Displacement devices and methods for fabrication, use and control of same

Patent metadata

Field	Value
Publication number	US-11228232-B2
Application number	US-201916715876-A
Country	US
Kind code	B2
Filing date	Dec 16, 2019
Priority date	Oct 27, 2011
Publication date	Jan 18, 2022
Grant date	Jan 18, 2022

Abstract

Displacement devices comprise a stator and a moveable stage. The stator comprises a plurality of coils shaped to provide pluralities of generally linearly elongated coil traces in one or more layers. Layers of coils may overlap in the Z-direction. The moveable stage comprises a plurality of magnet arrays. Each magnet array may comprise a plurality of magnetization segments generally linearly elongated in a corresponding direction. Each magnetization segment has a magnetization direction generally orthogonal to the direction in which it is elongated and at least two of the magnetization directions are different from one another. One or more amplifiers may be connected to selectively drive current in the coil traces and to thereby effect relative movement between the stator and the moveable stage.

First claim

What is claimed is:

1. A method for effecting displacement of a moveable stage between first and second stators, the method comprising:
providing a first independently controllable stator comprising:
a first first plurality of coil traces distributed over a first first layer at a corresponding first first stator Z-location, the first first plurality of coil traces generally linearly elongated in a stator X-direction in the first first layer; and
a first second plurality of coil traces distributed over a first second layer at a corresponding first second stator Z-location, the first second plurality of coil traces generally linearly elongated in a stator Y-direction in the first second layer, the stator Y-direction generally orthogonal to the stator X-direction;
the first first and first second layers overlapping one another in a stator Z-direction, the stator Z-direction generally orthogonal to both the stator X-direction and the stator Y-direction;

providing a second independently controllable stator adjacent to the first stator, the second stator comprising:
a second first plurality of coil traces distributed over a second first layer at a corresponding second first stator Z-location, the second first plurality of coil traces generally linearly elongated in the stator X-direction in the second first layer; and
a second second plurality of coil traces distributed over a second second layer at a corresponding second second stator Z-location, the second second plurality of coil traces generally linearly elongated in the stator Y-direction in the second second layer;
the second first and second second layers overlapping one another in the stator Z-direction; and

providing the moveable stage comprising:
a first magnet array comprising a plurality of first magnetization segments wherein at least two of the first magnetization segments have magnetization directions that are different from one another; and

causing the moveable stage to move in the stator X-direction from the first stator to the second stator, wherein causing the moveable stage to move in the stator X-direction from the first stator to the second stator comprises:
when a first portion of the moveable stage overlaps with the first stator in the stator Z-direction, selectively driving current in at least one coil trace of the first second plurality of coil traces to thereby effect movement of the moveable stage in the stator X-direction relative to the first stator;
allowing the moveable stage to move in the stator X-direction at least until a second portion of the moveable stage is overlapping with the second stator in the stator Z-direction;
when the second portion of the moveable stage overlaps with the second stator in the stator Z-direction, controlling the moveable stage in the stator X-direction by selectively driving current in at least one coil trace of the second second plurality of coil traces.

2. The method according to claim 1 wherein when the first portion of the moveable stage overlaps with the first stator in the stator Z-direction, the first portion of the moveable stage overlaps with the at least one coil trace of the first second plurality of coil traces in the stator Z-direction.

3. The method according to claim 1 wherein when the second portion of the moveable stage overlaps with the second stator in the stator Z-direction, the second portion of the moveable stage overlaps with the at least one coil trace of the second second plurality of coil traces in the stator Z-direction.

4. The method according to claim 1 comprising:
when the first portion of the moveable stage overlaps with the first stator in the stator Z-direction and the second portion of the moveable stage overlaps with the second stator in the stator Z-direction simultaneously, selectively driving current in the at least one coil trace of the first second plurality of coil traces and selectively driving current in the at least one coil trace of the second second plurality of coil traces simultaneously to thereby control the moveable stage in the stator X-direction.

5. The method according to claim 1 comprising:
reducing current in the at least one coil trace of the first second plurality of coil traces when the second portion of the moveable stage is overlapping with the second stator in the stator Z-direction.

6. The method according to claim 1 comprising:
stopping current in the at least one coil trace of the first second plurality of coil traces when the second portion of the moveable stage is overlapping with the second stator in the stator Z-direction.

7. The method according to claim 1 comprising employing a position measurement system to determine when the second portion of the moveable stage is overlapping with the second stator.

8. The method according to claim 7 wherein the position measurement system comprises a plurality of Hall-effect sensors.

9. The method according to claim 1 comprising controlling the moveable stage in the stator Y-direction while causing the moveable stage to move from the first stator to the second stator in the stator X-direction.

10. The method according to claim 9 wherein controlling the moveable stage in the stator Y-direction comprises selectively driving current in the first first plurality of coil traces.

11. The method according to claim 9 wherein controlling the moveable stage in the stator Y-direction comprises selectively driving current in the second first plurality of coil traces.

12. The method according to claim 1 wherein allowing the moveable stage to move in the stator X-direction at least until a second portion of the moveable stage is overlapping with the second stator in the stator Z-direction comprises using momentum of the moveable stage to cause the moveable stage to move in the stator X-direction at least until the second portion of the moveable stage overlaps with the second stator in the stator Z-direction.

13. The method according to claim 1 wherein each first magnetization segment is generally linearly elongated in a stage Y-direction and has a magnetization direction generally orthogonal to the stage Y-direction.

14. The method according to claim 13 wherein the moveable stage comprises:
a second magnet array comprising a plurality of second magnetization segments generally linearly elongated in a stage X-direction generally orthogonal to the stage Y-direction, each second magnetization segment having a magnetization direction generally orthogonal to the stage X-direction wherein at least two of the second magnetization segments have magnetization directions that are different from one another.

15. The method according to claim 14 wherein the moveable stage comprises:
a third magnet array comprising a plurality of third magnetization segments generally linearly elongated in the stage Y-direction, each third magnetization segment having a magnetization direction generally orthogonal to the stage Y-direction and at least two of the third magnetization segments having magnetization directions that are different from one another; and
a fourth magnet array comprising a plurality of fourth magnetization segments generally linearly elongated in the stage X-direction, each fourth magnetization segment having a magnetization direction generally orthogonal to the stage X-direction and at least two of the fourth magnetization segments having magnetization directions that are different from one another.

16. The method according to claim 15 wherein the stage locations of the first and third magnet arrays are offset from one another in the stage Y-direction and the second a

Assignees

• Univ British Columbia

Inventors

• Lu Xiaodong
• Usman Irfan-Ur-Rab

Classifications

• H10P72/00

  Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title

• H02K21/24 Primary

  with magnets axially facing the armatures, e.g. hub-type cycle dynamos · CPC title

• H02P25/064

  of the synchronous type · CPC title

• H02K2201/18

  Machines moving with multiple degrees of freedom · CPC title

• H02K7/09

  with magnetic bearings · CPC title