Electrical feeds with low loss coating materials for high temperature electrostatic chucks
US-2018337081-A1 · Nov 22, 2018 · US
US11224099B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11224099-B2 |
| Application number | US-201816128344-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 11, 2018 |
| Priority date | Jul 5, 2012 |
| Publication date | Jan 11, 2022 |
| Grant date | Jan 11, 2022 |
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A mineral insulated heating cable for a heat tracing system. The heating cable includes a sheath having at least a first, and optionally a second layer, wherein the thermal conductivity of the second layer is greater than a thermal conductivity of the first layer. In addition, the first and second layers are in intimate thermal contact. The heating cable also includes at least one heating conductor for generating heat and a dielectric layer located within the sheath for electrically insulating the heating conductor, wherein the sheath, heating conductor and dielectric layer form a heating section. In addition, the heating cable includes a conduit for receiving the heating section. Further, the heating cable includes a cold lead section and a hot-cold joint for connecting the heating and cold lead sections. In addition, a high emissivity coating may be formed on the first layer.
Opening claim text (preview).
The invention claimed is: 1. A mineral insulated heating cable for a heat tracing system, comprising: a sheath; at least one heating conductor located within the sheath; a dielectric layer located within the sheath for electrically insulating the heating conductor, wherein the sheath, heating conductor and dielectric layer form a heating section; and a conduit, wherein a full length of the heating section is located within the conduit, the conduit defining an internal cavity sized to create a gap separating the heating section from an interior surface of the conduit along the full length of the heating section so that heat generated by the heating section is transferred to the conduit by radiation. 2. The mineral insulated heating cable of claim 1 , wherein the conduit is corrugated. 3. The mineral insulated heating cable of claim 1 , wherein a surface area of the interior surface of the conduit is at least approximately 2.5 times greater than an outer surface area of the heating section. 4. The mineral insulated heating cable of claim 1 , wherein the heating section is sealed within the conduit via fittings coupled to respective ends of the conduit to provide isolation from environmental conditions. 5. The mineral insulated heating cable of claim 1 and further comprising a cold lead section and a hot-cold joint configured to connect the heating and cold lead sections. 6. The mineral insulated heating cable of claim 5 , wherein the hot-cold joint is located at least partially within the conduit and the cold lead section extends out of the conduit. 7. The mineral insulated heating cable of claim 1 and further comprising a high emissivity coating applied to the sheath, the coating having an emissivity value of at least 0.6. 8. The mineral insulated heating cable of claim 1 , wherein the sheath includes an outer surface that is one of oxidized to form an oxidized layer or subjected to a black anodizing process to form an anodized layer.
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