wall of the communication passage to block the fluid communication between the first passage and the second passage.

2. The substrate storage container according to claim 1 , further comprising:
a first circular cylindrical part and a second circular cylindrical part which abut each other in the first direction and form the communication passage, and
wherein at least one of the first circular cylindrical part and the second circular cylindrical part supports an end of the shaft portion in the first direction.

3. The substrate storage container according to claim 2 ,
wherein the first circular cylindrical part supports one end side of the shaft portion in the first direction, and
the second circular cylindrical part supports the other end side of the shaft portion in the first direction.

4. The substrate storage container according to claim 2 ,
wherein a position where the first circular cylindrical part and the second circular cylindrical part abut in the first direction is located on the other side in the first direction than a position where the seal lip abuts the inner peripheral wall.

5. The substrate storage container according to claim 1 ,
wherein the seal lip has a first region and a second region in a circumferential direction about a center when viewed in the first direction, the first region and the second region having different thicknesses.

6. The substrate storage container according to claim 5 ,
wherein the first region has a substantially strip form extending from the one side to the other side, the first region having the thickness greater than the thickness of the second region.

7. The substrate storage container according to claim 6 ,
wherein the first region is provided at a plurality of locations in a manner away from each other in the circumferential direction about a center when viewed in the first direction.

Assignees

• Shinetsu Polymer Co

Inventors

• Ogawa Osamu

Classifications

• H10P72/10

  using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] · CPC title

• H10P72/1924

  characterised by atmosphere control · CPC title

• H10P72/1916

  characterised by sealing arrangements · CPC title

• H10P72/19

  closed carriers · CPC title

• H10P72/14 Primary

  Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title